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Zeitschrift

Microsystem Technologies

Microsystem Technologies 5/2010

Ausgabe 5/2010

Special Issue of the Conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE Europe Symposium ‘Microtechnologies for the New Millennium’ Dresden, Germany, 4–6 May 2009

Inhaltsverzeichnis ( 28 Artikel )

01.05.2010 | Editorial | Ausgabe 5/2010

Special Issue of the Conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE Europe Symposium ‘Microtechnologies for the New Millennium’ Dresden, Germany, 4–6 May 2009

Thomas Becker, Ulrich Schmid, Bernd Michel

01.05.2010 | Technical Paper | Ausgabe 5/2010

Vibration energy scavenging via piezoelectric bimorphs of optimized shapes

Denis Benasciutti, Luciano Moro, Saša Zelenika, Eugenio Brusa

01.05.2010 | Technical Paper | Ausgabe 5/2010

Growth of ZnO nanorods on patterned templates for efficient, large-area energy scavengers

G. Niarchos, E. Makarona, C. Tsamis

01.05.2010 | Technical Paper | Ausgabe 5/2010

Magnetic resonant harvesters and power management circuit for magnetic resonant harvesters

Tomáš Jirků, Pavel Fiala, Martin Kluge

01.05.2010 | Technical Paper | Ausgabe 5/2010

Power sensitivity of vibration energy harvester

Zdenek Hadas, Cestmir Ondrusek, Vladislav Singule

01.05.2010 | Technical Paper | Ausgabe 5/2010

Piezoresistive biochemical sensors based on hydrogels

Margarita Guenther, Gerald Gerlach, Thomas Wallmersperger

01.05.2010 | Technical Paper | Ausgabe 5/2010

Gel-based biochip for the detection of airborne contaminants

Katrin Schmitt, Gerd Sulz, Thorsten Klockenbring, Björn Seidel, Andreas Holländer

01.05.2010 | Technical Paper | Ausgabe 5/2010

Manufacturing, assembling and packaging of miniaturized neural implants

Thomas Stieglitz

01.05.2010 | Technical Paper | Ausgabe 5/2010

Adsorption–desorption noise in plasmonic chemical/biological sensors for multiple analyte environment

Olga Jakšić, Zoran Jakšić, Jovan Matović

01.05.2010 | Technical Paper | Ausgabe 5/2010

Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems: design, fabrication, characterization and optimization

J. Hildenbrand, C. Peter, F. Lamprecht, A. Kürzinger, F. Naumann, M. Ebert, R. Wehrspohn, J. G. Korvink, J. Wöllenstein

01.05.2010 | Technical Paper | Ausgabe 5/2010

A comparative analyze of fundamental noise in cantilever sensors based on lateral and longitudinal displacement: case of thermal infrared detectors

Jovan Matović, Zoran Jakšić

01.05.2010 | Technical Paper | Ausgabe 5/2010

Tactile sensors based on conductive polymers

Julián Castellanos-Ramos, Rafael Navas-González, Haritz Macicior, Tomasz Sikora, Estíbalitz Ochoteco, Fernando Vidal-Verdú

01.05.2010 | Technical Paper | Ausgabe 5/2010

A dynamical envelope model for vibratory gyroscopes

Markus Egretzberger, Andreas Kugi

01.05.2010 | Technical Paper | Ausgabe 5/2010

MEMS fluxgate magnetometer for parallel robot application

Maren Ramona Kirchhoff, Stephanus Büttgenbach

01.05.2010 | Technical Paper | Ausgabe 5/2010

High-resolution eddy current sensor system for quality assessment of carbon fiber materials

Martin H. Schulze, Henning Heuer, Martin Küttner, Norbert Meyendorf

01.05.2010 | Technical Paper | Ausgabe 5/2010

Adhesive wafer bonding with photosensitive polymers for MEMS fabrication

Erkan Cakmak, Viorel Dragoi, Elliott Capsuto, Craig McEwen, Eric Pabo

01.05.2010 | Technical Paper | Ausgabe 5/2010

Influence of a chip scale package on the frequency response of a MEMS microphone

Matthias Winter, Gregor Feiertag, Anton Leidl, Helmut Seidel

01.05.2010 | Technical Paper | Ausgabe 5/2010

Flip chip packaging for MEMS microphones

Gregor Feiertag, Matthias Winter, Anton Leidl

01.05.2010 | Technical Paper | Ausgabe 5/2010

Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering

Michaela Grosser, M. Münch, J. Brenner, M. Wilke, H. Seidel, C. Bienert, A. Roosen, U. Schmid

01.05.2010 | Technical Paper | Ausgabe 5/2010

Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

Tomás Manzaneque, J. Hernando, L. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, J. L. Sánchez-Rojas

01.05.2010 | Technical Paper | Ausgabe 5/2010

Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials

Christian Bolzmacher, Karin Bauer, Ulrich Schmid, Moustapha Hafez, Helmut Seidel

01.05.2010 | Technical Paper | Ausgabe 5/2010

Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators

Jorge Hernando, Jose Luis Sánchez-Rojas, Ulrich Schmid, Abdallah Ababneh, Günter Marchand, Helmut Seidel

01.05.2010 | Technical Paper | Ausgabe 5/2010

Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process

Ü. Sökmen, A. Stranz, S. Fündling, S. Merzsch, R. Neumann, H.-H. Wehmann, E. Peiner, A. Waag

01.05.2010 | Technical Paper | Ausgabe 5/2010

What happens turning a 250-μm-thin piezo-stack sideways?

Sandy Zaehringer, Norbert Schwesinger

01.05.2010 | Technical Paper | Ausgabe 5/2010

Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems

Saskia Biehl, Sebastian Staufenbiel, Frank Hauschild, André Albert

01.05.2010 | Technical Paper | Ausgabe 5/2010

Single crystalline silicon based surface micromachining for high precision inertial sensors: technology and design for reliability

R. Knechtel

01.05.2010 | Technical Paper | Ausgabe 5/2010

Design of self-assembling micromirror arrays for light guiding applications

Qingdang Li, Andreas Jäkel, Volker Viereck, Hartmut Hillmer

01.05.2010 | Technical Paper | Ausgabe 5/2010

MOEMS translatory actuator characterisation, position encoding and closed-loop control

M. Lenzhofer, A. Tortschanoff, A. Frank, T. Sandner, H. Schenk, M. Kraft, A. Kenda

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