Ausgabe 5/2012
Inhalt (16 Artikel)
Fabrication of PZT nano dot array and their ferroelectric properties
- Technical Paper
Gaoyang Zhao, Zhezhe Wang, Guomin Xu, Xiaocui Deng
A novel DMTL capacitive switch with electrostatic actuation MAM capacitors
- Technical Paper
Cheng Deng, Jingfu Bao, Yijia Du, Xinghai Zhao
A passive mechanism for thermal stress regulation in micro-machined beam-type structures
- Technical Paper
Pezhman A. Hassanpour, Patricia M. Nieva, Amir Khajepour
Robust regulation and tracking system design for multivariable control of the tape transport mechanism
- Technical Paper
Hamed Moradi, Firooz Bakhtiari-Nejad, Aria Alasty
Multi-dofs MEMS displacement sensors based on the Stewart platform theory
- Technical Paper
Andrea Mura
Manufacturing and replication of glass pyramidal micro-structures by using the injection moulding process
- Technical Paper
M. Sahli, C. Millot, J.-C Gelin, T. Barrière
Piezoresistive polypropylene–carbon nanofiber composites as mechanical transducers
- Technical Paper
A. J. Paleo, F. W. J. van Hattum, J. G. Rocha, S. Lanceros-Méndez
Measurement of contact potential difference in head disk interface by readback signal spectrum
- Technical Paper
Mingsheng Zhang, Bo Liu
Polyimide/tetraethoxysilane-based hybrid polyfilms for microelectronics application
- Technical Paper
S. K. Kurmvanshi, P. R. Patel, A. K. Patel, R. Bajpai, J. M. Keller
A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane
- Technical Paper
Luca Petricca, Christopher Grinde, Per Ohlckers
Fabrication of polymer micro-tip by optical lensing technique
- Technical Paper
Pradip Kumar Dey, Soumen Das, Pranabendu Ganguly
Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array
- Technical Paper
Tugrul Zure, Sazzadur Chowdhury
Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes
- Technical Paper
Li Yan, Fan Shangchun, Guo Zhanshe, Li Jing, Cao Le
Investigation of wax and paper materials for the fabrication of paper-based microfluidic devices
- Technical Paper
Z. W. Zhong, Z. P. Wang, G. X. D. Huang
Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods
- Technical Paper
Davoud Jahani, Sivakumar Narayanswamy, Muthukumaran Packirisamy, Murali Manohohar Pai
Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts
- Technical Paper
Yang Mu, Ke Chen, W. J. Meng, Fanghua Mei
