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Microsystem Technologies

Ausgabe 5/2018

Inhalt (35 Artikel)

Stability and nonlinear dynamical analysis of functionally graded microplates

  • Technical Paper

Hamed Farokhi, Mergen H. Ghayesh, Alireza Gholipour, Mohammad Tavallaeinejad

Resonant responses of three-layered shear-deformable microbeams

  • Technical Paper

Hamed Farokhi, Mergen H. Ghayesh, Alireza Gholipour , Shahid Hussain

Wafer-level vacuum package of two-dimensional micro-scanner

  • Technical Paper

Hoang Manh Chu, Takashi Sasaki, Kazuhiro Hane

Effect of geometrical parameters on radiometric force in low-pressure MEMS gas actuator

  • Technical Paper

M. Barzegar Gerdroodbary, D. D. Ganji, M. Taeibi-Rahni, Shidvash Vakilipour

Sensitivity analysis of an in-plane MEMS vibratory gyroscope

  • Technical Paper

P. Krishna Menon, Jagannath Nayak, Rudra Pratap

Research of a non-linearity control algorithm for UAV target tracking based on fuzzy logic systems

  • Technical Paper

Chaoying Pei, Jingjuan Zhang, Xueyun Wang, Qian Zhang

Digital platform for Sigma-Delta accelerometer assessment and test

  • Technical Paper

Vasco Lima, Nuno Brito, Jorge Cabral, João Monteiro, João Gaspar, Luis Alexandre Rocha

Single layer thin photoresist soft etch mask for MEMS applications

  • Technical Paper

Robin Joyce, Deepak Kumar Panwar, Moh. Shakil, Soney Varghese, Jamil Akhtar

Electrodeposition of Si–DLC nanocomposite film and its electronic application

  • Technical Paper

Necati Basman, Rukiye Uzun, Ebru Gocer, Emin Bacaksiz, Ugur Kolemen

Fin shape influence on analog and RF performance of junctionless accumulation-mode bulk FinFETs

  • Technical Paper

Kalyan Biswas, Angsuman Sarkar, Chandan Kumar Sarkar

Fabricated polycarbonate microchannel with different films using CO2 laser beam of two-pass for microfluidic chip

  • Technical Paper

Zengliang Hu, Xueye Chen, Zhen Yao, Xiaodong Chen, Baoding Fu, Lei Zhang

Optimization of MEMS coil structure parameters for wireless power transfer system based on magnetic resonance

  • Technical Paper

Dongdong Xu, Wei Xu, Xiuhan Li, Guowu Wei, Haiyang Guo, Chenlin Du

Multiport RF MEMS switch for satellite payload applications

  • Technical Paper

M. Bala Subramanian, C. Joshitha, B. S. Sreeja, Prita Nair

Towards macroporous phononic crystal based structures for FBAR applications. Theoretical investigation of technologically competitive solutions

  • Technical Paper

Aleksandr Oseev, Nikolay V. Mukhin, Ralf Lucklum, Mikhail Zubtsov, Marc-Peter Schmidt, Dmitrii Redka, Andrey Kozyrev, Soeren Hirsch

Electro-thermal analysis of an Al–Ti multilayer thin film microheater for MEMS thruster application

  • Technical Paper

Xingchen Li, Yiyong Huang, Xiaoqian Chen, Xiangming Xu, Dingbang Xiao

A quick method to fabricate large glass micromodel networks

  • Technical Paper

M. Mahmoodi, S. Mahdavi, Lesley Anne James, T. Johansen

Guitar tuner using cepstral analysis and fuzzy controller on arduino board

  • Technical Paper

Arvind Kumar, Sumit Srivastava, Mahesh Chandra, G. Sahoo

Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity

  • Technical Paper

K. Hari, Satish Kumar Verma, I. R. Praveen Krishna, V. Seena

Structure design and test of MEMS thermocouple infrared detector

  • Technical Paper

Cao Lian-min, Zhang Ya-zhu, Sun Shi-jiao, Guo Hui, Zhang Zhen

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