Ausgabe 5-6/2007 HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 Jnue 2005 (This is the second of two issues)
Inhalt (29 Artikel)
Analysis of the demolding forces during hot embossing
- Technical Paper
Yuhua Guo, Gang Liu, Xuelin Zhu, Yangchao Tian
Large area and wide dimensions X-ray lithography using energy variable synchrotron radiation
- Technical Paper
Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori, Hirotsugu Hara
Planar microreactor for biochemical application made from silicon and polymer films
- Technical Paper
Yuichi Utsumi, Yusuke Hitaka, Katsuhiro Matsui, Masahiro Takeo, Seiji Negoro, Yoshiaki Ukita
Proton beam writing: a tool for high-aspect ratio mask production
- Technical paper
J. A. van Kan, P. G. Shao, K. Ansari, A. A. Bettiol, T. Osipowicz, F. Watt
Fluid filter fabricated by deep X-ray lithography for micro fluidics
- Technical paper
Yoshiaki Ukita, Toshifumi Asano, Yuichi Utsumi
Fabrication of a micro reactor for vertical unit operation using multifunctional fluid filter and its application to biochemical reaction
- Technical Paper
Toshifumi Asano, Yoshiaki Ukita, Katsuhiro Matsui, Masahiro Takeo, Seiji Negoro, Yuichi Utsumi
Deep microstructuring in glass for microfluidic applications
- Technical Paper
Chantal Khan Malek, Laurent Robert, Jean-Jacques Boy, Pascal Blind
Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology
- Technical Paper
S. C. Chen, C. H. Cheng, Y. C. Lin
Parameter optimization for an ICP deep silicon etching system
- Technical Paper
S. C. Chen, Y. C. Lin, J. C. Wu, L. Horng, C. H. Cheng
Revisiting micro hot-embossing with moulds in non-conventional materials
- Technical Paper
Chantal Khan Malek, Jean-René Coudevylle, Jean-Claude Jeannot, Roland Duffait
Nanostructures on microstructured surfaces
- Technical paper
Alexander Disch, Jörg Mick, Benedikt Bläsi, Claas Müller
Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures
- Technical paper
K. D. Vora, A. G. Peele, B.-Y. Shew, E. C. Harvey, J. P. Hayes
Metal micromolding: further experiments and preliminary finite element analysis
- Technical paper
D. M. Cao, J. Jiang, W. J. Meng, G. B. Sinclair
Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining
- Technical paper
D. M. Cao, J. Jiang, W. J. Meng, J. C. Jiang, W. Wang
Production issues for high aspect ratio Lobster-eye optics using LIGA
- Technical paper
A. G. Peele, K. D. Vora, B.-Y. Shew, B. Loechl, E. C. Harvey, J. P. Hayes
Polymeric microneedle fabrication using a microinjection molding technique
- Technical paper
Firas Sammoura, JeongJin Kang, Young-Moo Heo, TaeSung Jung, Liwei Lin
Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments
- Technical paper
C. K. Chung, Y. Z. Hong
Fabrication of the monolithic polymer–metal microstructure by the backside exposure and electroforming technology
- Technical paper
C. K. Chung, Y. Z. Hong, W. T. Chang
Effect of pulse frequency on the morphology and nanoindentation property of electroplated nickel films
- Technical paper
C. K. Chung, W. T. Chang
Fabrication of diffraction grating for X-ray Talbot interferometer
- Technical Paper
Masatake Matsumoto, Kinji Takiguchi, Makoto Tanaka, Yoichi Hunabiki, Hiroaki Takeda, Atsushi Momose, Yuichi Utsumi, Tadashi Hattori
Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization
- Technical paper
Hiroaki Mochizuki, Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada, Tadashi Hattori
A novel reluctance actuator employing an embedded ferromagnetic foil
- Technical Paper
A. Waldschik, M. Feldmann, S. Büttgenbach
Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors
- Technical paper
M. Feldmann, A. Waldschik, S. Büttgenbach
A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation
- Technical Paper
Yeolho Lee, Geunbae Lim, Wonkyu Moon
Study on the method for the reliability test of focused ion beam
- Technical paper
Sang H. Lee, Hyun-Wook Kang, Dong-Woo Cho, Wonkyu Moon
Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
- Technical Paper
Sang H. Lee, Pan K. Kim, Wonkyu Moon, Geunbae Lim
Effect of irradiation on the surface microhardness of pure poly(vinyl fluoride), poly(vinylidene fluoride) and their isomorphic blends
- Technical paper
A. K. Gupta, R. Bajpai, J. M. Keller
UV nano embossing for polymer nano structures with non-transparent mold insert
- Technical paper
Hyun Sup Lee, Dong Sung Kim, Tai Hun Kwon
Replication of high-aspect-ratio nanopillar array for biomimetic gecko foot-hair prototype by UV nano embossing with anodic aluminum oxide mold
- Technical paper
Dong Sung Kim, Hyun Sup Lee, Junghyun Lee, Sungjoo Kim, Kun-Hong Lee, Wonkyu Moon, Tai Hun Kwon
