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Microsystem Technologies

Ausgabe 6/2008

Inhalt (21 Artikel)

Technical Paper

The microcavity-based micro-heater: an optimum design for micro-heaters

P. Kahroba, I. Mirzaee, P. Sharifi, H. Shirvani

Technical Paper

A directly stackable microsystem onto the cultured cells for cytotoxicity tests

Hyunwoo Bang, Won Gu Lee, Hoyoung Yun, Chanil Chung, Jun Keun Chang, Dong-Chul Han

Technical Paper

Towards a stable low-voltage torsional microscanner

M. F. Daqaq, E. M. Abdel-Rahman, A. H. Nayfeh

Technical Paper

Micromachined SiO2 microcantilever for high sensitive moisture sensor

Qi Chen, Ji Fang, Hai-Feng Ji, Kody Varahramyan

Technical Paper

PNIPAM: a thermo-activated nano-material for use in optical devices

Solon Mias, Jan Sudor, Henri Camon

Technical Paper

Thermally activated solvent bonding of polymers

S. H. Ng, R. T. Tjeung, Z. F. Wang, A. C. W. Lu, I. Rodriguez, N. F. de Rooij

Technical Paper

Selection of high strength encapsulant for MEMS devices undergoing high-pressure packaging

Azrul Azlan Hamzah, Yusnira Husaini, Burhanuddin Yeop Majlis, Ibrahim Ahmad

Technical Paper

Hot embossing of microstructures: characterization of friction during demolding

M. Worgull, J. -F. Hétu, K. K. Kabanemi, M. Heckele

Technical Paper

One MEMS design tool with maximal six design flows

Honglong Chang, Jinghui Xu, Jianbing Xie, Chengliang Zhang, Zijian Yan, Weizheng Yuan

Technical Paper

Direct microscale imprinting of Al at room temperature with Si inserts

J. Jiang, Fanghua Mei, W. J. Meng, G. B. Sinclair, Sunggook Park

Technical Paper

Modeling and characterization of a micromachined artificial hair cell vector hydrophone

Binzhen Zhang, Hui Qiao, Shang Chen, Jun Liu, Wendong Zhang, Jijun Xiong, Chenyang Xue, Guojun Zhang

Technical Paper

Fabrication of curved copper micromesh sheets using flexible PDMS molds

Sun Nyeong Jung, Chang Kun Kang, Im Deok Jung, Sang Min Lee, Phill Gu Jung, Jong Soo Ko

Technical Paper

Micro assembly in a SEM chamber and the solution for collision prevention

Al. Cvetanovic, An. Cvetanovic, M. Soucek, D. Andrijasevic, W. Brenner

Technical Paper

A UML-based object-oriented approach for design and simulation of a drug delivery system

Qifeng Cui, Xuan F. Zha, Chengliang Liu, Wen F. Lu

Technical Paper

Multiphysics modeling of an IPMC microfluidic control device

Tom Johnson, Farid Amirouche

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