Microsystem Technologies

Special issue on design, test, integration and packaging of MEMS/MOEMS, 2012

Flexible integration of MEMS and IC for low-cost production of wireless sensor nodes

Jian Lu, Hideki Takagi, Yuta Nakano, Ryutaro Maeda

Electrodeposition of copper into high aspect ratio PCB micro-via using megasonic agitation

S. Costello, N. Strusevich, D. Flynn, R. W. Kay, M. K. Patel, C. Bailey, D. Price, M. Bennet, A. C. Jones, M. P. Y. Desmulliez

Fabrication of a low temperature co-fired ceramic package using powder blasting technology

Yves Lacrotte, John P. Carr, Robert W. Kay, Marc P. Y. Desmulliez

Lamination based embossing technique for LTCC

Stefan P. Wilhelm, Robert W. Kay, Mazher I. Mohammed, Yves Lacrotte, Marc P. Y. Desmulliez

The manufacturing of packaged capillary action microfluidic systems by means of CO2 laser processing

M. I. Mohammed, M. P. Y. Desmulliez

Alternative technology used to manufacture semitransparent monocrystalline silicon solar cells

Enikő Bándy, Márta Rencz

Development of local ambient gas control technologies for atmospheric MEMS process

Teruki Naito, Nobuaki Konno, Takashi Tokunaga, Toshihiro Itoh

Semitransparent monocrystalline solar cells manufactured by laser cutting and anisotropic etching

Enikő Bándy, Árpád Földváry, János Mizsei

Smoothing and surface planarization of sacrificial layers in MEMS technology

Andrea Lucibello, Emanuela Proietti, Romolo Marcelli, Giancarlo Bartolucci

A patterning technique of lead zirconate titanate thin film by ultraviolet-light

Chia-Che Wu, Chun-Hung Hsueh, Ya-Ting Chang, Chueh-Tang Chang, Kuan-Jung Chung

Asymmetric focusing microlens array fabricated using off-axis lithography

Tung-Yu Chang, Chien-Hsin Hung, Po-Sen Chang, Mao-Hsun Yeh, Hsiharng Yang

Modeling the front side plasmonics effect in nanotextured silicon surface for thin film solar cells application

Pushpa Raj Pudasaini, Arturo A. Ayon

Electromagnetic MEMS microspeaker for portable electronic devices

Iman Shahosseini, Elie Lefeuvre, Johan Moulin, Marion Woytasik, Emile Martincic, Gaël Pillonnet, Guy Lemarquand

SmCo micromolding in an aqueous electrolyte

K. Chouarbi, M. Woytasik, E. Lefeuvre, J. Moulin

Micropatterning PEDOT:PSS layers

Benoît Charlot, Gilbert Sassine, Alexandra Garraud, Brice Sorli, Alain Giani, Philippe Combette

ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon

Rosminazuin Ab Rahim, Badariah Bais, Burhanuddin Yeop Majlis, Gandi Sugandi

Simulation and experimental analysis of thermo-mechanical behavior of microresonators under dynamic loading

Marius Pustan, Corina Birleanu, Cristian Dudescu

Passive piezoelectric single-side MEMS DC current sensor with five parallel PZT plates applicable to two-wire DC electric appliances without using cord separator

Dong F. Wang, Kohei Isagawa, Takeshi Kobayashi, Toshihiro Itoh, Ryutaro Maeda

RF MEMS switches fabrication by using SU-8 technology

Andrea Lucibello, Emanuela Proietti, Flavio Giacomozzi, Romolo Marcelli, Giancarlo Bartolucci, Giorgio De Angelis

Measurement and control of the ion diffusion coefficient in a nanochannel

Yu-Tze Tsai, Kang J. Chang, Gou-Jen Wang

Dielectrophoresis measurement of bovine endothelial cells adhesion on different materials

Yi-Wei Lin, Gou-Jen Wang