Ausgabe 6/2014
Inhalt (19 Artikel)
Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater
- Review Paper
Peter Meszmer, Karla Hiller, Steffen Hartmann, Alexey Shaporin, Daniel May, Raul David Rodriguez, Jörg Arnold, Gianina Schondelmaier, Jan Mehner, Dietrich R. T. Zahn, Bernhard Wunderle
Detection principles and development of microfluidic sensors in the last decade
- Review Paper
Rahul Antony, M. S. Giri Nandagopal, Nidhin Sreekumar, N. Selvaraju
Packaging of a 3-axial piezoresistive force sensor with backside contacts
- Technical Paper
T. Kárpáti, S. Kulinyi, R. Végvári, J. Ferencz, A. Nagy, A. E. Pap, G. Battistig
Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing
- Open Access
- Technical Paper
B. Saha, M. Dirckx, D. E. Hardt, S. B. Tor, E. Liu, J. H. Chun
Investigation on the effect of different design of SCR on the change of resistance in piezoresistive micro cantilever
- Technical Paper
Khairul Anuar Abd Wahid, Hing Wah Lee, Mohd Aniq Shazni, Ishak Abd Azid
RF MEMS continuous reversible variable inductor based on a microfluidic network
- Technical Paper
Issam El Gmati, Pierre Francois Calmon, Ali Boukabache, Patrick Pons, Hatem Boussetta, Mouhamed Adel Kallala, Kamel Besbes
Capillary-based water removal cathode for an air-breathing micro direct methanol fuel cell
- Technical Paper
Xiaohong Wang, Yan’an Zhou, Litian Liu
Design and fabrication of a valveless micropump based on low temperature co-fired ceramic tape technology
- Technical Paper
Chi-Mo Huang, Yi-Chun Wang
A novel MEMS elastic-based dry electrode for electroencephalography measurement
- Technical Paper
Tao Yuan, Di Chen, Jingdong Chen, Xiang Chen, Xiaowei Wang, Baoliang Lu
Smart metal sheets by direct functional integration of piezoceramic fibers in microformed structures
- Technical Paper
A. Schubert, V. Wittstock, H.-J. Koriath, S. F. Jahn, S. Peter, B. Müller, M. Müller
Theory and FEM simulation study of the double-clamped resonant beam with slit-structure
- Technical Paper
Huichao Shi, Shangchun Fan, Weiwei Xing, Cheng Li, Jinhao Sun
Low cost anodic bonding for MEMS packaging applications
- Technical Paper
Robin Joyce, Kulwant Singh, Himani Sharma, Soney Varghese, J. Akhtar
Performance-optimized design of electromagnetic micro-actuator for Probe recording storage device
- Technical Paper
Narayanan Ramakrishnan, Mark D. Bedillion, Patrick B. Chu
A novel microneedle array for the treatment of hydrocephalus
- Technical Paper
Jonghyun Oh, Kewei Liu, Tim Medina, Francis Kralick, Hongseok (Moses) Noh
Effects of ITO film annealing temperature on hybrid solar cell performance
- Technical Paper
Shi-Hao Wang, Yu-Jen Hsiao, Te-Hua Fang, Sung-Long Chen, Shao-Hui Kang
Polymerase chain reaction compatibility of adhesive transfer tape based microfluidic platforms
- Technical Paper
Pulak Nath, Tuhin S. Maity, Frida Pettersson, Jesse Resnick, Yuliya Kunde, Noelle Kraus, Nicolas Castano
Calculating capacitance and analyzing nonlinearity of micro-accelerometers by Schwarz–Christoffel mapping
- Technical Paper
Jiangbo He, Jin Xie, Xiaoping He, Lianming Du, Wu Zhou, Libin Wang
Electrothermal-driven gap adjustable MEMS comb structure: modeling and simulation of the equivalent circuit macromodel
- Technical Paper
Xuan Pu, Weihua Li, Zaifa Zhou
