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Zeitschrift

Microsystem Technologies

Microsystem Technologies 6/2015

Ausgabe 6/2015

Inhaltsverzeichnis ( 25 Artikel )

01.06.2015 | Technical Paper | Ausgabe 6/2015

An orthogonal analysis method for decoupling the nozzle geometrical parameters of microthrusters

Qiang Shen, Weizheng Yuan, Xiaoping Li, Jianbing Xie, Honglong Chang

01.06.2015 | Technical Paper | Ausgabe 6/2015

Analytical study on cantilever resonance type magnet-integrated sensor device for micro-magnetic field detection

Dong F. Wang, Ryutaro Maeda

01.06.2015 | Technical Paper | Ausgabe 6/2015

Design and investigation of a low insertion loss, broadband, enhanced self and hold down power RF-MEMS switch

Mahesh Angira, Kamaljit Rangra

01.06.2015 | Technical Paper | Ausgabe 6/2015

Study of the influence of fringe edge on MEMS capacitive accelerometers self-calibration

Linxi Dong, Ying Pan, Jinfeng Lou, Jinyan Bao

01.06.2015 | Technical Paper | Ausgabe 6/2015

Structural optimization of Z-axis tuning-fork MEMS gyroscopes for enhancing reliability and resolution

Lihong Zhang, Vlastimil Masek, Nikoo Naeemi Sanatdoost

01.06.2015 | Technical Paper | Ausgabe 6/2015

Self-alignment observation and conductivity evaluation in micro chips integration with square binding pattern

Dong F. Wang, Takao Ishida, Ryutaro Maeda

01.06.2015 | Technical Paper | Ausgabe 6/2015

Meter-scale large area LED-embedded light fabric for the application of fabric ceilings in rooms

Seiichi Takamatsu, Takahiro Yamashita, Toshihiro Itoh

01.06.2015 | Technical Paper | Ausgabe 6/2015

Synthesis and optical properties of iron doped gallium nitride nanostructures by sol gel method

A. Orhan, C. Aydin, H. Aydin, Ahmed A. Al-Ghamdi, Farid El-Tantawy, F. Yakuphanoglu

01.06.2015 | Technical Paper | Ausgabe 6/2015

Low temperature carbon nanotube and hexagonal diamond deposition with photo-enhanced chemical vapor deposition

KyungNam Kang, Jeonghwan Kim, Yoonyoung Jin, Pratul K. Ajmera

01.06.2015 | Technical Paper | Ausgabe 6/2015

A compact electromagnetic micro-actuator using the meander springs partially exposed to magnetic field

Dae Geon Seo, Won Han, Young-Ho Cho

01.06.2015 | Technical Paper | Ausgabe 6/2015

A flexible dry micro-dome electrode for ECG monitoring

Ying Meng, Zhen Bo Li, Xiang Chen, Jia Pin Chen

01.06.2015 | Technical Paper | Ausgabe 6/2015

Design and fabrication of microtunnel and Si-diaphragm for ZnO based MEMS acoustic sensor for high SPL and low frequency application

Washim Reza Ali, Mahanth Prasad

01.06.2015 | Technical Paper | Ausgabe 6/2015

Development of a permanent magnet type micro-robot actuated by external electromagnetic system

Chan Park, Jinsoo Kim, Seung-Jong Kim, Jeonghoon Yoo

01.06.2015 | Technical Paper | Ausgabe 6/2015

The edge-effect on roll-to-roll thermal embossing of micro channels

Z. W. Zhong, X. C. Shan, Y. Z. Lim

01.06.2015 | Technical Paper | Ausgabe 6/2015

Performance optimization of microreactors by implementing geometrical and fluid flow control in the presence of electric field: a computational study

Amir Shamloo, Fatemeh Sharifi, Seyede Sara Salehi, Leila Amirifar, Bahar Firoozabadi

01.06.2015 | Technical Paper | Ausgabe 6/2015

In-situ optical monitoring of single-crystal silicon membrane etching

Franck Chollet

01.06.2015 | Technical Paper | Ausgabe 6/2015

Design and modeling of a continuously variable piezoelectric RF MEMS switch

Tim Giffney, Kean Aw, Miao Yu, Wei Gao, Haixia Zhang

01.06.2015 | Technical Paper | Ausgabe 6/2015

Active gap reduction in comb drive of three axes capacitive micro accelerometer for enhancing sense capacitance and sensitivity

Kashif Riaz, Abid Iqbal, M. Umer Mian, Shafaat A. Bazaz

01.06.2015 | Technical Paper | Ausgabe 6/2015

Acceleration sensitivity of tuning fork gyroscopes: theoretical model, simulation and experimental verification

Yanwei Guan, Shiqiao Gao, Haipeng Liu, Shaohua Niu

01.06.2015 | Technical Paper | Ausgabe 6/2015

Robust control of the electrostatic torsional micromirrors

Guangping He, Zhiyong Geng

01.06.2015 | Technical Paper | Ausgabe 6/2015

A micro glucose sensor based on direct prototyping mesoporous carbon electrode

Fei Teng, Xiaohong Wang, Caiwei Shen, Siwei Li

01.06.2015 | Technical Paper | Ausgabe 6/2015

High fidelity prototyping of PDMS electrophoresis microchips using laser-printed masters

Eulício de Oliveira Lobo Júnior, Lucas da Costa Duarte, Laura Eulália de Paula Braga, Ângelo Luiz Gobbi, Dosil Pereira de Jesus, Wendell Karlos Tomazelli Coltro

01.06.2015 | Technical Paper | Ausgabe 6/2015

Design considerations and electro-mechanical simulation of an inertial sensor based on a floating gate metal-oxide semiconductor field-effect transistor as transducer

G. S. Abarca Jiménez, M. A. Reyes Barranca, S. Mendoza Acevedo, J. E. Munguía Cervantes, M. A. Alemán Arce

01.06.2015 | Technical Paper | Ausgabe 6/2015

Non-contact printing: conductive track geometry affected by ink rheology and composition

Stefanie Hildebrandt, Isabel Kinski, Sindy Mosch, Andreas Waltinger, Florian Uhlig, Alexander Michaelis

01.06.2015 | Technical Paper | Ausgabe 6/2015

A MEMS piezoelectric solid disk gyroscope with improved sensitivity

Yuxiang Cheng, Weiping Zhang, Jian Tang, Dianjun Sun, Wenyuan Chen

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