Ausgabe 7/2007
Inhalt (12 Artikel)
Theoretical and experimental investigation on electrochemical micromachining
- Technical Paper
Zhaoyang Zhang, Di Zhu, Ningsong Qu, Minghuan Wang
System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation
- Technical Paper
Yongquan Wang, Hualing Chen, Xueming He
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration
- Technical Paper
C. Feng, Ya-Pu Zhao, D. Q. Liu
Mathematical analysis and test of an electrostatically actuated micro-power relay
- Technical Paper
S. J. Jeong, D. E. Lee, W. Wang
Head–disk spacing measurement based on Michelson interferometry using white light illumination
- Technical Paper
Y. He, H. Zhang, Y. Mitsuya, K. Fukuzawa
A new technology for microfluidic structures preparation based on a photoimageable ceramic
- Technical Paper
Iwona Wyżkiewicz, Natalia Lewandowska, Michał Chudy, Zbigniew Brzózka, Zbigniew Magoński, Barbara Dziurdzia, Małgorzata Jakubowska, Artur Dybko
Shape optimization and dynamic characterization of multiple-electrostatically deformable microbridges
- Technical Paper
Yunqiang Li, Packirisamy Muthukumaran, Rama B. Bhat
Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumps
- Technical Paper
A. T. Al-Halhouli, M. I. Kilani, A. Al-Salaymeh, S. Büttgenbach
Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results
- Technical Paper
Thomas G. Hayes IV, Bharat Bhushan
3D-feature-based structure design for silicon fabrication of micro devices
- Technical Paper
Yang Liu, Pingyu Jiang, Dinghong Zhang, Guanghui Zhou
Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors
- Technical Paper
Ghader Rezazadeh, Faraz Khatami, Ahmadali Tahmasebi
Eutectic bonding of Al-based high aspect ratio microscale structures
- Technical Paper
Fanghua Mei, J. Jiang, W. J. Meng
