Ausgabe 7/2008 Special issue on Design, Test, Integration and Packaging of MEMS/MOEMS, Stresa - Italy, 25 - 27 April 2007
Inhalt (30 Artikel)
Editorial to special issue on design, test, integration and packaging of MEMS/MOEMS, 2007
- Editorial
Bernard Courtois, Bernd Michel
Design and fabrication of the suspended high-Q spiral inductors with X-beams
- Technical Paper
M. C. Hsieh, D. K. Jair, C. S. Lin
Experimental characterization of electrostatically actuated in-plane bending of microcantilevers
- Technical Paper
A. Ballestra, E. Brusa, M. Gh Munteanu, A. Somà
Solving functional reliability issue for an optical electrostatic switch
- Technical Paper
H. Camon, C. Ganibal, N. Rapahoz, M. Trzmiel, C. Pisella, C. Martinez, S. Valette
A two-step etching method to fabricate nanopores in silicon
- Technical Paper
Gou-Jen Wang, Wei-Zheng Chen, Kang J. Chang
Lamination and laser structuring for a microwell array
- Technical Paper
Erik Jung, Dion Manessis, Alexander Neumann, Lars Böttcher, Tanja Braun, Jörg Bauer, Herbert Reichl, Bruno Iafelice, Federica Destro, Roberto Gambari
Surface generation analysis in micro end-milling considering the influences of grain
- Technical Paper
J. S. Wang, Y. D. Gong, G. Abba, K. Chen, J. S. Shi, G. Q. Cai
A compact package for integrated silicon thermal gas flow meters
- Technical Paper
P. Bruschi, V. Nurra, M. Piotto
Copper planar microcoils applied to magnetic actuation
- Technical Paper
Marion Woytasik, Johan Moulin, Emile Martincic, Anne-Lise Coutrot, Elisabeth Dufour-Gergam
Polysilicon micro beams buckling with temperature-dependent properties
- Technical Paper
M. Shamshirsaz, M. B. Asgari
Microcantilever-based weather station for temperature, humidity and flow rate measurement
- Technical Paper
Rong-Hua Ma, Chia-Yen Lee, Yu-Hsiang Wang, Hao-Jen Chen
Design and characterization of a humidity sensor realized in LTCC-technology
- Technical Paper
W. Smetana, M. Unger
Biodegradable polylactic acid microstructures for scaffold applications
- Technical Paper
Gou-Jen Wang, Kuan-Hsuan Ho, Cheng-Chih Hsueh
Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors
- Technical Paper
Yu-Hsiang Wang, Chia-Yen Lee, Che-Hsin Lin, Lung-Ming Fu
Development and application of a diaphragm micro-pump with piezoelectric device
- Technical Paper
H. K. Ma, B. R. Hou, H. Y. Wu, C. Y. Lin, J. J. Gao, M. C. Kou
A novel x-axis tuning fork gyroscope with “8 vertical springs-proofmass” structure on (111) silicon
- Technical Paper
Fei Duan, Jiwei Jiao, Yucai Wang, Ying Zhang, Binwei Mi, Jinpeng Li, Yuelin Wang
Silicon microneedle array with biodegradable tips for transdermal drug delivery
- Technical Paper
Bangtao Chen, Jiashen Wei, Francis E. H. Tay, Yee Ting Wong, Ciprian Iliescu
Development of a nanostructural microwave probe based on GaAs
- Technical Paper
Y. Ju, T. Kobayashi, H. Soyama
Silicon on nothing MEMS electromechanical resonator
- Technical Paper
Cédric Durand, Fabrice Casset, Pascal Ancey, Fabienne Judong, Alexandre Talbot, Rémi Quenouillère, Denis Renaud, Stéphan Borel, Brigitte Florin, Lionel Buchaillot
New horizontal frustum optical waveguide fabrication using UV proximity printing
- Technical Paper
Tsung-Hung Lin, Hsiharng Yang, Ruey Fang Shyu, Ching-Kong Chao
Monotonic and fatigue testing of freestanding submicron thin beams application for MEMS
- Technical Paper
Ming-Tzer Lin, Chi-Jia Tong, Kai-Shiang Shiu
Focussed ion beam based fabrication of micro-electro-mechanical resonators
- Technical Paper
Daniel Grogg, Nicoleta Diana Badila-Ciressan, Adrian Mihai Ionescu
Studies of polymer deformation and recovery in micro hot embossing
- Technical Paper
Xuechuan Shan, Y. C. Liu, Y. C. Lam
Modeling of large area hot embossing
- Technical Paper
M. Worgull, K. K. Kabanemi, J.-P. Marcotte, J.-F. Hétu, M. Heckele
Miniaturized variable-focus lens fabrication using liquid filling technique
- Technical Paper
Hsiharng Yang, Chung-Yao Yang, Mau-Shiun Yeh
Sensing liquid density using resonant flexural plate wave devices with sol–gel PZT thin films
- Technical Paper
Jyh-Cheng Yu, Huang-Yao Lin
Usage of porous Al2O3 layers for RH sensing
- Technical Paper
Veronika Timár-Horváth, László Juhász, András Vass-Várnai, Gergely Perlaky
Sensing liquid density using resonant flexural plate wave devices with sol–gel PZT thin films
- Erratum
Jyh-Cheng Yu, Huang-Yao Lin
