Ausgabe 7/2013
Inhalt (17 Artikel)
Integrated microfluidic drug delivery devices: a component view
- Review Paper
Mst. Fateha Samad, Abbas Z. Kouzani
Process variability in surface roughening of SU-8 by oxygen plasma
- Technical Paper
Nagaraju Oruganti, Michel Goedert, Sang-Joon John Lee
Design and FEM simulation study of the electro-thermal excitation resonant beam with slit-structure
- Technical Paper
Huichao Shi, Shangchun Fan, Weiwei Xing, Cheng Li, Jinhao Sun, Zhongwu Jing
A micro PDMS flow sensor based on time-of-flight measurement for conductive liquid
- Technical Paper
Haixia Yu, Dachao Li, Robert C. Roberts, Kexin Xu, Norman C. Tien
Micro solar energy harvesting using thin film selective absorber coating and thermoelectric generators
- Technical Paper
Emmanuel Ogbonnaya, Alfred Gunasekaran, Leland Weiss
MEMS tri-axial force sensor with an integrated mechanical stopper for guidewire applications
- Technical Paper
Woo-Tae Park, Rama Krishna Kotlanka, Liang Lou, Muhammad Hamidullah, Chengkuo Lee
A novel approach to realize the local precise variotherm process in micro injection molding
- Technical Paper
Lei Xie, Thalke Niesel, Monika Leester-Schädel, Gerhard Ziegmann, Stephanus Büttgenbach
Single-step UV diffraction lithography to define a hydrophobic SU-8 interconnected hoodoo structure
- Technical Paper
Seungha Lee, Gi Seok Jeong, Junghyun Kim, Junghyo Yoon, Sewoon Han, Ji-Yoon Kang, Seok Chung, Sang-Hoon Lee
A high-efficiency three-dimensional helical micromixer in fused silica
- Technical Paper
Keyin Liu, Qing Yang, Shengguan He, Feng Chen, Yulong Zhao, Xiaole Fan, Lei Li, Chao Shan, Hao Bian
Controllable fabrication and electromechanical characterization of electrophoresis assembled single-walled carbon nanotube-polymer film transducers
- Technical Paper
Dongzhi Zhang, Tianhong Cui
Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid
- Technical Paper
Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono
Raman spectroscopy characterization of a thermal bimorph actuator used in a bio-MEMS device
- Technical Paper
S. Maggiolino, F. Antoniolli, G. Pezzotti, O. Sbaizero
Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
- Technical Paper
Hiroshi Tanaka, Hirotaka Hida, Kazuo Sato
Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn–58Bi solder joint
- Technical Paper
Shafiq Ismathullakhan, Hungyin Lau, Yan-cheong Chan
A novel fabrication method based on an after thermal oxidation process for the realization of silicon-beams with normative polygon cross sections shapes
- Technical Paper
Dingbang Xiao, Xinghua Wang, Zelong Zhou, Xuezhong Wu, Zhihua Chen, Zhanqiang Hou
Precise analytical evaluation of the ring shape anchored contour mode disk resonator for constructing a low noise UHF Pierce oscillator
- Technical Paper
Masoud Baghelani, Habib Badri Ghavifekr, Afshin Ebrahimi
Fabrication of micro-trench structures with high aspect ratio based on DRIE process for MEMS device applications
- Technical Paper
Maoxiang Guo, Xiujian Chou, Jiliang Mu, Bing Liu, Jijun Xiong
