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Microsystem Technologies

Ausgabe 7/2015

Inhalt (26 Artikel)

Technical Paper

Micropump operation at various driving signals: numerical simulation and experimental verification

Borut Pečar, Danilo Vrtačnik, Drago Resnik, Matej Možek, Tine Dolžan, Robert Brajkovič, Dejan Križaj

Technical Paper

Non-destructive wafer-level bond defect identification by scanning acoustic microscopy

S. Brand, S. Tismer, S. T. Moe, K. Schjølberg-Henriksen

Technical Paper

Characterization of low temperature synthesized hexagonal diamond thin films

KyungNam Kang, Jeonghwan Kim, Yoonyoung Jin, Pratul K. Ajmera

Technical Paper

Vibration sensitivity analytical analysis for rocking mass microgyroscope

Xiong Wang, Xiaobin Xu, Tao Zhu, Xuezhong Wu

Open Access Technical Paper

Low-cost silicon wafer dicing using a craft cutter

Yiqiang Fan, Arpys Arevalo, Huawei Li, Ian G. Foulds

Technical Paper

A novel fabrication process for MEMS spiral inductors realized on oxide islands

Teweldebrhan Kifle, Sudhir Chandra, S. K. Koul

Technical Paper

Analysis and review on usage of broadband techniques in design of printed antennas for UWB communications

G. Sasibhushana Rao, S. Srinivasa Kumar, Ramu Pillalamarri

Technical Paper

Generalized thermoelastic vibration of a microbeam with an axial force

Ahmed E. Abouelregal, Ashraf M. Zenkour

Technical Paper

Design and analysis of a compact synthetic-jet-based air pump for large airflow

Yu-Jen Wang, Chung-De Chen, Chien Li

Technical Paper

Polymer micro molding with bulk metallic glass mold

Xiang Zhang, Jiang Ma, Ge Fang, Bingli Sun, Junfeng Li, Qian Li

Technical Paper

Theoretical investigation of the mechanical coupling in a differential vibrating beam accelerometer

Zhen Zhou, Jie Shi, Bao-yin Yao, Li-shuang Feng

Technical Paper

Parallel integration of ionic wind generators on PCBs for enhancing flow rate

Seung Jun Lee, Longnan Li, Kilsung Kwon, Wonjung Kim, Daejoong Kim

Technical Paper

Low-temperature quartz wafer bonding using hyperbranched polyurethane oligomers

Jian Zhao, Fei Jin, Jianying Zhao, Shaomin Liu

Technical Paper

Label free electrical detection of prostate specific antigen with millimeter grade biomolecule-gated AlGaN/GaN high electron mobility transistors

Jia-dong Li, Jun-jie Cheng, Bin Miao, Xiao-wei Wei, Jie Xie, Jin-cheng Zhang, Zhi-qiang Zhang, Hai-Wen Li, Dong-min Wu

Technical Paper

The thermal-mechanical performance of the uncooled infrared optical-readout bi-material FPA

Kong Yan-mei, Liu Rui-wen, Jiao Bin-bin, Lu Di-ke, Zhu En-cheng, Fu Qiang-sheng, Chen Da-peng

Technical Paper

Optimization of molecularly thin lubricant to improve bearing capacity at the head-disk interface

Shahla Chowdhury, Antonis I. Vakis, Andreas A. Polycarpou

Technical Paper

Development of microfluidic based multidirectional flow sensor inspired from artificial cupula

M. N. M. Nawi, A. A. Manaf, M. R. Arshad, O. Sidek

Technical Paper

Tools for ultrasonic hot embossing

S. Liao, C. Gerhardy, J. Sackmann, W. K. Schomburg

Technical Paper

Laser moulding, a new low-cost fabrication process for micro- and nanostructured components

Markus Wissmann, Heino Besser, Markus Beiser, Wilhelm Pfleging

Technical Paper

A microchannel neural interface with embedded microwires targeting the peripheral nervous system

Bongkyun Kim, Alejandro Reyes, Bernardo Garza, Yoonsu Choi

Technical Paper

Micromachined sample stages to reduce thermal drift in atomic force microscopy

Semih Sevim, Selin Tolunay, Hamdi Torun

Technical Paper

MEMS filter’s design and modeling based on width-extensional mode plate resonator for wireless applications

Achraf Bem Amar, Dorra Bahloul, François Gagnon, Ammar B. Kouki

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