Ausgabe 7/2016 SPIE Microtechnologies 2015
Inhalt (43 Artikel)
Special Issue of the Conferences ‘Smart Sensors, Actuators and MEMS’, ‘Cyber-Physical Systems’ and ‘Bio-MEMS and Medical Microdevices’ within the SPIE EUROPE ‘MICROTECHNOLOGIES’ Symposium Barcelona, Spain, 4–6 May 2015
- Editorial
Ulrich Schmid, Jose Luis Sanchez-Rojas, Sander van den Driesche, Riccardo Brama, Bernd Michel
Human blood microfluidic test chip for imaging, label-free biosensor
- Technical Paper
S. Jahns, S. B. Gutekunst, C. Selhuber-Unkel, Y. Nazirizadeh, M. Gerken
A remotely powered fully integrated low power class-E power amplifier for implantable sensor systems
- Technical Paper
Kerim Ture, Enver G. Kilinc, Catherine Dehollain
Miniaturized devices for isothermal DNA amplification addressing DNA diagnostics
- Technical Paper
G. D. Kaprou, G. Papadakis, D. P. Papageorgiou, G. Kokkoris, V. Papadopoulos, I. Kefala, E. Gizeli, A. Tserepi
A study of kinetic energy harvesting for biomedical application in the head area
- Technical Paper
Jan Smilek, Zdenek Hadas
Medical apps in need of optical microspectrometers
- Open Access
- Technical Paper
Reinoud F. Wolffenbuttel, Tanya M. Wolffenbuttel Hosli
Harvesting of river flow energy for wireless sensor network technology
- Technical Paper
Ervin Kamenar, Saša Zelenika, David Blažević, Senka Maćešić, Goran Gregov, Kristina Marković, Vladimir Glažar
FBAR-on-diaphragm type electro-acoustic resonant micro-accelerometer: a theoretical study
- Technical Paper
Yang Gao, Wan-jing He, Jun-ru Li, Zhen-hua Huang
An accelerated thermal cycling test for RF-MEMS switches
- Technical Paper
V. Mulloni, G. Sordo, B. Margesin
SAW based phononic crystal sensor, technological challenges and solutions
- Technical Paper
Marc-Peter Schmidt, Aleksandr Oseev, Ralf Lucklum, Mikhail Zubtsov, Soeren Hirsch
2-Level error (drift) compensation for low-cost MEMS-based inertial measurement unit (IMU)
- Technical Paper
Agusmian Partogi Ompusunggu, Abdellatif Bey-Temsamani
Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
- Technical Paper
Stephan Barth, Hagen Bartzsch, Daniel Glöß, Peter Frach, Thomas Modes, Olaf Zywitzki, Gunnar Suchaneck, Gerald Gerlach
Wind turbines lubricant gearbox degradation detection by means of a lossy mode resonance based optical fiber refractometer
- Technical Paper
P. Sanchez, D. Mendizabal, K. Gonzalez, C. R. Zamarreño, M. Hernaez, I. R. Matias, F. J. Arregui
Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate
- Technical Paper
Johannes Rittinger, Piriya Taptimthong, Lisa Jogschies, Marc C. Wurz, Lutz Rissing
Single-mode—multimode—single-mode and lossy mode resonance-based devices: a comparative study for sensing applications
- Technical Paper
Abian Bentor Socorro, Miguel Hernaez, Ignacio Del Villar, Jesús María Corres, Francisco Javier Arregui, Ignacio Raul Matias
Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design concept
- Technical Paper
J. Iannacci, G. Sordo
Transforming car glass into microphones using piezoelectric transducers
- Technical Paper
Christian Bolzmacher, Valentin Le Guelvouit
Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS
- Technical Paper
Lutz Hofmann, Tobias Fischer, Thomas Werner, Franz Selbmann, Michael Rennau, Ramona Ecke, Stefan E. Schulz, Thomas Geßner
Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading
- Technical Paper
P. M. Mayrhofer, P. O. Å. Persson, A. Bittner, U. Schmid
Impact of the substrate dependent polarity distribution in c-axis oriented AlN thin films on the etching behaviour and the piezoelectric properties
- Technical Paper
E. Wistrela, M. Schneider, A. Bittner, U. Schmid
In-liquid characterization of in-plane and high order out-of-plane modes of AlN-based square microplates
- Technical Paper
V. Ruiz-Díez, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas
The charge push-through electronics design for fully implantable artificial cochlea powered by energy harvesting technologies
- Technical Paper
Jaromir Zak, Zdenek Hadas, Daniel Dusek, Jan Pekarek, Vojtech Svatos, Ludek Janak, Jan Prasek, Jaromir Hubalek
Path of microparticles in a microfluidic device employing dielectrophoresis for hyperlayer field-flow fractionation
- Technical Paper
Bobby Mathew, Anas Alazzam, Saud Khashan, Bashar El-Khasawneh
Design of piezoelectric microtransducers based on the topology optimization method
- Technical Paper
David Ruiz, Alberto Donoso, José Carlos Bellido, Martin Kucera, Ulrich Schmid, José Luis Sánchez-Rojas
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
- Technical Paper
Anna Persano, Fabio Quaranta, Giovanni Capoccia, Emanuela Proietti, Andrea Lucibello, Romolo Marcelli, Alvise Bagolini, Jacopo Iannacci, Antonietta Taurino, Pietro Siciliano
Optical microsystem design and fabrication for medical image magnification
- Technical Paper
C. G. Costa, J. M. Gomes, R. F. Wolffenbuttel, J. H. Correia
Multifunctional thin film sensor system as monitoring system in production
- Technical Paper
Saskia Biehl, Christian Rumposch, Nancy Paetsch, Günter Bräuer, Dieter Weise, Peter Scholz, Dirk Landgrebe
Analysis and efficiency measurement of electromagnetic vibration energy harvesting system
- Technical Paper
Zdenek Hadas, Vojtech Vetiska, Jan Vetiska, Jiri Krejsa
Comparison of in-plane and out-of-plane piezoelectric microresonators for real-time monitoring of engine oil contamination with diesel
- Technical Paper
J. Toledo, T. Manzaneque, V. Ruiz-Díez, F. Jiménez-Márquez, M. Kucera, G. Pfusterschmied, E. Wistrela, U. Schmid, J. L. Sánchez-Rojas
Dependence of time reversal of acoustic waves in plates on mean frequency and plate’s characteristics
- Technical Paper
Harald Zophoniasson, Charles Hudin, Christian Bolzmacher, Moustapha Hafez
Optoelectronic sensor for measuring ethanol content during grape must fermentation using NIR spectroscopy
- Technical Paper
F. Jiménez-Márquez, J. Vázquez, J. Úbeda, J. L. Sánchez-Rojas
Optimization method for designing multimodal piezoelectric MEMS energy harvesters
- Technical Paper
G. Sordo, E. Serra, U. Schmid, J. Iannacci
Optical fiber resonance-based pH sensors using gold nanoparticles into polymeric layer-by-layer coatings
- Technical Paper
Pedro Jose Rivero, Javier Goicoechea, Miguel Hernaez, Abian B. Socorro, Ignacio Raul Matias, Francisco Javier Arregui
Microstructures replication using high frequency excitation
- Technical Paper
Rokas Šakalys, Giedrius Janušas, Arvydas Palevičius, Elingas Čekas, Vytautas Jūrėnas, Amer Sodah
Design of a low cost and high performance wireless sensor network for structural health monitoring
- Technical Paper
Marco Giammarini, Daniela Isidori, Marco Pieralisi, Cristina Cristalli, Matteo Fioravanti, Enrico Concettoni
MEMS based metal oxide sensor for simultaneous measurement of gas induced changes of the heating power and the sensing resistance
- Technical Paper
B. Bierer, J. Kneer, J. Wöllenstein, S. Palzer
The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification
- Technical Paper
J. Iannacci, G. Sordo, E. Serra, U. Schmid
Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors
- Open Access
- Technical Paper
J. Zehetner, S. Kraus, M. Lucki, G. Vanko, J. Dzuba, T. Lalinsky
mm-wave integrated wireless transceiver: enabling technology for high bandwidth short-range networking in cyber physical systems
- Technical Paper
Sergio Saponara, Bruno Neri
Scaling and super-cooling in heat storage harvesting devices
- Technical Paper
M. E. Kiziroglou, A. Elefsiniotis, N. Kokorakis, S. W. Wright, T. T. Toh, P. D. Mitcheson, U. Schmid, Th. Becker, E. M. Yeatman
Non-invasive voltage measurement in a three-phase autonomous meter
- Technical Paper
Davide Brunelli, Clemente Villani, Domenico Balsamo, Luca Benini
An easy fabrication process of fully-sealed parylene microfluidic channels with a single deposition step
- Technical Paper
João Vitor Pimentel, Elena Tolstosheeva, Ludger Kempen, Walter Lang, Michael J. Vellekoop
Embedded system for supervision analysis and control of photovoltaic power plants
- Technical Paper
A. Cabitto, P. Lambruschini, M. Raggio
