Ausgabe 7/2016
SPIE Microtechnologies 2015
Inhalt (43 Artikel)
Special Issue of the Conferences ‘Smart Sensors, Actuators and MEMS’, ‘Cyber-Physical Systems’ and ‘Bio-MEMS and Medical Microdevices’ within the SPIE EUROPE ‘MICROTECHNOLOGIES’ Symposium Barcelona, Spain, 4–6 May 2015
Ulrich Schmid, Jose Luis Sanchez-Rojas, Sander van den Driesche, Riccardo Brama, Bernd Michel
Human blood microfluidic test chip for imaging, label-free biosensor
S. Jahns, S. B. Gutekunst, C. Selhuber-Unkel, Y. Nazirizadeh, M. Gerken
A remotely powered fully integrated low power class-E power amplifier for implantable sensor systems
Kerim Ture, Enver G. Kilinc, Catherine Dehollain
Miniaturized devices for isothermal DNA amplification addressing DNA diagnostics
G. D. Kaprou, G. Papadakis, D. P. Papageorgiou, G. Kokkoris, V. Papadopoulos, I. Kefala, E. Gizeli, A. Tserepi
A study of kinetic energy harvesting for biomedical application in the head area
Jan Smilek, Zdenek Hadas
Medical apps in need of optical microspectrometers
Reinoud F. Wolffenbuttel, Tanya M. Wolffenbuttel Hosli
Harvesting of river flow energy for wireless sensor network technology
Ervin Kamenar, Saša Zelenika, David Blažević, Senka Maćešić, Goran Gregov, Kristina Marković, Vladimir Glažar
FBAR-on-diaphragm type electro-acoustic resonant micro-accelerometer: a theoretical study
Yang Gao, Wan-jing He, Jun-ru Li, Zhen-hua Huang
An accelerated thermal cycling test for RF-MEMS switches
V. Mulloni, G. Sordo, B. Margesin
SAW based phononic crystal sensor, technological challenges and solutions
Marc-Peter Schmidt, Aleksandr Oseev, Ralf Lucklum, Mikhail Zubtsov, Soeren Hirsch
2-Level error (drift) compensation for low-cost MEMS-based inertial measurement unit (IMU)
Agusmian Partogi Ompusunggu, Abdellatif Bey-Temsamani
Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
Stephan Barth, Hagen Bartzsch, Daniel Glöß, Peter Frach, Thomas Modes, Olaf Zywitzki, Gunnar Suchaneck, Gerald Gerlach
Wind turbines lubricant gearbox degradation detection by means of a lossy mode resonance based optical fiber refractometer
P. Sanchez, D. Mendizabal, K. Gonzalez, C. R. Zamarreño, M. Hernaez, I. R. Matias, F. J. Arregui
Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate
Johannes Rittinger, Piriya Taptimthong, Lisa Jogschies, Marc C. Wurz, Lutz Rissing
Single-mode—multimode—single-mode and lossy mode resonance-based devices: a comparative study for sensing applications
Abian Bentor Socorro, Miguel Hernaez, Ignacio Del Villar, Jesús María Corres, Francisco Javier Arregui, Ignacio Raul Matias
Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design concept
J. Iannacci, G. Sordo
Transforming car glass into microphones using piezoelectric transducers
Christian Bolzmacher, Valentin Le Guelvouit
Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS
Lutz Hofmann, Tobias Fischer, Thomas Werner, Franz Selbmann, Michael Rennau, Ramona Ecke, Stefan E. Schulz, Thomas Geßner
Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading
P. M. Mayrhofer, P. O. Å. Persson, A. Bittner, U. Schmid
Impact of the substrate dependent polarity distribution in c-axis oriented AlN thin films on the etching behaviour and the piezoelectric properties
E. Wistrela, M. Schneider, A. Bittner, U. Schmid
In-liquid characterization of in-plane and high order out-of-plane modes of AlN-based square microplates
V. Ruiz-Díez, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas
The charge push-through electronics design for fully implantable artificial cochlea powered by energy harvesting technologies
Jaromir Zak, Zdenek Hadas, Daniel Dusek, Jan Pekarek, Vojtech Svatos, Ludek Janak, Jan Prasek, Jaromir Hubalek
Path of microparticles in a microfluidic device employing dielectrophoresis for hyperlayer field-flow fractionation
Bobby Mathew, Anas Alazzam, Saud Khashan, Bashar El-Khasawneh
Design of piezoelectric microtransducers based on the topology optimization method
David Ruiz, Alberto Donoso, José Carlos Bellido, Martin Kucera, Ulrich Schmid, José Luis Sánchez-Rojas
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
Anna Persano, Fabio Quaranta, Giovanni Capoccia, Emanuela Proietti, Andrea Lucibello, Romolo Marcelli, Alvise Bagolini, Jacopo Iannacci, Antonietta Taurino, Pietro Siciliano
Optical microsystem design and fabrication for medical image magnification
C. G. Costa, J. M. Gomes, R. F. Wolffenbuttel, J. H. Correia
Multifunctional thin film sensor system as monitoring system in production
Saskia Biehl, Christian Rumposch, Nancy Paetsch, Günter Bräuer, Dieter Weise, Peter Scholz, Dirk Landgrebe
Analysis and efficiency measurement of electromagnetic vibration energy harvesting system
Zdenek Hadas, Vojtech Vetiska, Jan Vetiska, Jiri Krejsa
Comparison of in-plane and out-of-plane piezoelectric microresonators for real-time monitoring of engine oil contamination with diesel
J. Toledo, T. Manzaneque, V. Ruiz-Díez, F. Jiménez-Márquez, M. Kucera, G. Pfusterschmied, E. Wistrela, U. Schmid, J. L. Sánchez-Rojas
Dependence of time reversal of acoustic waves in plates on mean frequency and plate’s characteristics
Harald Zophoniasson, Charles Hudin, Christian Bolzmacher, Moustapha Hafez
Optoelectronic sensor for measuring ethanol content during grape must fermentation using NIR spectroscopy
F. Jiménez-Márquez, J. Vázquez, J. Úbeda, J. L. Sánchez-Rojas
Optimization method for designing multimodal piezoelectric MEMS energy harvesters
G. Sordo, E. Serra, U. Schmid, J. Iannacci
Optical fiber resonance-based pH sensors using gold nanoparticles into polymeric layer-by-layer coatings
Pedro Jose Rivero, Javier Goicoechea, Miguel Hernaez, Abian B. Socorro, Ignacio Raul Matias, Francisco Javier Arregui
Microstructures replication using high frequency excitation
Rokas Šakalys, Giedrius Janušas, Arvydas Palevičius, Elingas Čekas, Vytautas Jūrėnas, Amer Sodah
Design of a low cost and high performance wireless sensor network for structural health monitoring
Marco Giammarini, Daniela Isidori, Marco Pieralisi, Cristina Cristalli, Matteo Fioravanti, Enrico Concettoni
MEMS based metal oxide sensor for simultaneous measurement of gas induced changes of the heating power and the sensing resistance
B. Bierer, J. Kneer, J. Wöllenstein, S. Palzer
The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification
J. Iannacci, G. Sordo, E. Serra, U. Schmid
Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors
J. Zehetner, S. Kraus, M. Lucki, G. Vanko, J. Dzuba, T. Lalinsky
mm-wave integrated wireless transceiver: enabling technology for high bandwidth short-range networking in cyber physical systems
Sergio Saponara, Bruno Neri
Scaling and super-cooling in heat storage harvesting devices
M. E. Kiziroglou, A. Elefsiniotis, N. Kokorakis, S. W. Wright, T. T. Toh, P. D. Mitcheson, U. Schmid, Th. Becker, E. M. Yeatman
Non-invasive voltage measurement in a three-phase autonomous meter
Davide Brunelli, Clemente Villani, Domenico Balsamo, Luca Benini
An easy fabrication process of fully-sealed parylene microfluidic channels with a single deposition step
João Vitor Pimentel, Elena Tolstosheeva, Ludger Kempen, Walter Lang, Michael J. Vellekoop
Embedded system for supervision analysis and control of photovoltaic power plants
A. Cabitto, P. Lambruschini, M. Raggio