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Microsystem Technologies

Ausgabe 7/2019

Inhalt (35 Artikel)

Review Article

Pull-in tests of MEMS specimens for characterization of elastic–plastic behavior

A. Somà, M. M. Saleem, B. Margesin, M. Armando

Technical Paper

Improved cosmeceutical phototherapy using microneedle

Myeongwoo Kang, Chihyoung Shim, Sangcheol Na, Byungjun Lee, Noo Li Jeon, Hoyoung Yun

Technical Paper

Design and analysis of microfluidic kidney-on-chip model: fluid shear stress based study with temperature effect

Jasti Sateesh, Koushik Guha, Arindam Dutta, Pratim Sengupta, K. Srinivasa Rao

Technical Paper

MEMS based tin oxide thin film gas sensor for diabetes mellitus applications

Smiti Sachdeva, Ravinder Agarwal, Ajay Agarwal

Technical Paper

The communication and stability evaluation of amphibious spherical robots

Liang Zheng, Shuxiang Guo, Shuoxin Gu

Technical Paper

A novel valveless piezoelectric micropump with a bluff-body based on Coanda effect

Xiuhua He, Rongqun Bian, Nan Lin, Wei Xu, Zhidan Deng, Song Yang

Technical Paper

Research on a small tunnel magnetoresistive accelerometer based on 3D printing

Bo Yang, Binlong Wang, Xiaoyong Gao

Technical Paper

On scale-dependent vibration of circular cylindrical nanoporous metal foam shells

Yan Qing Wang, Yun Fei Liu, Jean W. Zu

Technical Paper

Air damping characteristics of a 2D MEMS electromagnetically driven micro-mirror

Mingdi Peng, Xinhua Zhu, Bo Jiang, Tong Zhou, Yan Su

Technical Paper

Spring support electromagnetic induction-based detection sensor for the coagulation process

Zhe Wang, Yuanhua Yu, Zhanjiang Yu, Qimeng Chen

Technical Paper

A multi-step etch method for fabricating slightly tapered through-silicon vias based on modified Bosch process

Pengrong Lin, Xiaochen Xie, Yong Wang, Binhao Lian, Guoqi Zhang

Technical Paper

Dielectrophoretic interaction of two particles in a uniform electric field

Reza Javidi, Mahdi Moghimi Zand, Kia Dastani

Technical Paper

Fatigue lifetime prediction of arbitrarily-shaped MEMS structures made of polysilicon thin films

Vu Le Huy, Shoji Kamiya, Joao Gaspar, Oliver Paul

Technical Paper

Fluid load augmented micro balance

Keshava Praveena Neriya Hegade, Muthukumaran Packirisamy, Rama Bhat

Technical Paper

An efficient micromixer combining oscillatory flow and divergent circular chambers

J. W. Wu, H. M. Xia, Y. Y. Zhang, S. F. Zhao, P. Zhu, Z. P. Wang

Technical Paper

A novel Koch fractal micromixer with rounding corners structure

Xueye Chen, Shuai Zhang, Zhongli Wu, Yue Zheng

Technical Paper

Design and evaluation of sensorized robot for minimally vascular interventional surgery

Xianqiang Bao, Shuxiang Guo, Liwei Shi, Nan Xiao

Technical Paper

Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction

Chi Cuong Nguyen, Vo Ke Thanh Ngo, Hoai Quoc Le, Wang Long Li

Technical Paper

Traveling wave excitation sources for FEM analysis of scattering in acoustic waveguide

Xinyi Li, Jingfu Bao, Yulin Huang, Benfeng Zhang, Tatsuya Omori, Ken-ya Hashimoto

Technical Paper

Electromechanical modelling of electrostatically actuated beams

S. Lakshmi, P. A. Dinesh, C. S. Pratheeksha

Technical Paper

Microfluidic platform for dielectrophoretic separation of bio-particles using serpentine microelectrodes

Paridhi Puri, Vijay Kumar, Sachin U. Belgamwar, M. Ananthasubramanian, N. N Sharma

Technical Paper

Fabrication of electro-thermally driven tunable plate with Au/SiO2 bimorph beams

Ashudeep Minhas, Amit Kumar, Deepak Bansal, Khushbu Mehta, Anuroop Bajpai, Prem Kumar, Kamaljit Rangra

Technical Paper

Angular velocity estimation of rotating plate using extended Kalman filter with accelerometer bias model

Junhak Lee, Heyone Kim, Sang Heon Oh, Jae Chul Do, Chang Woo Nam, Dong-Hwan Hwang, Sang Jeong Lee

Technical Paper

Design and optimization of a trapezoidal beam array energy harvester with operating wide speed rang for TPMS application

Licheng Deng, Ju Qi, Yuming Fang, Debo Wang, Beiyuan Wu, Zhiyu Wen

Technical Paper

Experimental evaluation of force and amplification factor of three different variants of flexure based micro displacement amplification mechanism

Sohail Iqbal, Rana Iqtidar Shakoor, Yongjun Lai, Afzaal M. Malik, Shafaat Ahmed Bazaz

Technical Paper

Analysis on edge effect of MEMS capacitance diaphragm gauge with square pressure-sensing diaphragm

Xiaodong Han, Detian Li, Yongjun Cheng, Gang Li, Chengxiang Wang

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