Ausgabe 8/2013
Inhalt (17 Artikel)
Design and modeling of a new robust multi-mass coupled-resonator family with dynamic motion amplification
- Technical Paper
M. A. Erismis
A flexible polyimide cable for implantable neural probe arrays
- Technical Paper
Ming-Yuan Cheng, Woo-Tae Park, Aibin Yu, Rui-Feng Xue, Kwan Ling Tan, Daquan Yu, Sang-Hyun Lee, Chee Lip Gan, Minkyu Je
Low temperature transient liquid phase bonding of Au/Sn and Cu/Sn electroplated material systems for MEMS wafer-level packaging
- Technical Paper
S. Marauska, M. Claus, T. Lisec, B. Wagner
Electrical performance analysis and characterization of two port piezoelectric resonators
- Technical Paper
H. C. Qiu, P. Schwarz, D. Feili, S. Merzsch, E. Peiner, X. Z. Wu, H. Seidel
Effects of package on the performance of MEMS piezoresistive accelerometers
- Technical Paper
Ping Li, Shiqiao Gao, Haipeng Liu, Jun Liu, Yunbo Shi
Continuously tunable terahertz metamaterial employing a thermal actuator
- Technical Paper
Xiuhan Li, Tianyang Yang, Wangqiang Zhu, Xiaoguang Li
Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer
- Technical Paper
Abdelhameed Sharaf, Sherif Sedky
Fabrication of an hermetically packaged silicon resonator on LTCC substrate
- Technical Paper
Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
Development and discussion of asymmetric magnetic soft mode electromagnetic imprinting process technology
- Technical Paper
Yung-Chun Weng, Yung-Jin Weng, Sen-Yeu Yang
Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications
- Technical Paper
Qiuling Chen, Gabriele Maccioni, Qiuping Chen, Adriano Sacco, Sergio Ferrero, Luciano Scaltrito
Challenges in fabrication and testing of piezoelectric MEMS with a particular focus on energy harvesters
- Technical Paper
Mehdi Rezaei, Jonathan Lueke, Don Raboud, Walied Moussa
Hydrogen sensing characteristics of vertical type hydrogen sensors based on porous 3C-SiC with catalyst materials
- Technical Paper
K.-S. Kim, G.-S. Chung, Ahmed A. Al-Ghamdi, Fahrettin Yakuphanoglu
Experimental research on resist filling behavior in microimprint lithography by using defocusing digital particle image velocimetry
- Technical Paper
Du Jun, Wei Zhengying, Li Shize, Tang Yiping
Analytical modeling and simulation of a 2-DOF drive and 1-DOF sense gyro-accelerometer
- Technical Paper
Payal Verma, R. Gopal, Sandeep K. Arya
A MEMS sandwich differential capacitive silicon-on-insulator accelerometer
- Technical Paper
Yangxi Zhang, Gang Yang, Chengchen Gao, Yilong Hao
Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection
- Technical Paper
Yoshinobu Murakawa, Motoaki Hara, Hiroyuki Oguchi, Yuichiro Hamate, Hiroki Kuwano
Anti-smudge screening apparatus for electronic touch screens
- Technical Paper
Bharat Bhushan, Palanikkumaran Muthiah
