Ausgabe 8/2015
Inhalt (25 Artikel)
Orthogonal micro-fluxgate with S-shape excitation wire and 3D solenoid detection coil
- Technical Paper
Bo Guo, Shibin Liu, Shanglin Yang, Guifang Li, Juping Li, Xiaoyan Sun
Three-dimensional simulation of surface topography evolution in the Bosch process by a level set method
- Technical Paper
Xiao-Qian Li, Zai-Fa Zhou, Wei-Hua Li, Qing-An Huang
Aspects of cavity filling with nano imprint
- Technical Paper
Hella-C. Scheer, M. Papenheim, K. Dhima, S. Wang, C. Steinberg
Design and optimization of cantilever based piezoelectric micro power generator for cardiac pacemaker
- Technical Paper
Mohd H. S. Alrashdan, Azrul Azlan Hamzah, BurhanuddinYeop Majlis
Manufacturing of high aspect-ratio 3-dimensional PolyFerroCNT nanocomposite polymer electrodes
- Technical Paper
Sam Kassegne, Beejal Mehta, Ajit Khosla
Room temperature Si–Ti thermopile THz sensor
- Technical Paper
Sofiane Ben Mbarek, Sébastien Euphrasie, Thomas Baron, Laurent Thiery, Pascal Vairac, Danick Briand, Jean-Paul Guillet, Laurent Chusseau
Void-free BCB adhesive wafer bonding with high alignment accuracy
- Technical Paper
Zhen Song, Zhimin Tan, Litian Liu, Zheyao Wang
Nano–bio interface: the characterization of functional bio interface on silicon nanowire
- Technical Paper
A. Wesam Al-Mufti, U. Hashim, Md. Mijanur Rahman, Tijjani Adam
The fabrication of back etching 3C-SiC-on-Si diaphragm employing KOH + IPA in MEMS capacitive pressure sensor
- Technical Paper
Noraini Marsi, Burhanuddin Yeop Majlis, Faisal Mohd-Yasin, Azrul Azlan Hamzah
Bidirectional and location-dependent frequency tuning of single crystal 4H-SiC micromechanical cantilevers
- Technical Paper
Feng Zhao, Zhibang Chen
Piezoelectric energy harvester using mechanical frequency up conversion for operation at low-level accelerations and low-frequency vibration
- Technical Paper
Dongjae Han, Kwang-Seok Yun
Characterisation of demoulding parameters in micro-injection moulding
- Technical Paper
C. A. Griffiths, G. Tosello, S. S. Dimov, S. G. Scholz, A. Rees, B. Whiteside
A planar fractal micro-transformer with air core and hilbert curve
- Technical Paper
Yong Zhu, Fahimullah Khan, Junwei Lu, Dzung Viet Dao
Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone
- Technical Paper
Guo Jun Zhang, Lin Xian Liu, Wen Dong Zhang, Chen Yang Xue
Analytical expressions for the electrostatically actuated curled beam problem
- Technical Paper
Mohammad I. Younis
Numerical and experimental study of the filling stage of roll-to-roll UV embossing process with micro features
- Technical Paper
X. Song, X. C. Shan, S. L. Chow, X. Y. Deng, W. S. Teo
Modeling in vitro neural electrode interface in neural cell culture medium
- Technical Paper
Tao Sun, Wei Mong Tsang, Woo-Tae Park, Kangjian Cheng, Srinivas Merugu
A high-performance scanning grating based on tilted (111) silicon wafer for near infrared micro spectrometer application
- Technical Paper
Qiuyu Nie, Zhiyu Wen, Jian Huang
Design and driving characteristic researches of a novel bionic stepping piezoelectric actuator with large load capacity based on clamping blocks
- Technical Paper
Shupeng Wang, Zhihui Zhang, Luquan Ren, Hongwei Zhao, Yunhong Liang, Bing Zhu
Nonlocal thermoelastic nanobeam subjected to a sinusoidal pulse heating and temperature-dependent physical properties
- Technical Paper
Ashraf M. Zenkour, Ahmed E. Abouelregal
Evaluation of electromigration resistance of lead-free solders using unpassivated stripe-shaped samples
- Technical Paper
M. Aoyama, M. Saka
Locally resolved stress and strain analysis of sinter-joined micro valves using synchrotron X-ray diffraction and conical slit apertures
- Technical Paper
J. Maisenbacher, J. Gibmeier, K. Klimscha, T. Fischer, P. Staron
A microfluidic device for generation of chemical gradients
- Technical Paper
Yanyan Ge, Qiu An, Yandong Gao, Yunfei Chen, Deyu Li