Ausgabe 8-9/2010 Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009
Inhalt (54 Artikel)
Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009
- Editorial
Sven Achenbach, David Klymyshyn, Bernd Michel
First automated production line for X-ray-LIGA (FELIG) is brought on line
- Technical Paper
Lothar Hahn, Georg Schwartz, Volker Saile, Joachim Schulz
Synchrotron laboratory for micro and nano devices: facility concept and design
- Technical Paper
Sven Achenbach, Venkat Subramanian, David Klymyshyn, Garth Wells
Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
- Technical Paper
Seichin Kinuta, Yoshiaki Saita, Masashi Kobayashi, Martin Boerner, Volker Saile, Sumio Hosaka
Fabrication of X-rays mask with carbon membrane for diffraction gratings
- Technical Paper
Naoki Takahashi, Hiroshi Tujii, Megumi Katori, Kenji Yamashita, Daiji Noda, Tadashi Hattori
Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer
- Technical Paper
Daiji Noda, Hiroshi Tsujii, Naoki Takahashi, Tadashi Hattori
Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography
- Technical Paper
Longhua Liu, Gang Liu, Ying Xiong, Jie Chen, Wenjie Li, Yangchao Tian
Inclination of mold pattern’s sidewalls by combined technique with photolithography at defocus-positions and electroforming
- Technical Paper
Harutaka Mekaru, Osamu Koizumi, Akihisa Ueno, Masaharu Takahashi
Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography
- Technical Paper
Mitsuhiro Horade, Susumu Sugiyama
Resist-less patterning on SiO2 by combination of X-ray exposure and vapor HF etching
- Technical Paper
Harutaka Mekaru, Makoto Fujimaki, Koichi Awazu, Masaharu Takahashi
Method development for epoxy resin analysis
- Technical Paper
Sawa Nordt, Harald Pasch, Wolfgang Radke
Electroplating of nickel films at ultra low electrolytic temperature
- Technical Paper
Chen-Kuei Chung, W. T. Chang, S. T. Hung
Electropolishing as a method for deburring high aspect ratio nickel RF MEMS
- Technical paper
Stephanie Kissling, Klaus Bade, Martin Börner, David M. Klymyshyn
Fabrication of high hardness Ni mold with electroless nickel–boron thin layer
- Technical Paper
Yoshitaka Sawa, Kenji Yamashita, Takeshi Kitadani, Daiji Noda, Tadashi Hattori
High aspect ratio micromolds for the electroplating of micro electro discharge machining tools
- Technical Paper
Ornwasa Traisigkhachol, Hans H. Gatzen
Development of separated micromold system for an efficient replication of high aspect ratio microstructures
- Technical Paper
Bong-Kee Lee, Tai Hun Kwon
A polymer-metal hybrid flexible mould and application for large area hot roller embossing
- Technical Paper
Xuechuan Shan, L. Jin, Y. C. Soh, C. W. Lu
3D UV-microreplication using cylindrical PDMS mold
- Technical Paper
Dongkeon Lee, Harutaka Mekaru, Hiroshi Hiroshima, Sohei Matsumoto, Toshiro Itoh, Masaharu Takahashi, Ryutaro Maeda
How mold inserts influence the replication of metallic microparts produced by electroplating into two-component templates
- Technical Paper
Juergen Prokop, Jochen Heneka, Julia Lorenz, Kai Moehwald, Volker Piotter, Hans-Joachim Ritzhaupt-Kleissl, Karoline Vetter, Juergen Hausselt
Ceramic micro parts produced by micro injection molding: latest developments
- Technical Paper
Tobias Müller, Volker Piotter, Klaus Plewa, Markus Guttmann, Hans-Joachim Ritzhaupt-Kleissl, Juergen Hausselt
Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert
- Technical Paper
Jihoon Yeo, Jejun Ryu, Bong-Kee Lee, Euihyeon Byeon, Tai Hun Kwon, Dong Sung Kim
Fabrication of micro-capacitive inclination sensor by resin molding
- Technical Paper
Hiroaki Miyake, Kazufumi Nishimoto, Satoshi Nishida, Daiji Noda, Tadashi Hattori
Molding and hot forming techniques for fabricating plastic aspheric lenses with high blue-light transmittance
- Technical Paper
Kuo-Yung Hung, Yi-Ko Chen, Shih-Hao Huang, Der-Chi Shye
Applying SU-8™ to the fabrication of micro electro discharge machining electrodes
- Technical Paper
Ornwasa Traisigkhachol, Hermann Schmid, Marc Wurz, Hans H. Gatzen
Effect of oxalic acid concentration on the formation of anodic aluminum oxide using pulse anodization at room temperature
- Technical Paper
Chen-Kuei Chung, T. Y. Liu, W. T. Chang
The effect of the aspect ratio on the hydrophobicity of microstructured polydimethylsiloxane (PDMS) robust surfaces
- Technical Paper
Jihoon Yeo, Dong Sung Kim
Immunoassay using poly-tetrafluoroethylene microstructure in organic solvent
- Technical Paper
Yoshiaki Ukita, Saki Kondo, Chiwa Kataoka, Masahiro Takeo, Seiji Negoro, Yuichi Utsumi
Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73)
- Technical Paper
Guocheng Shao, Weiping Qiu, Wanjun Wang
Fabrication of microcoils with narrow and high aspect ratio coil lines
- Technical Paper
Daiji Noda, Masaru Setomoto, Yuki Kobayashi, Tadashi Hattori
Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding
- Technical Paper
S. Queste, R. Salut, S. Clatot, J.-Y. Rauch, Chantal G. Khan Malek
Direct bonding of PFTF sheets assisted by shynchrotron radiation induced surface modification
- Technical Paper
Yuichi Utsumi, Shigeaki Yamamoto, Tomoyuki Kuroki, Masaaki Okubo
Solvent-assisted low pressure room temperature lamination of low temperature cofirable ceramic green tapes for formation of embedded micro channels
- Technical Paper
Xuechuan Shan, H. P. Maw, C. W. Lu
A vibrating micro-scale CMM probe for measuring high aspect ratio structures
- Technical Paper
James D. Claverley, Richard K. Leach
Thickness measurement in ultrathick multilayer microstructures
- Technical Paper
Rainer Engelke, Uwe Richter
Methods for simulating and optimizing molded micro components and systems
- Technical Paper
Albert Albers, Hans-Georg Enkler, Pablo Leslabay
Micro gear validation: improving the correlation between virtual and physical testing
- Technical Paper
Albert Albers, Peter Börsting, Tobias Deigendesch, Hans-Georg Enkler, Pablo Leslabay
Patterns for design in microtechnology
- Technical Paper
Albert Albers, Tobias Deigendesch, Tarak Turki, Tobias Müller
In situ diagnostic capabilities for beam position and beam intensity monitoring at SyLMAND
- Technical Paper
Venkat Subramanian, Sven Achenbach, David Klymyshyn, Garth Wells, Wade Dolton, Vinay Nagarkal, Brian Yates, Curtis Mullin, Martin Augustin
Development of a biological detection platform utilizing a modular microfluidic stack
- Technical Paper
Niklas Frische, Proyag Datta, Jost Goettert
Design and microfabrication of a polymer membrane-based submicron scale electrophoretic flow detector for biomedical applications
- Technical Paper
Manouchehr Hashemi, Sven Achenbach, David Klymyshyn, Banafsheh Moazed, Jeremy Lee
Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses
- Technical Paper
Guocheng Shao, Wanjun Wang
Vertical liquid transportation through capillary bundle structure using centrifugal force
- Technical Paper
Saki Kondo, Tsukasa Azeta, Yoshiaki Ukita, Yuichi Utsumi
Micro gear pump with internal electromagnetic drive
- Technical Paper
Andreas Waldschik, Stephanus Büttgenbach
Micro liquid rotor operated by surface-acoustic-wave
- Technical Paper
Tsunemasa Saiki, Katsuhide Okada, Yuichi Utsumi
Design and mixing efficiency of rhombic micromixer with flat angles
- Technical Paper
C. K. Chung, T. R. Shih, B. H. Wu, C. K. Chang
Hot embossing of poly(lactic acid) films for an embedded cochlear implant stiffener
- Technical Paper
R. Tewari, C. Friedrich
Easily manageable, electrothermally actuated silicon micro gripper
- Technical Paper
B. Hoxhold, S. Büttgenbach
Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application
- Technical Paper
C. K. Chung, K. L. Sher, Y. J. Syu, C. C. Cheng
Fabrication of UV range light guide plate
- Technical Paper
Yuta Okayama, Kenji Yamashita, Yoshitaka Sawa, Daiji Noda, Tadashi Hattori
Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes
- Technical Paper
Yuichiro Ezoe, Ikuyuki Mitsuishi, Utako Takagi, Masaki Koshiishi, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Takaya Ohashi, Fumiki Kato, Susumu Sugiyama, Raul E. Riveros, Hitomi Yamaguchi, Shinya Fujihira, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda
Thermal-deformation analysis of a polymer micro-mirror optical device
- Technical Paper
Kuo-Yung Hung, Chun-Der Cheng, Ying-Chuan Chen
Research on electrostatic actuator polymer thin-film for controlling light scattering phenomena
- Technical Paper
Kuo-Yung Hung, Yun-Ju Chuang, T. H. Liao, Der-Chi Shye, Shih-Hao Huang
A wireless powered fully integrated SU-8-based implantable LC transponder
- Technical Paper
Sung-Hoon Cho, Sang-Hee Son, Hoon-Ju Chung, Jeong-Bong Lee
RMS voltage sensor based on a variable parallel-plate capacitor made of electroplated copper
- Technical Paper
Jan Dittmer, Lars Hecht, Rolf Judaschke, Stephanus Büttgenbach
