Ausgabe 9/2015 Special issue on design, test, integration and packaging of EMS/MOEMS, 2013
Inhalt (26 Artikel)
Special issue on design, test, integration and packaging of EMS/MOEMS, 2013
- Editorial
Bernard Courtois, Bernd Michel
Miniaturization of package for an implantable heart monitoring device
- Technical Paper
Anh-Tuan T. Nguyen, Fjodors Tjulkins, K. E. Aasmundtveit, Nils Hoivik, Lars Hoff, Kristin Imenes
The effect of sensing area position on the mechanical response of mass-detecting cantilever sensor
- Technical Paper
Marius Pustan, Cristian Dudescu, Corina Birleanu
Suspended integration of pyrolytic carbon membrane on C-MEMS
- Technical Paper
Shuang Xi, Tielin Shi, Hu Long, Liangliang Xu, Zirong Tang
A novel fabrication method of micro-needle mold by using the micro-lens mask through contact printing
- Technical Paper
Tsung-Hung Lin, Ching-Kong Chao, Shih-Yu Hung
Synthesis of Sn nanoparticles and their size effect on the melting point
- Technical Paper
Yang Ju, Takafumi Tasaka, Hayato Yamauchi, Tomoki Nakagawa
Diagnosis of parametric defects in dual axis IC accelerometers
- Technical Paper
Álvaro Gómez-Pau, Luz Balado, Joan Figueras
A new monolithic 3-axis thermal convective accelerometer: principle, design, fabrication and characterization
- Technical Paper
H. B. Nguyen, F. Mailly, L. Latorre, P. Nouet
Modeling of chemical mechanical polishing processes by cellular automata and finite element/matlab integration methods
- Technical Paper
Kuo-Shen Chen, Shang-Lun Wu, Hsiu-Ming Yeh
Using proximity exposure to produce asymmetrical lens for light control films
- Technical Paper
Tung-Yu Chang, Chien-Hsin Hung, Zhen-Jie Lian, Hsiharng Yang
Reliability of RF MEMS capacitive and ohmic switches for space redundancy configurations
- Technical Paper
Andrea Lucibello, Romolo Marcelli, Emanuela Proietti, Giancarlo Bartolucci, Viviana Mulloni, Benno Margesin
Multi-frequency CMOS oscillator based on CMOS MEMS SAW resonator
- Technical Paper
Jamilah Karim, Ahmad Anwar Zainuddin, A. H. M. Zahirul Alam, Anis Nurashikin Nordin
Improving the sensitivity of piezoelectric excited millimeter-sized cantilevers in sensing applications
- Technical Paper
A. A. Kashi, M. Zamani, M. Shamshirsaz, S. Asadi
Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
- Technical Paper
Aliza Aini Md Ralib, Anis Nurashikin Nordin, AHM Zahirul Alam, Uda Hashim, Raihan Othman
RF-MEMS packaging by using quartz caps and epoxy polymers
- Technical Paper
Flavio Giacomozzi, Viviana Mulloni, Sabrina Colpo, Alessandro Faes, Guido Sordo, Stefano Girardi
Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization
- Technical Paper
S. Santosh Kumar, B. D. Pant
A novel approach for MEMS with galvanic protection on SOI wafer
- Technical Paper
Wenshan Wei, Weilong You, Wei Zhao, Zhengyin Yu, Jun Pang, Heng Yang
Micro-channel diffusion characteristics of an implantable drug delivery device for age-related macular degeneration
- Technical Paper
Ramana M. Pidaparti, Jae-Hwan Lee, Hu Yang
Design and implementation of novel thin film position-sensitive detectors (TFPSDs) based on photoconductive effect
- Technical Paper
Yan-qing Zhu, Yuan-yuan Shan, Ming Qin
Influence of grains and surface roughness in boron and phosphorus implanted LPCVD polycrystalline silicon thin film
- Technical Paper
Kulwant Singh, Sanjeev Kumar, Robin Joyce, Rajesh Saha, Soney Varghese, Jamil Akhtar
Study on the giant magnetoimpedance effect in micro-patterned Co-based amorphous ribbons with single strip structure and tortuous shape
- Technical Paper
Zhen Yang, Chong Lei, Yong Zhou, Xue-cheng Sun
Fabrication and characterization of bionic amphiphobic functional surface on X70 pipeline steel
- Technical Paper
Hao Li, Sirong Yu, Enyang Liu, Yan Zhao
Fabrication and characterization of highly sensitive ZnO/Si SAW device with Pd selective layer for F2 gas sensing
- Technical Paper
Saleem Khan, Sandeep Arya, Suresh Kumar, Parveen Lehana
Fabrication of novel MEMS inertial switch with six layers on a metal substrate
- Technical Paper
Liqun Du, Ming Zhao, Aoan Wang, Shengli Chen, Weirong Nie
Designing of infrared detector based on the bi-material micro-cantilever and its manufacturing process research
- Technical Paper
Changlong Cai, Weiguo Liu
