Anzeige
Erschienen in:
1984 | OriginalPaper | Buchkapitel
MIQ-156 MARK II A Highly Advanced and Versatile Quadrupole SIMS Instrument, with Dual Primary Ion Source
verfasst von : F. Simondet, P. Staib
Erschienen in: Secondary Ion Mass Spectrometry SIMS IV
Verlag: Springer Berlin Heidelberg
Enthalten in: Professional Book Archive
Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.
Wählen Sie Textabschnitte aus um mit Künstlicher Intelligenz passenden Patente zu finden. powered by
Markieren Sie Textabschnitte, um KI-gestützt weitere passende Inhalte zu finden. powered by
Analytical work based on SIMS is greatly improved using primary beams of reactive gases. Matrix effects are reduced, ion yield are enhanced and relative peak intensities are more representative of the atomic surface concentration (1 to 6). This affords the use of different ion species and separate ion sources. We use a duoplasmatron to produce Ar+ , N2+ and O2+ ions combined to a commercial cesium ion source (7). Aim of our development is to check the feasibility of a dual line configuration, so that both sources can be run simultaneously and the beam switched in a matter of minutes.