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Microsystem Technologies
Erschienen in: Microsystem Technologies 7/2017

08.08.2016 | Technical Paper

Modeling the effect of microstructure on the coupled torsion/bending instability of rotational nano-mirror in Casimir regime

verfasst von: M. Keivani, A. Koochi, J. Mokhtari, N. Abadian, M. Abadyan

Erschienen in: Microsystem Technologies | Ausgabe 7/2017

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Abstract

It has been well-established that the physical performance of nano-devices might be affected by the microstructure. Herein, a 2-degree-of-freedom model based on the modified couple stress elasticity is developed to incorporate the impact of microstructure in the torsion/bending coupled instability of rotational nano-electromechanical mirror. The governing equation of the mirror is derived incorporating the effects of electrostatic Coulomb and corrected Casimir forces with the consideration of the finite conductivity of interacting surfaces. Effect of microstructure-dependency on the instability parameters are determined as a function of the microstructure parameter, bending/torsion coupling ratio, vacuum fluctuation parameter and geometrical dimensions. It is found that the bending/torsion coupling substantially affects the stable behavior of the mirrors especially those with long rotational beam elements. Depending on the geometry and material characteristics, the presented model is able to simulate both hardening behavior (due to microstructure) and softening behavior (due to torsion/bending coupling) of the nano-mirror.
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Metadaten
Titel
Modeling the effect of microstructure on the coupled torsion/bending instability of rotational nano-mirror in Casimir regime
verfasst von
M. Keivani
A. Koochi
J. Mokhtari
N. Abadian
M. Abadyan
Publikationsdatum
08.08.2016
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 7/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3094-x

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