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Abstract
Nanorobotics is the study of robotics at the nanometer scale, and includes robots that are nanoscale in size and large robots capable of manipulating objects that have dimensions in the nanoscale range with nanometer resolution. With the ability to position and orient nanometer-scale objects, nanorobotic manipulation is a promising way to enable the assembly of nanosystems including nanorobots.
This chapter overviews the state of the art of nanorobotics, outlines nanoactuation, and focuses on nanorobotic manipulation systems and their application in nanoassembly, biotechnology and the construction and characterization of nanoelectromechanical systems (NEMS) through a hybrid approach.
Because of their exceptional properties and unique structures, carbon nanotubes (CNTs) and SiGe/Si nanocoils are used to show basic processes of nanorobotic manipulation, structuring and assembly, and for the fabrication of NEMS including nano tools, sensors and actuators.
A series of processes of nanorobotic manipulation, structuring and assembly has been demonstrated experimentally. Manipulation of individual CNTs in three-dimensional (3-D) free space has been shown by grasping using dielectrophoresis and placing with both position and orientation control for mechanical and electrical property characterization and assembly of nanostructures and devices. A variety of material property investigations can be performed, including bending, buckling, and pulling to investigate elasticity as well as strength and tribological characterization. Structuring of CNTs can be performed including shape modification, the exposure of nested cores, and connecting CNTs by van der Waals forces, electron-beam-induced deposition and mechanochemical bonding. Nanorobotics provides novel techniques for exploring the biodomain by manipulation and characterization of nanoscale objects such as cellular membranes, DNA and other biomolecules. Nano tools, sensors and actuators can provide measurements and/or movements that are calculated in nanometers, gigahertz, piconewtons, femtograms, etc., and are promising for molecular machines and bio- and nanorobotics applications. Efforts are focused on developing enabling technologies for nanotubes and other nanomaterials and structures for NEMS and nanorobotics. By combining bottom-up nanorobotic manipulation and top-down nanofabrication processes, a hybrid approach is demonstrated for creating complex 3-D nanodevices. Nanomaterial science, bionanotechnology, and nanoelectronics will benefit from advances in nanorobotics.
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