Skip to main content
main-content

Tipp

Weitere Artikel dieser Ausgabe durch Wischen aufrufen

04.07.2019 | Technical Paper

Nonlinear structural behavior of a size-dependent MEMS gyroscope assuming a non-trivial shaped proof mass

Zeitschrift:
Microsystem Technologies
Autor:
Hassen M. Ouakad
Wichtige Hinweise

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Abstract

In this paper, a size-dependent based non-classical mechanics model for the structural behavior of a MEMS (micro-electro-mechanical systems) gyroscope is investigated. The micro-cantilever based gyroscope is possessing a proof mass at its free end, assumed to hold a non-negligible length as compared to the micro-cantilever’s length. The proof mass is triggered through an actuating electrode and at the same time is assuming a sensing electrode together assuming parallel-plates capacitive arrangements. The governing equations of the micro-gyroscope system are derived within the framework of a modified couple stress non-classical mechanics theory. Based on the resulting equations, the static and dynamic analyses of the system are performed to estimate the pull-in instability voltages, natural frequency, and dynamic responses of the sensing electrodes near primary resonance that are caused by the use of point mass assumption and classical theory. A mixed based method involving both the Galerkin modal expansion procedure along with the method of multiple scales (MMS) technique is utilized to carry out the micro-gyroscope primary resonance analysis through plotting its respective frequency responses near its fundamental mode. Simulated results show that the proof mass dimension and its respective size effects play a substantial role in drastically changing the initiation of the system pull-in instability along its actuation direction, its fundamental natural frequency, and accordingly its dynamic amplitude along its corresponding sensing direction.

Bitte loggen Sie sich ein, um Zugang zu diesem Inhalt zu erhalten

Sie möchten Zugang zu diesem Inhalt erhalten? Dann informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 69.000 Bücher
  • über 500 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Umwelt
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Testen Sie jetzt 30 Tage kostenlos.

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 50.000 Bücher
  • über 380 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Umwelt
  • Maschinenbau + Werkstoffe




Testen Sie jetzt 30 Tage kostenlos.

Literatur
Über diesen Artikel