Novel junctionless electrolyte-insulator-semiconductor field-effect transistor (JL EISFET) and its application as pH/biosensor

Silicon technology is one of the most promising for sensor development. Moreover, device simulation tools, originally introduced to design electronic circuits, can be adapted to design silicon-based chemical-sensor and bio-sensor. In this order, electrolyte region has been described by modifying properties of intrinsic semiconductor material as the intrinsic semiconductor has similarity with the electrolyte. Ionic solution (electrolyte) contains mobile ions whereas the intrinsic semiconductor material contains thermally generated mobile carriers (holes and electrons). Therefore, these electrons and holes represent the mobile ions of the solution with dielectric constant of the semiconductor material to be 78.5 (which is the dielectric constant of water). The Debye lengths were extracted depending on the concentration of phosphate buffered saline (PBS) solutions in the electrolyte region. In this paper, Junctionless based EISFET has been investigated for its applications as pH sensor and Biosensor. The change in the threshold voltage is considered as the sensing parameter to investigate the sensitivity of the device as pH sensor and biosensor.