Computer-aided techniques and numerical testing-related technologies have been widely used in recent years. Among them, stress analysis is the most commonly used. Many industries require the application of mechatronics design technology to mechanical structures to improve structural strength. Stress analysis is the most direct and effective control mechanism. The optimal design involves achieving the best structural performance with the least time and cost by effectively improving the structural strength and reducing the production cost. A critical issue is practical research concerning the analysis and optimization of mechatronics design. Therefore, this study proposes the technical application of stress analysis and optimization by combining multi-point simultaneous point measurement technology for the process and micro-probe equipment. In addition to reducing the development time and costs, the mechatronics design of the equipment is optimized. Moreover, the designed machine can perform stress, modal, transient, and frequency spectrum analyses. Furthermore, the static stiffness and dynamic stiffness tests are used to verify the effectiveness of the analysis with actual data. The analysis revealed multiple mode shapes and natural frequencies. In the first mode shape 128.1 Hz, both styluses oscillated up and down simultaneously. The second mode shape, 200.81 Hz, involved styluses oscillating up and down at different times. In the third mode shape 252.4 Hz, the styluses swayed upward and inward simultaneously. Finally, the fourth mode shape, 278.4 Hz, involved the styluses swaying upward and inward simultaneously. Therefore, this study assists in performance prediction in the development process of micro-probe measuring equipment. The error between the numerical and experimental results was less than 10%, suggesting that the analysis model and boundary conditions suitably reflect the testing machine’s actual conditions and physical phenomena. The original design (40 ms) presented a frequency of about 5 Hz and a max displacement of 0.230 mm with a drop of 0 μm for Case I. Then, for Case II (35 ms) frequency of 5 Hz and max displacement is 0.228 mm with a drop of 2 μm. Similarly, for Case III (30 ms) frequency 5 Hz, the max displacement is 0.227 mm, and the drop is 3 μm. After Optimization Case I (40 ms), the frequency is 5 Hz, and the max displacement is 0.230 mm with a drop of 0 μm. In Case II (35 ms), the frequency is 5 Hz, and the max displacement is 0.230 mm with a drop of 0 μm. Case III (30 ms) has a frequency of 6 Hz, and the max displacement is 0.230 mm with a drop of 0 μm. After optimization, 14.6%, 16.2%, and 17.6% were observed for Cases I, II, and III.
