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Microsystem Technologies
Erschienen in: Microsystem Technologies 8/2020

14.02.2020 | Technical Paper

On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications

verfasst von: Salar Ghasemi, Saeid Afrang, Ghader Rezazadeh, Sima Darbasi, Behzad Sotoudeh

Erschienen in: Microsystem Technologies | Ausgabe 8/2020

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Abstract

We present a method for tuning the resonance frequency of a comb resonator using a combination of mechanically softening and hardening springs in order to achieve a high tuning range of resonant frequency. The nonlinear behavior of the structure is due to an angle in the main beam of a crab-leg flexure. Theoretical and simulation results are done to analyze the linear, quadratic, and cubic stiffness as well as frequency changes of the comb drive actuators. The frequency response of the resonator is achieved using the Lindstedt-Poincaré perturbation technique. In order to validate the theoretical analysis, the results are compared with simulation results obtained by COMSOL software.
Vorheriger Artikel Design and of analysis of SPDT Ohmic RF MEMS switch
Nächster Artikel A UHF CPW-fed patch antenna for nanosatellite store and forward mission

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Metadaten
Titel
On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications
verfasst von
Salar Ghasemi
Saeid Afrang
Ghader Rezazadeh
Sima Darbasi
Behzad Sotoudeh
Publikationsdatum
14.02.2020
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 8/2020
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-020-04779-9

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