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2003 | OriginalPaper | Buchkapitel

Optimal Control of Sublimation Growth of SiC Crystals

verfasst von : Jürgen Sprekels, Olaf Klein, Peter Philip, Krzysztof Wilmański

Erschienen in: Mathematics — Key Technology for the Future

Verlag: Springer Berlin Heidelberg

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The project aims at providing numerical tools to control and optimize sublimation growth of SiC bulk single crystals via the Modified Lely Method. It is in cooperation with the experimental group of Dr. Dietmar Siche at the Institute of Crystal Growth in Berlin. In the course of the project the Modified Lely Method is mathematically modeled and numerically simulated. We present a transient model which for the gas phase consists of balance equations for mass, momentum and energy, and reaction-diffusion equations. The model for the solid components takes into account heat transfer via conduction inside the solid materials and via radiation between solid surfaces of cavities. Results of transient numerical simulations of the temperature evolution inside the growth apparatus are depicted, illustrating the paramount influence of radiation at growth temperature.

Metadaten
Titel
Optimal Control of Sublimation Growth of SiC Crystals
verfasst von
Jürgen Sprekels
Olaf Klein
Peter Philip
Krzysztof Wilmański
Copyright-Jahr
2003
Verlag
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-642-55753-8_28