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Microsystem Technologies
Erschienen in: Microsystem Technologies 5/2016

20.05.2015 | Technical Paper

Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulation method

verfasst von: Zhifu Yin, Lei Sun, Helin Zou, Shenbo Xu

Erschienen in: Microsystem Technologies | Ausgabe 5/2016

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Abstract

The profile of the nano-mold can also influence the replication precision of the final 2D polymer nanochannels. In the present work, the aspect ratio of the nano-mold, the duty ratio of the nano-mold, and the thickness ratio were investigated by numerical simulation method. The replication precision of the 2D polymer nanochannels is evaluated by imprinting ratio. The simulation results show that the lower aspect ratio and duty ratio is associated with higher imprinting ratio. However, the imprinting ratio increases with the thickness ratio at beginning and then keeps nearly unchanged as the thickness ratio continuously increases. The proper thickness ratio is two. The imprinting temperature and pressure were also optimized according the imprinting ratio. The simulation results show that the optimal imprinting temperature and pressure were 120 °C and 1.5 MPa, respectively.
Vorheriger Artikel Dynamic characteristics of voltage induced reciprocated bending in double cantilever configuration of asymmetric comb drive MEMS
Nächster Artikel Vibration analysis of initially curved single walled carbon nanotube with vacancy defect for ultrahigh frequency nanoresonators

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Metadaten
Titel
Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulation method
verfasst von
Zhifu Yin
Lei Sun
Helin Zou
Shenbo Xu
Publikationsdatum
20.05.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 5/2016
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2564-x

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