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Erschienen in:
1989 | OriginalPaper | Buchkapitel
Particulate Generation and Detection on Surfaces
verfasst von : Marvin Fein
Erschienen in: Particles on Surfaces 2
Verlag: Springer US
Enthalten in: Professional Book Archive
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This paper describes a tool that was developed to evaluate particulate generation of materials. The tool provides realtime data of both airborne and settling particulates in a consistent and repeatable manner by inputting a continuous and controlled stress on the material in a controlled test chamber environment. Sample test results on several cleanroom materials are presented to demonstrate the use of the tool.