Quantitative X-Ray Analysis: The Basics

As discussed in Chapters 6–8, the x-rays emitted from a specimen bombarded with the finely focused electron beam of the scanning electron microscope (SEM) can be used to identify which elements are present (qualitative analysis). Using flat-polished samples and a proper experimental setup and data reduction procedure, one can use the measured x-rays from the identified elements to quantitatively analyze chemical composition with an accuracy and precision approaching 1%. We term the analysis of flatpolished samples “conventional microprobe analysis.” The beam energy for conventional microprobe analysis is usually E₀ ≥ 10 keV.