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Erschienen in:
2010 | OriginalPaper | Buchkapitel
Quartz and MEM Resonators
verfasst von : Eric Vittoz
Erschienen in: Low-Power Crystal and MEMS Oscillators
Verlag: Springer Netherlands
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As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO
2
), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties. Therefore, a part of the electrical energy stored in the capacitor is converted into mechanical energy.