Skip to main content

2016 | OriginalPaper | Buchkapitel

3. Realization of Terahertz Self-Mixing Detectors Based on AlGaN/GaN HEMT

verfasst von : Jiandong Sun

Erschienen in: Field-effect Self-mixing Terahertz Detectors

Verlag: Springer Berlin Heidelberg

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

In this chapter, the fabrication, characterization, and optimization of self-mixing terahertz field-effect detectors based on AlGaN/GaN 2DEG are introduced in details. By fabrication, five different detectors are made to uncover the self-mixing mechanism and search for an optimized detector design. By characterization, we not only obtain the \(I-V\) characteristics, the responsivity, the noise-equivalent power, the response spectrum, the response speed, the polarization effect, etc, but also we probe the localized self-mixing photocurrent based on which the quasi-static detector model and the design of asymmetric antenna are verified. Under the guidance of the detector model, we focus on the design of terahertz antennas and field-effect gate to improve the detector responsivity and sensitivity. An asymmetric antenna with three dipole blocks is found to be the most effective antenna among the five different designs. A design rule for high-sensitivity terahertz detectors is given.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
1.
Zurück zum Zitat Ambacher, O.: Growth and applications of group-III-nitrides. J. Phys. D: Appl. Phys. 31(20), 2653 (1998) Ambacher, O.: Growth and applications of group-III-nitrides. J. Phys. D: Appl. Phys. 31(20), 2653 (1998)
2.
Zurück zum Zitat Nakamura, S., Senoh, M., Iwasa, N., Nagahama, S.: High-brightness InGaN blue, green and yellow light-emitting diodes with quantum well structures. Jpn. J. Appl. Phys. 34, L797 (1995)CrossRef Nakamura, S., Senoh, M., Iwasa, N., Nagahama, S.: High-brightness InGaN blue, green and yellow light-emitting diodes with quantum well structures. Jpn. J. Appl. Phys. 34, L797 (1995)CrossRef
3.
Zurück zum Zitat Nakamura, S., Makai, T., Sench, M.: High-brightness InGaN/AlGaN double-heterostructure blue-green-light-emitting diodes. J. Appl. Phys. 76, 8189 (1994)CrossRef Nakamura, S., Makai, T., Sench, M.: High-brightness InGaN/AlGaN double-heterostructure blue-green-light-emitting diodes. J. Appl. Phys. 76, 8189 (1994)CrossRef
4.
Zurück zum Zitat Puurunen, R.L.: Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process. J. Appl. Phys. 97, 121301 (2005)CrossRef Puurunen, R.L.: Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process. J. Appl. Phys. 97, 121301 (2005)CrossRef
5.
Zurück zum Zitat Sun, J.D., Sun, Y.F., Wu, D.M., Cai, Y., Qin, H., Zhang, B.S.: High-responsivity, low-noise, room-temperature, self-mixing terahertz detector realized using floating antennas on a GaN-based field-effect transistor. Appl. Phys. Lett. 100, 013506 (2012)CrossRef Sun, J.D., Sun, Y.F., Wu, D.M., Cai, Y., Qin, H., Zhang, B.S.: High-responsivity, low-noise, room-temperature, self-mixing terahertz detector realized using floating antennas on a GaN-based field-effect transistor. Appl. Phys. Lett. 100, 013506 (2012)CrossRef
6.
Zurück zum Zitat Sun, Y.F., Sun, J.D., Zhou, Y., Tan, R.B., Zeng, C.H., Xue, W., Qin, H., Zhang, B.S., Wu, D.M.: Room temperature GaN/AlGaN self-mixing terahertz detector enhanced by resonant antennas. Appl. Phys. Lett. 98, 252103 (2011)CrossRef Sun, Y.F., Sun, J.D., Zhou, Y., Tan, R.B., Zeng, C.H., Xue, W., Qin, H., Zhang, B.S., Wu, D.M.: Room temperature GaN/AlGaN self-mixing terahertz detector enhanced by resonant antennas. Appl. Phys. Lett. 98, 252103 (2011)CrossRef
7.
Zurück zum Zitat Sun, J.D., Sun, Y.F., Zhou, Y., Zhang, Z.P., Lin, W.K., Zeng, C.H., Wu, D.M., Zhang, B.S., Qin, H., Li, L.L., Xu, W.: Enhancement of terahertz coupling efficiency by improved antenna design in GaN/AlGaN HEMT detectors. AIP Conf. Proc. 1399, 893 (2011)CrossRef Sun, J.D., Sun, Y.F., Zhou, Y., Zhang, Z.P., Lin, W.K., Zeng, C.H., Wu, D.M., Zhang, B.S., Qin, H., Li, L.L., Xu, W.: Enhancement of terahertz coupling efficiency by improved antenna design in GaN/AlGaN HEMT detectors. AIP Conf. Proc. 1399, 893 (2011)CrossRef
8.
Zurück zum Zitat Zhou, Y., Sun, J.D., Sun, Y.F., Zhang, Z.P., Lin, W.K., Lou, H.X., Zeng, C.H., Lu, M., Cai, Y., Wu, D.M., Lou, S.T., Qin, H., Zhang, B.S.: Characterization of a room temperature terahertz detector based on a GaN/AlGaN HEMT. J. Semicond. 32(4), 064005 (2011)CrossRef Zhou, Y., Sun, J.D., Sun, Y.F., Zhang, Z.P., Lin, W.K., Lou, H.X., Zeng, C.H., Lu, M., Cai, Y., Wu, D.M., Lou, S.T., Qin, H., Zhang, B.S.: Characterization of a room temperature terahertz detector based on a GaN/AlGaN HEMT. J. Semicond. 32(4), 064005 (2011)CrossRef
9.
Zurück zum Zitat Tauk, R., Teppe, F., Boubanga, S., Coquillat, D., Knap, W., Meziani, Y.M., Gallon, C., Boeuf, F., Skotnicki, T., Fenouillet-Beranger, C., Maude, D.K., Rumyantseva, S., Shur, M.S.: Plasma wave detection of terahertz radiation by silicon field effects transistors: responsivity and noise equivalent power. Appl. Phys. Lett. 89, 253511 (2006)CrossRef Tauk, R., Teppe, F., Boubanga, S., Coquillat, D., Knap, W., Meziani, Y.M., Gallon, C., Boeuf, F., Skotnicki, T., Fenouillet-Beranger, C., Maude, D.K., Rumyantseva, S., Shur, M.S.: Plasma wave detection of terahertz radiation by silicon field effects transistors: responsivity and noise equivalent power. Appl. Phys. Lett. 89, 253511 (2006)CrossRef
10.
Zurück zum Zitat Knap, W., Dyakonov, M., Coquillat, D., Teppe, F., Dyakonova, N., Sakowski, J., Karpierz, K., Sakowicz, M., Valusis, G., Seliuta, D., Kasalynas, I., El Fatimy, A.: Field effect transistor for terahertz detection: physics and first imaging applications. J. Infrared Millim. Terahz. Waves 30(12), 1319–1337 (2009) Knap, W., Dyakonov, M., Coquillat, D., Teppe, F., Dyakonova, N., Sakowski, J., Karpierz, K., Sakowicz, M., Valusis, G., Seliuta, D., Kasalynas, I., El Fatimy, A.: Field effect transistor for terahertz detection: physics and first imaging applications. J. Infrared Millim. Terahz. Waves 30(12), 1319–1337 (2009)
11.
Zurück zum Zitat Knap, W., Teppe, F., Meziani, Y., Dyakonova, N., Lusakowski, J., Buf, F., Skotnicki, T., Maude, D., Rumyantsev, S., Shur, M.S.: Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors. Appl. Phys. Lett. 85, 675 (2004)CrossRef Knap, W., Teppe, F., Meziani, Y., Dyakonova, N., Lusakowski, J., Buf, F., Skotnicki, T., Maude, D., Rumyantsev, S., Shur, M.S.: Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors. Appl. Phys. Lett. 85, 675 (2004)CrossRef
12.
Zurück zum Zitat Lisauskas, A., Pfeiffer, U., Öjefors, E., Bolìvar, P.H., Glaab, D., Roskos, H.G.: Rational design of high-responsivity detectors of terahertz radiation based on distributed self-mixing in silicon field-effect transistors. J. Appl. Phys. 105, 114511 (2009)CrossRef Lisauskas, A., Pfeiffer, U., Öjefors, E., Bolìvar, P.H., Glaab, D., Roskos, H.G.: Rational design of high-responsivity detectors of terahertz radiation based on distributed self-mixing in silicon field-effect transistors. J. Appl. Phys. 105, 114511 (2009)CrossRef
13.
Zurück zum Zitat Knap, W., Rumyantsev, S., Lu, J., Shur, M., Saylor, C., Brunel, L.: Resonant detection of subterahertz radiation by plasma waves in a submicron field-effect transistor. Appl. Phys. Lett. 80, 3433 (2002)CrossRef Knap, W., Rumyantsev, S., Lu, J., Shur, M., Saylor, C., Brunel, L.: Resonant detection of subterahertz radiation by plasma waves in a submicron field-effect transistor. Appl. Phys. Lett. 80, 3433 (2002)CrossRef
14.
Zurück zum Zitat El Fatimy, A., Teppe, F., Dyakonova, N., Knap, W., Seliuta, D., Valuis, G., Shchepetov, A., Roelens, Y., Bollaert, S., Cappy, A., Rumyantsev, S.: Resonant and voltage-tunable terahertz detection in InGaAs/InP nanometer transistors. Appl. Phys. Lett. 89, 131926 (2006)CrossRef El Fatimy, A., Teppe, F., Dyakonova, N., Knap, W., Seliuta, D., Valuis, G., Shchepetov, A., Roelens, Y., Bollaert, S., Cappy, A., Rumyantsev, S.: Resonant and voltage-tunable terahertz detection in InGaAs/InP nanometer transistors. Appl. Phys. Lett. 89, 131926 (2006)CrossRef
15.
Zurück zum Zitat Popov, V.V., Polischuk, O.V., Knap, W., El Fatimy, A.: Broadening of the plasmon resonance due to plasmon-plasmon intermode scattering in terahertz high-electron-mobility transistors. Appl. Phys. Lett. 93, 263503 (2008)CrossRef Popov, V.V., Polischuk, O.V., Knap, W., El Fatimy, A.: Broadening of the plasmon resonance due to plasmon-plasmon intermode scattering in terahertz high-electron-mobility transistors. Appl. Phys. Lett. 93, 263503 (2008)CrossRef
16.
Zurück zum Zitat Lü, J.Q., Shur, M.S.: Terahertz detection by high-electron-mobility transistor: enhancement by drain bias. Appl. Phys. Lett. 78, 2587 (2001) Lü, J.Q., Shur, M.S.: Terahertz detection by high-electron-mobility transistor: enhancement by drain bias. Appl. Phys. Lett. 78, 2587 (2001)
17.
Zurück zum Zitat Veksler, D., Teppe, F., Dmitriev, A.P., Yu, V., Kachorovskii, Knap, W.: Detection of terahertz radiation in gated two-dimensional structures governed by dc current. Phys. Rev. B 73, 125328 (2006) Veksler, D., Teppe, F., Dmitriev, A.P., Yu, V., Kachorovskii, Knap, W.: Detection of terahertz radiation in gated two-dimensional structures governed by dc current. Phys. Rev. B 73, 125328 (2006)
18.
Zurück zum Zitat Sun, J.D., Qin, H., Lewis, R.A., Sun, Y.F., Zhang, X.Y., Cai, Y., Wu, D.M., Zhang, B.S.: Probing and modelling the localized self-mixing in a GaN/AlGaN field-effect terahertz detector. Appl. Phys. Lett. 100, 173513 (2012)CrossRef Sun, J.D., Qin, H., Lewis, R.A., Sun, Y.F., Zhang, X.Y., Cai, Y., Wu, D.M., Zhang, B.S.: Probing and modelling the localized self-mixing in a GaN/AlGaN field-effect terahertz detector. Appl. Phys. Lett. 100, 173513 (2012)CrossRef
19.
Zurück zum Zitat Tauk, R., Teppe, F., Boubanga, S., Coquillat, D., Knap, W.: Plasma wave detection of terahertz radiation by silicon field effects transistors: responsivity and noise equivalent power. Appl. Phys. Lett. 89, 253511 (2006)CrossRef Tauk, R., Teppe, F., Boubanga, S., Coquillat, D., Knap, W.: Plasma wave detection of terahertz radiation by silicon field effects transistors: responsivity and noise equivalent power. Appl. Phys. Lett. 89, 253511 (2006)CrossRef
20.
Zurück zum Zitat Öjefors, E., Lisauskas, A., Glaab, D., Roskos, H.G., Pfeiffer, U.R.: Terahertz imaging detectors in CMOS technology. J. Infrared Millim. Terahz. Waves 30(12), 1269–1280 (2009) Öjefors, E., Lisauskas, A., Glaab, D., Roskos, H.G., Pfeiffer, U.R.: Terahertz imaging detectors in CMOS technology. J. Infrared Millim. Terahz. Waves 30(12), 1269–1280 (2009)
21.
Zurück zum Zitat Wang, B., Hellums, J.R., Sodini, C.G.: Thermal noise modeling for analog integrated circuits. IEEE J. Solid-State Circuits 29, 833 (1994)CrossRef Wang, B., Hellums, J.R., Sodini, C.G.: Thermal noise modeling for analog integrated circuits. IEEE J. Solid-State Circuits 29, 833 (1994)CrossRef
22.
Zurück zum Zitat Hesler, J.L., Crowe, T.W.: Responsivity and noise measurements of zero-zias Schottky ziode zetectors. In: Proceeding of the 18th International Symposium on Space Terahertz Technology, vol. 18, pp. 89 (2007) Hesler, J.L., Crowe, T.W.: Responsivity and noise measurements of zero-zias Schottky ziode zetectors. In: Proceeding of the 18th International Symposium on Space Terahertz Technology, vol. 18, pp. 89 (2007)
25.
Zurück zum Zitat Boppel, S., Lisauskas, A., Krozer, V., Roskos, H.G.: Performance and performance variations of sub-1 THz detectors fabricated with \(0.15\,\upmu {\rm m}\) CMOS foundry process. Electron. Lett. 47(11), 661–662 (2011)CrossRef Boppel, S., Lisauskas, A., Krozer, V., Roskos, H.G.: Performance and performance variations of sub-1 THz detectors fabricated with \(0.15\,\upmu {\rm m}\) CMOS foundry process. Electron. Lett. 47(11), 661–662 (2011)CrossRef
26.
Zurück zum Zitat Öjefors, E., Baktash, N., Zhao, Y., Hadi, R.A., Sherry, H., Pfeiffer, U.R.: Terahertz imaging detectors in a 65-nm CMOS SOI technology. In: 2010 Proceedings of 36th European Solid-State Circuits Conference, vol. 36, pp. 486–489 (2010) Öjefors, E., Baktash, N., Zhao, Y., Hadi, R.A., Sherry, H., Pfeiffer, U.R.: Terahertz imaging detectors in a 65-nm CMOS SOI technology. In: 2010 Proceedings of 36th European Solid-State Circuits Conference, vol. 36, pp. 486–489 (2010)
27.
Zurück zum Zitat Schuster, F., Coquillat, D., Videlier, H., Sakowicz, M., Teppe, F., Dussopt, L., Giffard, B., Skotnicki, T., Knap, W.: Broadband terahertz imaging with highly sensitive silicon CMOS detectors. Opt. Express 19(8), 7827–7832 (2011)CrossRef Schuster, F., Coquillat, D., Videlier, H., Sakowicz, M., Teppe, F., Dussopt, L., Giffard, B., Skotnicki, T., Knap, W.: Broadband terahertz imaging with highly sensitive silicon CMOS detectors. Opt. Express 19(8), 7827–7832 (2011)CrossRef
28.
Zurück zum Zitat Kachorovskii, V.Y., Shur, M.S.: Field effect transistor as ultrafast detector of modulated terahertz radiation. Solid State Electron. 52(2), 182–185 (2008)CrossRef Kachorovskii, V.Y., Shur, M.S.: Field effect transistor as ultrafast detector of modulated terahertz radiation. Solid State Electron. 52(2), 182–185 (2008)CrossRef
29.
Zurück zum Zitat Sakowicz, M., sakowski, J., Karpierz, K., Grynberg, M., Knap, W., Gwarek, W.: Polarization sensitive detection of 100 GHz radiation by high mobility field-effect transistors. J. Appl. Phys. 104, 024519 (2008) Sakowicz, M., sakowski, J., Karpierz, K., Grynberg, M., Knap, W., Gwarek, W.: Polarization sensitive detection of 100 GHz radiation by high mobility field-effect transistors. J. Appl. Phys. 104, 024519 (2008)
Metadaten
Titel
Realization of Terahertz Self-Mixing Detectors Based on AlGaN/GaN HEMT
verfasst von
Jiandong Sun
Copyright-Jahr
2016
Verlag
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-662-48681-8_3

Neuer Inhalt