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2013 | OriginalPaper | Buchkapitel

4. Relationship Between Surface Morphology and Effective Medium Roughness

verfasst von : Angel Yanguas-Gil, Herbert Wormeester

Erschienen in: Ellipsometry at the Nanoscale

Verlag: Springer Berlin Heidelberg

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Abstract

The modeling of surface and interface roughness is a key issue in the interpretation of ellipsometric measurements. Materials properties are often extracted from ellipsometry measurements in an indirect way by modeling the optical response of the material. Since roughness is known to affect the scattering of light on an interface, how roughness is incorporated into these models can affect the outcome of the fitting procedure.

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Metadaten
Titel
Relationship Between Surface Morphology and Effective Medium Roughness
verfasst von
Angel Yanguas-Gil
Herbert Wormeester
Copyright-Jahr
2013
Verlag
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-642-33956-1_4

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