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Erschienen in:
2016 | OriginalPaper | Buchkapitel
Research on Adaptive Control Algorithm of Nano Positioning Stage
verfasst von : Jing Dai, Tianqi Wang, Meng Shao, Peng Qu
Erschienen in: Harmony Search Algorithm
Verlag: Springer Berlin Heidelberg
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The mechanical structure and load changes of nano positioning stage cause a poor accuracy of the control system. For solving the problem, Adaptive PID control algorithm was applied to control the nano positioning stage. The model of nano positioning stage was established on the basis of Controlled Autoregressive Moving Average model (CARMA). The parameters of controller were identified based on Recursive Extended Least Squares algorithm (RELS). The control system of nano positioning stage was steady through 4ms after parameters identification, which static error was less than 5nm. The experimental results demonstrated that adaptive PID control algorithm was able to identify the parameters of controlled object and calculate the parameters of controller. The accuracy of control system can be at nanometer resolution.