Anzeige
Erschienen in:
2010 | OriginalPaper | Buchkapitel
Research on Nano-repositioning of Atomic Force Microscopy Based on Nano-manipulation
verfasst von : Sun Xin, Jin Xiaoping
Erschienen in: Life System Modeling and Intelligent Computing
Verlag: Springer Berlin Heidelberg
Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.
Wählen Sie Textabschnitte aus um mit Künstlicher Intelligenz passenden Patente zu finden. powered by
Markieren Sie Textabschnitte, um KI-gestützt weitere passende Inhalte zu finden. powered by
Nano-manipulation technology is an emerging field in the development of modern science and technology. Thus, the improvement of its positioning and repositioning precision has become each nano worker’s dream and ultimate goal. However, due to the hysteresis, creep, and other nonlinearity of piezoelectric ceramics tube (PZT) as well as the probe’s tip deviations caused by cantilever deformation, it leads larger error of relative displacement between probe and sample, which adds enormous inconvenience to the nano-manipulation and repositioning. The subject is to research and design a 3-D repositioning control technology to improve repositioning accuracy.