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Erschienen in:
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2021 | OriginalPaper | Buchkapitel

3. Results: NLA Using a Short Pulse Duration KrF Laser

verfasst von : Daniel Montero Álvarez

Erschienen in: Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals

Verlag: Springer International Publishing

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Abstract

This chapter describes the research performed on samples annealed with the KrF laser from IPG Photonics (USA), which features a short pulse duration of 25 ns, with a wavelength of 248 nm. All the samples analysed in this chapter are based on 50.8 mm wafers and have been implanted in the Faculty of Physics, using the available ion implanter belonging to CAI Técnicas Físicas. We also describe the fabrication process of the first prototypes of micro photodiodes, as well as their optical and electrical characterization, where we demonstrate the compatibility of the Ti supersaturated material with devices in the microscale.

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Vorheriges Kapitel Experimental Techniques
Nächstes Kapitel Results: NLA Using a Long Pulse Duration XeCl Laser
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Metadaten
Titel
Results: NLA Using a Short Pulse Duration KrF Laser
verfasst von
Daniel Montero Álvarez
Copyright-Jahr
2021
Buch
Near Infrared Detectors Based on Silicon Supersaturated with Transition Metals

Print ISBN: 978-3-030-63825-2

Electronic ISBN: 978-3-030-63826-9

Copyright-Jahr: 2021

DOI
https://doi.org/10.1007/978-3-030-63826-9_3

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