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Microsystem Technologies
Erschienen in: Microsystem Technologies 6/2015

01.06.2015 | Technical Paper

Robust control of the electrostatic torsional micromirrors

verfasst von: Guangping He, Zhiyong Geng

Erschienen in: Microsystem Technologies | Ausgabe 6/2015

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Abstract

In order to simplify the sensors subsystems of the electrostatic torsional micromirrors (ETMs), the output feedback control for the ETM systems is investigated in this paper. The dynamics of the systems is established by combining the dynamics of both the mechanical and electronic subsystems, and it is proved that the dynamics of the overall system with uncertainties in electrical parameters can be exactly transformed into the third order linear system. Then an output feedback finite-time stabilizing (FTS) controller is presented by composing of a full state FTS observer and a state feedback FTS controller for the third order linear systems, such that the ETM systems can be stabilized in its full travel range by merely measuring the tilt angle. Some numerical simulations demonstrate the stability of the proposed output feedback FTS controller.
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Metadaten
Titel
Robust control of the electrostatic torsional micromirrors
verfasst von
Guangping He
Zhiyong Geng
Publikationsdatum
01.06.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 6/2015
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2336-z

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