Skip to main content

2019 | OriginalPaper | Buchkapitel

5. Scanning Electron Microscopy

verfasst von : Natasha Erdman, David C. Bell, Rudolf Reichelt

Erschienen in: Springer Handbook of Microscopy

Verlag: Springer International Publishing

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

This chapter provides an overview of the concepts of scanning electron microscopy () from a theoretical as well as practical operational perspective. The theory section begins with the basics of image formation followed by an explanation of the interaction of the electron beam with the sample. A description of the different types of electron guns is also included. The concepts involved with image formation from a rastered (or scanned) electron beam on a surface is explained along with the mechanisms of contrast generation from sample surface topography and sample composition. The different SEM detectors are also explained including a description of the practical application of detectors under various sample conditions. Numerous diagrams and figures in this chapter illustrate imaging geometries and possible SEM system configurations. Included in the chapter is an explanation of the various instrument operation parameters for different samples as well as a discussion of the effects of electron-beam accelerating voltages on sample imaging, contrast, and resolution.
More advanced topics are also included such as the use of beam deceleration and in-lens imaging and detectors. Analytical SEM techniques are also explained with the explanation of the use of energy-dispersive x-ray detectors (EDS) used to measure sample composition as well as provide compositional maps of a sample. Application of SEM to a variety of materials systems under varying conditions are discussed with multiple examples and illustrations given.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
Zurück zum Zitat H. Stintzing: Verfahren und Einrichtung zum automatischen Nachweis, Messung und Zählung von Einzelteilchen beliebiger Art, Form und Grösse, German Patent 485155 (1927) H. Stintzing: Verfahren und Einrichtung zum automatischen Nachweis, Messung und Zählung von Einzelteilchen beliebiger Art, Form und Grösse, German Patent 485155 (1927)
Zurück zum Zitat M. Knoll: Aufladepotential und Sekundäremission eletronenbestrahlter Körper, Z. Tech. Phys. 116, 467 (1935) M. Knoll: Aufladepotential und Sekundäremission eletronenbestrahlter Körper, Z. Tech. Phys. 116, 467 (1935)
Zurück zum Zitat M. von Ardenne: Das Elektronen-Rastermikroskop. Praktische Ausführung, Z. Tech. Phys. 19, 407 (1938) M. von Ardenne: Das Elektronen-Rastermikroskop. Praktische Ausführung, Z. Tech. Phys. 19, 407 (1938)
Zurück zum Zitat E. Ruska: Die frühe Entwicklung der Elektronenlinsen und der Elektronenmikroskopie (Deutsche Akademie der Naturforscher Leopoldina, Halle 1979) E. Ruska: Die frühe Entwicklung der Elektronenlinsen und der Elektronenmikroskopie (Deutsche Akademie der Naturforscher Leopoldina, Halle 1979)
Zurück zum Zitat V.K. Zworykin, J. Hillier, R.L. Snyder: A scanning electron microscope, ASTM Bulletin 117, 15 (1942) V.K. Zworykin, J. Hillier, R.L. Snyder: A scanning electron microscope, ASTM Bulletin 117, 15 (1942)
Zurück zum Zitat C.W. Oatley: The Scanning Electron Microscope. Part 1: The Instrument (Cambridge Univ. Press, Cambridge 1972) C.W. Oatley: The Scanning Electron Microscope. Part 1: The Instrument (Cambridge Univ. Press, Cambridge 1972)
Zurück zum Zitat J. Ohnsorge, R. Holm: Rasterelektronenmikroskopie—Eine Einführung für Mediziner und Biologen (Thieme, Stuttgart 1973) J. Ohnsorge, R. Holm: Rasterelektronenmikroskopie—Eine Einführung für Mediziner und Biologen (Thieme, Stuttgart 1973)
Zurück zum Zitat D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Eds.): Quantitative Scanning Electron Microscopy (Academic Press, London 1974) D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Eds.): Quantitative Scanning Electron Microscopy (Academic Press, London 1974)
Zurück zum Zitat O.C. Wells: Scanning Electron Microscopy (McGraw-Hill, New York 1974) O.C. Wells: Scanning Electron Microscopy (McGraw-Hill, New York 1974)
Zurück zum Zitat M.A. Hayat (Ed.): Principles and Techniques of Scanning Electron Microscopy, Vol. 1–6 (Van Nostrand Reinhold, New York 1974) M.A. Hayat (Ed.): Principles and Techniques of Scanning Electron Microscopy, Vol. 1–6 (Van Nostrand Reinhold, New York 1974)
Zurück zum Zitat J. Goldstein, H. Yakowitz: Practical Scanning Electron Microscopy (Plenum, New York 1975) J. Goldstein, H. Yakowitz: Practical Scanning Electron Microscopy (Plenum, New York 1975)
Zurück zum Zitat L. Reimer, G. Pfefferkorn: Raster‑Elektronenmikroskopie (Springer, Berlin 1973) L. Reimer, G. Pfefferkorn: Raster‑Elektronenmikroskopie (Springer, Berlin 1973)
Zurück zum Zitat L. Reimer, G. Pfefferkorn: Raster‑Elektronenmikroskopie, 2nd edn. (Springer, Berlin 1977) L. Reimer, G. Pfefferkorn: Raster‑Elektronenmikroskopie, 2nd edn. (Springer, Berlin 1977)
Zurück zum Zitat G. Pfefferkorn (Ed.): Beiträge zur elektronenmikroskopischen Direktabbildung und Analyse von Oberflächen (BEDO), Vol. 1 (R.A. Remy, Münster 1968) G. Pfefferkorn (Ed.): Beiträge zur elektronenmikroskopischen Direktabbildung und Analyse von Oberflächen (BEDO), Vol. 1 (R.A. Remy, Münster 1968)
Zurück zum Zitat O. Johari (Ed.): Proceedings of the Annual Scanning Electron Microscopy Symposium (IIT Research Institute, Chicago 1987) O. Johari (Ed.): Proceedings of the Annual Scanning Electron Microscopy Symposium (IIT Research Institute, Chicago 1987)
Zurück zum Zitat L. Reimer: Scanning electron microscopy---Present state and trends, Scanning 1, 3 (1978) L. Reimer: Scanning electron microscopy---Present state and trends, Scanning 1, 3 (1978)
Zurück zum Zitat V.H. Heywood: Scanning Electron Microscopy. Systematic and Evolutionary Applications (Academic Press, London 1971) V.H. Heywood: Scanning Electron Microscopy. Systematic and Evolutionary Applications (Academic Press, London 1971)
Zurück zum Zitat T. Fujita, M.D.J. Tokunaga, H. Inoue: Atlas of Scanning Electron Microscopy in Medicine (Elsevier, Amsterdam 1971) T. Fujita, M.D.J. Tokunaga, H. Inoue: Atlas of Scanning Electron Microscopy in Medicine (Elsevier, Amsterdam 1971)
Zurück zum Zitat P.R. Thornton: Scanning Electron Microscopy. Application to Materials and Device Science (Chapman Hall, London 1972) P.R. Thornton: Scanning Electron Microscopy. Application to Materials and Device Science (Chapman Hall, London 1972)
Zurück zum Zitat P.R. Troughton, L.A. Donaldson: Probing Plant Structure (Chapman Hall, London 1972) P.R. Troughton, L.A. Donaldson: Probing Plant Structure (Chapman Hall, London 1972)
Zurück zum Zitat B.M. Siegel, D.R. Beaman: Physical Aspects of Electron Microscopy and Microbeam Analysis (Wiley, New York 1975) B.M. Siegel, D.R. Beaman: Physical Aspects of Electron Microscopy and Microbeam Analysis (Wiley, New York 1975)
Zurück zum Zitat J.A. Chandler: X-Ray Microanalysis in the Electron Microscope (North-Holland, Amsterdam 1978) J.A. Chandler: X-Ray Microanalysis in the Electron Microscope (North-Holland, Amsterdam 1978)
Zurück zum Zitat J.-P. Revel, G.H. Haggis, T. Barnard (Eds.): The Science of Biological Specimen Preparation for Microscopy and Microanalysis (Scanning Electron Microscopy, Chicago 1983) J.-P. Revel, G.H. Haggis, T. Barnard (Eds.): The Science of Biological Specimen Preparation for Microscopy and Microanalysis (Scanning Electron Microscopy, Chicago 1983)
Zurück zum Zitat D.E. Newbury, D.C. Joy, P. Echlin, C.E. Fiori, J.I. Goldstein: Advanced Scanning Electron Microscopy and X-Ray Microanalysis (Plenum, New York 1987) D.E. Newbury, D.C. Joy, P. Echlin, C.E. Fiori, J.I. Goldstein: Advanced Scanning Electron Microscopy and X-Ray Microanalysis (Plenum, New York 1987)
Zurück zum Zitat K. Wetzig, D. Schulze (Eds.): In Situ Scanning Electron Microscopy in Materials Research (Akademie, Berlin 1995) K. Wetzig, D. Schulze (Eds.): In Situ Scanning Electron Microscopy in Materials Research (Akademie, Berlin 1995)
Zurück zum Zitat S.J.B. Reed: Electron Microprobe Analysis and Scanning Electron Microscopy in Geology (Cambridge Univ. Press, Cambridge 1996) S.J.B. Reed: Electron Microprobe Analysis and Scanning Electron Microscopy in Geology (Cambridge Univ. Press, Cambridge 1996)
Zurück zum Zitat J.J. Goldstein, D.E. Newbury, P. Echlin, D.C. Joy, C. Fiori, E. Lifshin: Scanning Electron Microscopy and X-Ray Microanalysis (Plenum, New York 1984) J.J. Goldstein, D.E. Newbury, P. Echlin, D.C. Joy, C. Fiori, E. Lifshin: Scanning Electron Microscopy and X-Ray Microanalysis (Plenum, New York 1984)
Zurück zum Zitat J.J. Goldstein, D.E. Newbury, D.C. Joy, C.E. Lyman, P. Echlin, E. Lifshin, L.C. Sawyer, J.R. Michael: Scanning Electron Microscopy and X-Ray Microanalysis, 3rd edn. (Kluwer Academic/Plenum, New York 2003) J.J. Goldstein, D.E. Newbury, D.C. Joy, C.E. Lyman, P. Echlin, E. Lifshin, L.C. Sawyer, J.R. Michael: Scanning Electron Microscopy and X-Ray Microanalysis, 3rd edn. (Kluwer Academic/Plenum, New York 2003)
Zurück zum Zitat C.E. Lyman, D.E. Newbury, J.I. Goldstein, D.B. Williams, A.D. Romig, J.T. Armstrong, P. Echlin, C.E. Fiori, D.C. Joy, E. Lifshin, K.-R. Peters: Scanning Electron Microscopy, X-Ray Microanalysis and Analytical Electron Microscopy (Plenum, New York 1990) C.E. Lyman, D.E. Newbury, J.I. Goldstein, D.B. Williams, A.D. Romig, J.T. Armstrong, P. Echlin, C.E. Fiori, D.C. Joy, E. Lifshin, K.-R. Peters: Scanning Electron Microscopy, X-Ray Microanalysis and Analytical Electron Microscopy (Plenum, New York 1990)
Zurück zum Zitat L. Reimer: Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE, Bellingham/Washington 1993) L. Reimer: Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE, Bellingham/Washington 1993)
Zurück zum Zitat D.C. Joy: Monte Carlo Modeling for Electron Microscopy and Microanalysis (Oxford Univ. Press, New York 1995) D.C. Joy: Monte Carlo Modeling for Electron Microscopy and Microanalysis (Oxford Univ. Press, New York 1995)
Zurück zum Zitat L.C. Sawyer, D.T. Grubb: Polymer Microscopy (Chapman Hall, London 1996) L.C. Sawyer, D.T. Grubb: Polymer Microscopy (Chapman Hall, London 1996)
Zurück zum Zitat I. Müllerová, L. Frank: Scanning low-energy electron microscopy, Adv. Imaging Electron Phys. 128, 310–443 (2003) I. Müllerová, L. Frank: Scanning low-energy electron microscopy, Adv. Imaging Electron Phys. 128, 310–443 (2003)
Zurück zum Zitat D.C. Bell, N. Erdman: Low Voltage Electron Microscopy: Principles and Applications (Wiley, New York 2013) D.C. Bell, N. Erdman: Low Voltage Electron Microscopy: Principles and Applications (Wiley, New York 2013)
Zurück zum Zitat G.D. Danilatos: Foundations of environmental scanning electron microscopy, Adv. Electron. Electron Phys. 71, 109–250 (1988) G.D. Danilatos: Foundations of environmental scanning electron microscopy, Adv. Electron. Electron Phys. 71, 109–250 (1988)
Zurück zum Zitat G.D. Danilatos: Theory of the gaseous detector device in the ESEM, Adv. Electron. Electron Phys. 78, 1–102 (1990) G.D. Danilatos: Theory of the gaseous detector device in the ESEM, Adv. Electron. Electron Phys. 78, 1–102 (1990)
Zurück zum Zitat D. Stokes: Principles and Practice of Variable Pressure: Environmental Scanning Electron Microscopy (VP-ESEM) (Wiley, New York 2008) D. Stokes: Principles and Practice of Variable Pressure: Environmental Scanning Electron Microscopy (VP-ESEM) (Wiley, New York 2008)
Zurück zum Zitat L. Reimer: Scanning Electron Microscopy (Springer, Berlin 1985) L. Reimer: Scanning Electron Microscopy (Springer, Berlin 1985)
Zurück zum Zitat W. DeVore, S.D. Berger: High emittance electron gun for projection lithography, J. Vac. Sci. Technol. B 14, 3764 (1996) W. DeVore, S.D. Berger: High emittance electron gun for projection lithography, J. Vac. Sci. Technol. B 14, 3764 (1996)
Zurück zum Zitat W. Glaser: Grundlagen der Elektronenoptik (Springer, Wien 1952) W. Glaser: Grundlagen der Elektronenoptik (Springer, Wien 1952)
Zurück zum Zitat P. Grivet: Electron Optics (Pergamon, Oxford 1972) P. Grivet: Electron Optics (Pergamon, Oxford 1972)
Zurück zum Zitat O. Klemperer: Electron Optics (Cambridge Univ. Press, Cambridge 1971) O. Klemperer: Electron Optics (Cambridge Univ. Press, Cambridge 1971)
Zurück zum Zitat L. Reimer: Scanning Electron Microscopy, 2nd edn. (Springer, Berlin 1998) L. Reimer: Scanning Electron Microscopy, 2nd edn. (Springer, Berlin 1998)
Zurück zum Zitat V.E. Cosslett: Probe size and probe current in the STEM, Optik 36, 85 (1972) V.E. Cosslett: Probe size and probe current in the STEM, Optik 36, 85 (1972)
Zurück zum Zitat J.E. Barth, P. Kruit: Absorption of additional photons in the multiphoton ionisation continuum of xenon at 1064, 532 and 440 nm, Optik 101, 101 (1996) J.E. Barth, P. Kruit: Absorption of additional photons in the multiphoton ionisation continuum of xenon at 1064, 532 and 440 nm, Optik 101, 101 (1996)
Zurück zum Zitat R. Kolarik, M. Lenc: An expression for the resolving power of a simple optical system, Optik 106, 135 (1997) R. Kolarik, M. Lenc: An expression for the resolving power of a simple optical system, Optik 106, 135 (1997)
Zurück zum Zitat T.E. Everhart, R.F.M. Thornley: Wide-band detector for micro-microampere low-energy electron currents, J. Sci. Instrum. 37, 246 (1960) T.E. Everhart, R.F.M. Thornley: Wide-band detector for micro-microampere low-energy electron currents, J. Sci. Instrum. 37, 246 (1960)
Zurück zum Zitat A.V. Crewe, M. Isaacson, P. Johnson: Secondary electron detection in a field emission scanning microscope, Rev. Sci. Instrum. 41, 20 (1970) A.V. Crewe, M. Isaacson, P. Johnson: Secondary electron detection in a field emission scanning microscope, Rev. Sci. Instrum. 41, 20 (1970)
Zurück zum Zitat M.T. Postek, W.J. Keery: Low profile high-efficiency microchannel-plate detector system for scanning electron microscopy applications, Rev. Sci. Instrum. 61, 1648 (1990) M.T. Postek, W.J. Keery: Low profile high-efficiency microchannel-plate detector system for scanning electron microscopy applications, Rev. Sci. Instrum. 61, 1648 (1990)
Zurück zum Zitat R. Autrata, R. Hermann, M. Müller: An efficient BSE single crystal detector for SEM, Scanning 14, 127 (1992) R. Autrata, R. Hermann, M. Müller: An efficient BSE single crystal detector for SEM, Scanning 14, 127 (1992)
Zurück zum Zitat R. Autrata, J. Jirák, J. Spinka, O. Hutar: Integrated single crystal detector for simultaneous detection of cathodoluminescence and backscattered electrons in scanning electron microscopy, Scanning Microsc. 6, 69 (1992) R. Autrata, J. Jirák, J. Spinka, O. Hutar: Integrated single crystal detector for simultaneous detection of cathodoluminescence and backscattered electrons in scanning electron microscopy, Scanning Microsc. 6, 69 (1992)
Zurück zum Zitat V.N.E. Robinson: BSE imaging at low accelerating voltages, Hitachi Instrum. News 19, 32 (1990) V.N.E. Robinson: BSE imaging at low accelerating voltages, Hitachi Instrum. News 19, 32 (1990)
Zurück zum Zitat J. Stephen, B.J. Smith, D.C. Marshall, E.M. Wittam: Applications of a semiconductor backscattered electron detector in a scanning electron microscope, J. Phys. E 8, 607 (1975) J. Stephen, B.J. Smith, D.C. Marshall, E.M. Wittam: Applications of a semiconductor backscattered electron detector in a scanning electron microscope, J. Phys. E 8, 607 (1975)
Zurück zum Zitat E.F. Bond, D. Beresford, H.H. Haggis: Improved cathodoluminescence ‘microscopy', J. Microsc. 100, 271 (1974) E.F. Bond, D. Beresford, H.H. Haggis: Improved cathodoluminescence ‘microscopy', J. Microsc. 100, 271 (1974)
Zurück zum Zitat A. Rasul, S.M. Davidson: Applications of a high performance SEM-based CL analysis system to compound semiconductor devices, Scanning Electron Microsc. I, 233 (1977) A. Rasul, S.M. Davidson: Applications of a high performance SEM-based CL analysis system to compound semiconductor devices, Scanning Electron Microsc. I, 233 (1977)
Zurück zum Zitat R. Autrata: A modification of the ET secondary electron detector with a single crystal scintillator, Scanning 12, 119 (1990) R. Autrata: A modification of the ET secondary electron detector with a single crystal scintillator, Scanning 12, 119 (1990)
Zurück zum Zitat R. Autrata, J. Hejna: Detectors for low voltage scanning electron microscopy, Scanning 13, 275 (1991) R. Autrata, J. Hejna: Detectors for low voltage scanning electron microscopy, Scanning 13, 275 (1991)
Zurück zum Zitat R. Autrata, P. Schauer: Cathodoluminecsence of Polysilanes. In: 13th Eur. Congr. Microsc, ed. by D. Schryvers, J.-P. Timmermans, D. van Dyck, P. van Oostveldt (Belgian Society for Microscopy, Liége 2004) pp. 75–76 R. Autrata, P. Schauer: Cathodoluminecsence of Polysilanes. In: 13th Eur. Congr. Microsc, ed. by D. Schryvers, J.-P. Timmermans, D. van Dyck, P. van Oostveldt (Belgian Society for Microscopy, Liége 2004) pp. 75–76
Zurück zum Zitat C.H. Wu, D.B. Wittry: Investigation of minority-carrier diffusion lengths by electron bombardment of Schottky barriers, J. Appl. Phys. 49, 2827 (1974) C.H. Wu, D.B. Wittry: Investigation of minority-carrier diffusion lengths by electron bombardment of Schottky barriers, J. Appl. Phys. 49, 2827 (1974)
Zurück zum Zitat P.E. Russel, J.F. Mancuso: Microchannel plate detector for low voltage scanning electron microscopes, J. Microsc. 140, 323 (1985) P.E. Russel, J.F. Mancuso: Microchannel plate detector for low voltage scanning electron microscopes, J. Microsc. 140, 323 (1985)
Zurück zum Zitat F.J. Judge, J.M. Stubbs, J. Philp: A concave mirror, light pipe photon collecting system for cathodoluminescence studies on biological specimens in the JSM 2 scanning electron microscope, J. Phys. E 7, 173 (1974) F.J. Judge, J.M. Stubbs, J. Philp: A concave mirror, light pipe photon collecting system for cathodoluminescence studies on biological specimens in the JSM 2 scanning electron microscope, J. Phys. E 7, 173 (1974)
Zurück zum Zitat A. Boyde, S.A. Reid: New methods for cathodoluminescence in the SEM, Scanning Electron Microsc. 4, 1803 (1983) A. Boyde, S.A. Reid: New methods for cathodoluminescence in the SEM, Scanning Electron Microsc. 4, 1803 (1983)
Zurück zum Zitat W.R. McKinney, P.V.C. Hough: A new detector system for cathodoluminescence ‘microscopy', Scanning Electron Microsc. 1, 251 (1977) W.R. McKinney, P.V.C. Hough: A new detector system for cathodoluminescence ‘microscopy', Scanning Electron Microsc. 1, 251 (1977)
Zurück zum Zitat E.M. Hörl: SEM of biological material using cathodoluminescence, Micron 3, 540 (1972) E.M. Hörl: SEM of biological material using cathodoluminescence, Micron 3, 540 (1972)
Zurück zum Zitat E.M. Hörl: Rasterelektronenmikroskopie unter Verwendung eines Farbmonitors, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 8, 233 (1975) E.M. Hörl: Rasterelektronenmikroskopie unter Verwendung eines Farbmonitors, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 8, 233 (1975)
Zurück zum Zitat E.I. Rau, R.A. Sennov, D.S.H. Chan, J.C.H. Phang: The main principles of improved spatial resolution cathodoluminescence microscopy and microtomography using elliptical mirror optics. In: Proc. 13th Eur. Congr. Microsc., ed. by J.-P. Timmermans, D. Schryvers, D. van Dyck, P. van Oostveldt (Belgian Society for Microscopy, Liège 2004) pp. 411–412 E.I. Rau, R.A. Sennov, D.S.H. Chan, J.C.H. Phang: The main principles of improved spatial resolution cathodoluminescence microscopy and microtomography using elliptical mirror optics. In: Proc. 13th Eur. Congr. Microsc., ed. by J.-P. Timmermans, D. Schryvers, D. van Dyck, P. van Oostveldt (Belgian Society for Microscopy, Liège 2004) pp. 411–412
Zurück zum Zitat A. Ishikawa, F. Mizuno, Y. Uchikawa, S. Maruse: High resolution and spectroscopic cathodoluminescent images in SEM, Jpn. J. Appl. Phys. 12, 286 (1973) A. Ishikawa, F. Mizuno, Y. Uchikawa, S. Maruse: High resolution and spectroscopic cathodoluminescent images in SEM, Jpn. J. Appl. Phys. 12, 286 (1973)
Zurück zum Zitat L. Reimer: Electron signal and detector strategy. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 299–310 L. Reimer: Electron signal and detector strategy. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 299–310
Zurück zum Zitat S. Kimoto, H. Hashimoto, T. Suganama: Stereoscopic observation in SEM using multiple detectors. In: The Electron Microprobe, ed. by T.D. McKinley, K.F.J. Heinrich, D.B. Wittrey (Wiley, New York 1966) pp. 480–489 S. Kimoto, H. Hashimoto, T. Suganama: Stereoscopic observation in SEM using multiple detectors. In: The Electron Microprobe, ed. by T.D. McKinley, K.F.J. Heinrich, D.B. Wittrey (Wiley, New York 1966) pp. 480–489
Zurück zum Zitat J. Hejna, L. Reimer: Backscattered electron multidetector systems for improved quantitative topographic contrast, Scanning 9, 162 (1987) J. Hejna, L. Reimer: Backscattered electron multidetector systems for improved quantitative topographic contrast, Scanning 9, 162 (1987)
Zurück zum Zitat J. Lebiedzik: An automatic topographical surface reconstruction in the SEM, Scanning 2, 230 (1979) J. Lebiedzik: An automatic topographical surface reconstruction in the SEM, Scanning 2, 230 (1979)
Zurück zum Zitat D. Kaczmarek: The method of increasing COMPO contrast by linearization of backscattering characteristic \(\eta=f(Z)\), Scanning 19, 310 (1997) D. Kaczmarek: The method of increasing COMPO contrast by linearization of backscattering characteristic \(\eta=f(Z)\), Scanning 19, 310 (1997)
Zurück zum Zitat D. Kaczmarek, J. Domaradzki: The method for the reconstruction of complex images of specimens using backscattered electrons, Scanning 24, 65 (2002) D. Kaczmarek, J. Domaradzki: The method for the reconstruction of complex images of specimens using backscattered electrons, Scanning 24, 65 (2002)
Zurück zum Zitat I. Müllerová, M. Lenc, M. Florián: Collection of backscattered electrons with a single polepiece lens and a multiple detector, Scanning Microsc. 3, 419 (1989) I. Müllerová, M. Lenc, M. Florián: Collection of backscattered electrons with a single polepiece lens and a multiple detector, Scanning Microsc. 3, 419 (1989)
Zurück zum Zitat P. Kruit: Magnetic through-the-lens detection in electron microscopy and spectroscopy, Part 1. In: Advances in Optical and Electron Microscopy, Vol. 12, ed. by T. Mulvey, C.J.R. Sheppard (Academic Press, London 1991) pp. 93–137 P. Kruit: Magnetic through-the-lens detection in electron microscopy and spectroscopy, Part 1. In: Advances in Optical and Electron Microscopy, Vol. 12, ed. by T. Mulvey, C.J.R. Sheppard (Academic Press, London 1991) pp. 93–137
Zurück zum Zitat A.E. Lukianov, G.V. Spivak, E.I. Rau, D.D. Gorodsky: The secondary electron SEM-collector with magnetic field. In: Proc. 5th Eur. Congr. Electron Microsc., ed. by V.E. Cosslett (The Institute of Physics, London 1972) pp. 186–187 A.E. Lukianov, G.V. Spivak, E.I. Rau, D.D. Gorodsky: The secondary electron SEM-collector with magnetic field. In: Proc. 5th Eur. Congr. Electron Microsc., ed. by V.E. Cosslett (The Institute of Physics, London 1972) pp. 186–187
Zurück zum Zitat H. Koike, K. Ueno, M. Suzuki: Scanning device combined with conventional electron microscope. In: Proc. EMSA (Claytor's Publishing Division, Baton Rouge 1971) p. 28 H. Koike, K. Ueno, M. Suzuki: Scanning device combined with conventional electron microscope. In: Proc. EMSA (Claytor's Publishing Division, Baton Rouge 1971) p. 28
Zurück zum Zitat J. Zach: Design of a high-resolution low-voltage scanning electron microscope, Optik 83, 30 (1989) J. Zach: Design of a high-resolution low-voltage scanning electron microscope, Optik 83, 30 (1989)
Zurück zum Zitat J. Zach, H. Rose: High-resolution low-voltage electron microprobe with large SE detection efficiency. In: Inst. of Phys. Conf. Ser. No. 93 (IOP, Bristol 1988) pp. 81–82 J. Zach, H. Rose: High-resolution low-voltage electron microprobe with large SE detection efficiency. In: Inst. of Phys. Conf. Ser. No. 93 (IOP, Bristol 1988) pp. 81–82
Zurück zum Zitat J. Zach, H. Rose: Efficient detection of secondary electrons in low-voltage SEM, Scanning 8, 285 (1988) J. Zach, H. Rose: Efficient detection of secondary electrons in low-voltage SEM, Scanning 8, 285 (1988)
Zurück zum Zitat J. Frosien, E. Plies, K. Anger: Compound magnetic and electrostatic lenses for low-voltage applications, J. Vac. Sci. Technol. B 7, 1874 (1989) J. Frosien, E. Plies, K. Anger: Compound magnetic and electrostatic lenses for low-voltage applications, J. Vac. Sci. Technol. B 7, 1874 (1989)
Zurück zum Zitat S. Menzel, K. Wetzig: In situ production and defect characterization of laser PVD layers from YBaCuO HTSC targets inside a scanning electron microscope, J. Mater. Sci. 3, 5 (1992) S. Menzel, K. Wetzig: In situ production and defect characterization of laser PVD layers from YBaCuO HTSC targets inside a scanning electron microscope, J. Mater. Sci. 3, 5 (1992)
Zurück zum Zitat A.J. Craven, J.M. Gibons, A. Howie, D.R. Spalding: Study of single-electron excitations by electron microscopy I. Image contrast from delocalized excitations, Philos. Mag. A 38, 519 (1978) A.J. Craven, J.M. Gibons, A. Howie, D.R. Spalding: Study of single-electron excitations by electron microscopy I. Image contrast from delocalized excitations, Philos. Mag. A 38, 519 (1978)
Zurück zum Zitat M.S. Isaacson: Specimen damage in the electron microscopy. In: Principles and Techniques of Electron Microscopy, Vol. 7, ed. by M.A. Hayat (Van-Nostrand Reinhold, New York 1977) pp. 1–78 M.S. Isaacson: Specimen damage in the electron microscopy. In: Principles and Techniques of Electron Microscopy, Vol. 7, ed. by M.A. Hayat (Van-Nostrand Reinhold, New York 1977) pp. 1–78
Zurück zum Zitat M. Isaacson: Electron beam induced damage of organic solids: Implications for analytical electron microscopy, Ultramicroscopy 4, 193 (1979) M. Isaacson: Electron beam induced damage of organic solids: Implications for analytical electron microscopy, Ultramicroscopy 4, 193 (1979)
Zurück zum Zitat L. Reimer, A. Schmidt: The shrinkage of bulk polymers by radiation damage in an SEM, Scanning 7, 47 (1985) L. Reimer, A. Schmidt: The shrinkage of bulk polymers by radiation damage in an SEM, Scanning 7, 47 (1985)
Zurück zum Zitat R.F. Egerton, P. Li, M. Malac: Radiation damage in the TEM and SEM, Micron 35, 399 (2004) R.F. Egerton, P. Li, M. Malac: Radiation damage in the TEM and SEM, Micron 35, 399 (2004)
Zurück zum Zitat J. Bastacky, C. Wodley, R. Labrie, C. Backhus: Addendum to: A bibliography of low-temperature scanning electron microscopy (LTSEM, Cryo SEM) and scanning electron microscopy of frozen hydrated biological systems, Scanning 10, 37 (1988) J. Bastacky, C. Wodley, R. Labrie, C. Backhus: Addendum to: A bibliography of low-temperature scanning electron microscopy (LTSEM, Cryo SEM) and scanning electron microscopy of frozen hydrated biological systems, Scanning 10, 37 (1988)
Zurück zum Zitat C.E. Jeffree, N.D. Read: Ambient- and low-temperature scanning electron microscopy. In: Electron Microscopy of Plant Cells, ed. by J.L. Hall, C. Hawes (Academic Press, London 1991) pp. 313–413 C.E. Jeffree, N.D. Read: Ambient- and low-temperature scanning electron microscopy. In: Electron Microscopy of Plant Cells, ed. by J.L. Hall, C. Hawes (Academic Press, London 1991) pp. 313–413
Zurück zum Zitat P. Walther, J. Hentschel, P. Herter, T. Müller, K. Zierold: Imaging of intramembranous particles in frozen-hyrated cells (Saccharomyces cerevisiae) by high-resolution cryo SEM, Scanning 12, 300 (1990) P. Walther, J. Hentschel, P. Herter, T. Müller, K. Zierold: Imaging of intramembranous particles in frozen-hyrated cells (Saccharomyces cerevisiae) by high-resolution cryo SEM, Scanning 12, 300 (1990)
Zurück zum Zitat R.P. Huebener: Scanning electron microscopy at very low temperatures, Adv. Electron. Electron Phys. 70, 1–78 (1988) R.P. Huebener: Scanning electron microscopy at very low temperatures, Adv. Electron. Electron Phys. 70, 1–78 (1988)
Zurück zum Zitat L. Lawson: Fatigue stage for quantitative acoustic emission measurements, Scanning 17, 322 (1995) L. Lawson: Fatigue stage for quantitative acoustic emission measurements, Scanning 17, 322 (1995)
Zurück zum Zitat E. Oho, M. Miyamoto: Mechanical scanning of the specimen in the scanning electron microscope, Scanning 26, 250 (2004) E. Oho, M. Miyamoto: Mechanical scanning of the specimen in the scanning electron microscope, Scanning 26, 250 (2004)
Zurück zum Zitat C. Gerber, G. Binnig, H. Fuchs, O. Marti, H. Rohrer: Scanning tunneling microscope combined with a scanning electron microscope, Rev. Sci. Instrum. 57, 221 (1986) C. Gerber, G. Binnig, H. Fuchs, O. Marti, H. Rohrer: Scanning tunneling microscope combined with a scanning electron microscope, Rev. Sci. Instrum. 57, 221 (1986)
Zurück zum Zitat A. Stemmer, R. Reichelt, R. Wyss, A. Engel: Biological structures imaged in a hybrid scanning transmission electron microscope and scanning tunneling microscope, Ultramicroscopy 35, 255 (1991) A. Stemmer, R. Reichelt, R. Wyss, A. Engel: Biological structures imaged in a hybrid scanning transmission electron microscope and scanning tunneling microscope, Ultramicroscopy 35, 255 (1991)
Zurück zum Zitat M. Troyon, H.N. Lei, A. Bourhettar: Integration of an STM in an SEM, Ultramicroscopy 1564, 42–44 (1992) M. Troyon, H.N. Lei, A. Bourhettar: Integration of an STM in an SEM, Ultramicroscopy 1564, 42–44 (1992)
Zurück zum Zitat I. Joachimsthaler, R. Heiderhoff, L.J. Balk: A universal scanning-probe-microscope-based hybrid system, Meas. Sci. Technol. 14, 87 (2003) I. Joachimsthaler, R. Heiderhoff, L.J. Balk: A universal scanning-probe-microscope-based hybrid system, Meas. Sci. Technol. 14, 87 (2003)
Zurück zum Zitat R. Heiderhoff, O.V. Sergeev, Y.Y. Liu, J.C.H. Phang, L.J. Balk: Comparison between standard and near-field cathodoluminescence, J. Cryst. Growth 210, 303 (2000) R. Heiderhoff, O.V. Sergeev, Y.Y. Liu, J.C.H. Phang, L.J. Balk: Comparison between standard and near-field cathodoluminescence, J. Cryst. Growth 210, 303 (2000)
Zurück zum Zitat M.T. Postek, A.E. Vladár: Digital imaging for scanning electron microscopy, Scanning 18, 1 (1996) M.T. Postek, A.E. Vladár: Digital imaging for scanning electron microscopy, Scanning 18, 1 (1996)
Zurück zum Zitat N.C. Yew: Dynamic focusing technique for tilted samples in SEM. In: Proc. 4th Annu. Scanning Electron Microsc. Symp. (IIT Research Institute, Chicago 1971) pp. 33–40 N.C. Yew: Dynamic focusing technique for tilted samples in SEM. In: Proc. 4th Annu. Scanning Electron Microsc. Symp. (IIT Research Institute, Chicago 1971) pp. 33–40
Zurück zum Zitat A.W. Judge: Stereographic Photography (Chapman Hall, London 1950) A.W. Judge: Stereographic Photography (Chapman Hall, London 1950)
Zurück zum Zitat W. Malkusch, M.A. Konerding, B. Klapthor, J. Bruch: A simple and accurate method for 3-D measurements in microcorrosion casts illustrated with tumour vascularization, Anal. Cell Pathol. 9, 69 (1995) W. Malkusch, M.A. Konerding, B. Klapthor, J. Bruch: A simple and accurate method for 3-D measurements in microcorrosion casts illustrated with tumour vascularization, Anal. Cell Pathol. 9, 69 (1995)
Zurück zum Zitat B. Minnich, H. Leeb, E.W.N. Bernroider, A. Lametschwandtner: A 3-dimensional morphometry in scanning electron ‘microscopy': A technique for accurate dimensional and angular measurements of microstructures using stereopaired digitized images and digital image analysis, J. Microsc. 195, 23 (1999) B. Minnich, H. Leeb, E.W.N. Bernroider, A. Lametschwandtner: A 3-dimensional morphometry in scanning electron ‘microscopy': A technique for accurate dimensional and angular measurements of microstructures using stereopaired digitized images and digital image analysis, J. Microsc. 195, 23 (1999)
Zurück zum Zitat B. Minnich, W.-D. Krautgartner, A. Lametschwandtner: Quantitative 3-D analysis in SEM: A review, Microsc. Microanal. 9(S3), 118 (2003) B. Minnich, W.-D. Krautgartner, A. Lametschwandtner: Quantitative 3-D analysis in SEM: A review, Microsc. Microanal. 9(S3), 118 (2003)
Zurück zum Zitat L. Reimer, E.-R. Krefting: The effect of scattering models on the results of Monte Carlo calculations. In: Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy, NBS Special Publication, Vol. 460, ed. by K.F.J. Heinrich, D.E. Newbury, H. Yakowitz (U.S. Dept. of Commerce, Washington 1976) pp. 45–60 L. Reimer, E.-R. Krefting: The effect of scattering models on the results of Monte Carlo calculations. In: Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy, NBS Special Publication, Vol. 460, ed. by K.F.J. Heinrich, D.E. Newbury, H. Yakowitz (U.S. Dept. of Commerce, Washington 1976) pp. 45–60
Zurück zum Zitat P. Rez: Elastic scattering of electrons by atoms. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scattering Electron Microscopy, Chicago 1984) pp. 43–49 P. Rez: Elastic scattering of electrons by atoms. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scattering Electron Microscopy, Chicago 1984) pp. 43–49
Zurück zum Zitat L. Reimer, B. Lödding: Theory of secondary electron emission II, Scanning 6, 128 (1984) L. Reimer, B. Lödding: Theory of secondary electron emission II, Scanning 6, 128 (1984)
Zurück zum Zitat Z. Czyżewski, D. O’Neill MacCallum, A. Romig, D.C. Joy: Calculations of Mott scattering cross-sections, J. Appl. Phys. 68, 3066 (1990) Z. Czyżewski, D. O’Neill MacCallum, A. Romig, D.C. Joy: Calculations of Mott scattering cross-sections, J. Appl. Phys. 68, 3066 (1990)
Zurück zum Zitat A. Jablonski, F. Salvat, C.J. Powell: NIST Electron Elastic-Scattering Cross Section Datbase #64 Version 3.1 (NIST, Gaithersburg 2003) A. Jablonski, F. Salvat, C.J. Powell: NIST Electron Elastic-Scattering Cross Section Datbase #64 Version 3.1 (NIST, Gaithersburg 2003)
Zurück zum Zitat H. Raether: Excitation of Plasmons and Interband Transitions by Electrons, Springer Tracts in Modern Physics, Vol. 88 (Springer, Berlin 1980) H. Raether: Excitation of Plasmons and Interband Transitions by Electrons, Springer Tracts in Modern Physics, Vol. 88 (Springer, Berlin 1980)
Zurück zum Zitat C.J. Powell: Inelastic scattering of electrons in solids. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 19–31 C.J. Powell: Inelastic scattering of electrons in solids. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 19–31
Zurück zum Zitat M. Isaacson, J.P. Langmore: Determination of the non-localization of the inelastic scattering of electrons by electron microscopy, Optik 41, 92 (1974) M. Isaacson, J.P. Langmore: Determination of the non-localization of the inelastic scattering of electrons by electron microscopy, Optik 41, 92 (1974)
Zurück zum Zitat E. Zeitler: Utilization of inelastic scatter in the STEM mode, Ann. N.Y. Acad. Sci. 306, 62 (1978) E. Zeitler: Utilization of inelastic scatter in the STEM mode, Ann. N.Y. Acad. Sci. 306, 62 (1978)
Zurück zum Zitat R. Reichelt, A. Engel: Contrast and resolution of scanning transmission electron microscope imaging modes, Ultramicroscopy 19, 43 (1986) R. Reichelt, A. Engel: Contrast and resolution of scanning transmission electron microscope imaging modes, Ultramicroscopy 19, 43 (1986)
Zurück zum Zitat D.A. Müller, J. Silcox: Delocalization in inelastic electron scattering. In: 13th Int. Congr. Electron Microsc., Vol. 1, ed. by B. Jouffrey, C. Colliex (Les Editions de Physique, Les Ulis 1994) pp. 741–742 D.A. Müller, J. Silcox: Delocalization in inelastic electron scattering. In: 13th Int. Congr. Electron Microsc., Vol. 1, ed. by B. Jouffrey, C. Colliex (Les Editions de Physique, Les Ulis 1994) pp. 741–742
Zurück zum Zitat D.A. Müller, J. Silcox: Delocalization in inelastic scattering, Ultramicroscopy 59, 195 (1995) D.A. Müller, J. Silcox: Delocalization in inelastic scattering, Ultramicroscopy 59, 195 (1995)
Zurück zum Zitat R.D. Leapman, P. Rez, D.F. Mayers: K, L, and M shell generalized oscillator strengths and ionization cross sections for fast electron collisions, J. Chem. Phys. 72, 1232 (1980) R.D. Leapman, P. Rez, D.F. Mayers: K, L, and M shell generalized oscillator strengths and ionization cross sections for fast electron collisions, J. Chem. Phys. 72, 1232 (1980)
Zurück zum Zitat M. Inokuti, S.T. Manson: Cross sections for inelastic scattering of electrons by atoms—Selected topics related to electron microscopy. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 1–17 M. Inokuti, S.T. Manson: Cross sections for inelastic scattering of electrons by atoms—Selected topics related to electron microscopy. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 1–17
Zurück zum Zitat R.F. Egerton: Electron-Energy-Loss Spectroscopy in the Electron Microscope (Plenum, New York 1986) R.F. Egerton: Electron-Energy-Loss Spectroscopy in the Electron Microscope (Plenum, New York 1986)
Zurück zum Zitat C.J. Powell, A. Jablonski: Electron Inelastic-Mean-Free-Path Database Version 1.1, NIST Standard Reference Database 71 (National Institute of Standards and Technology, Gaithersburg 2000) C.J. Powell, A. Jablonski: Electron Inelastic-Mean-Free-Path Database Version 1.1, NIST Standard Reference Database 71 (National Institute of Standards and Technology, Gaithersburg 2000)
Zurück zum Zitat S.A. Goudsmit, J.L. Saunderson: Multiple scattering of electrons II, Phys. Rev. 58, 36 (1940) S.A. Goudsmit, J.L. Saunderson: Multiple scattering of electrons II, Phys. Rev. 58, 36 (1940)
Zurück zum Zitat D.F. Kyser: Monte Carlo calculations for electron microscopy, microanalysis, and microlithography. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 119–135 D.F. Kyser: Monte Carlo calculations for electron microscopy, microanalysis, and microlithography. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 119–135
Zurück zum Zitat L. Reimer, D. Stelter: FORTRAN 77 Monte-Carlo program for minicomputers using Mott cross-sections, Scanning 8, 265 (1986) L. Reimer, D. Stelter: FORTRAN 77 Monte-Carlo program for minicomputers using Mott cross-sections, Scanning 8, 265 (1986)
Zurück zum Zitat D.C. Joy: A model for calculating secondary and backscattered electron yields, J. Microsc. 147, 51 (1987) D.C. Joy: A model for calculating secondary and backscattered electron yields, J. Microsc. 147, 51 (1987)
Zurück zum Zitat L. Reimer: Monte-Carlo-Rechnungen zur Elektronendiffusion, Optik 27, 86 (1968) L. Reimer: Monte-Carlo-Rechnungen zur Elektronendiffusion, Optik 27, 86 (1968)
Zurück zum Zitat L. Reimer: MOCASIM – Ein Monte Carlo Programm für Forschung und Lehre, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 29, 1–10 (1996) L. Reimer: MOCASIM – Ein Monte Carlo Programm für Forschung und Lehre, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 29, 1–10 (1996)
Zurück zum Zitat D. Drouin, P. Hovington, R. Gauvin: CASINO: A new Monte Carlo code in C language for the electron beam interactions---Part II: Tabulated values of the Mott cross section, Scanning 19, 20 (1997) D. Drouin, P. Hovington, R. Gauvin: CASINO: A new Monte Carlo code in C language for the electron beam interactions---Part II: Tabulated values of the Mott cross section, Scanning 19, 20 (1997)
Zurück zum Zitat P. Hovington, D. Drouin, R. Gauvin: CASINO: A new Monte Carlo code in C language for electron beam interaction---Part I: Description of the program, Scanning 19, 1 (1997) P. Hovington, D. Drouin, R. Gauvin: CASINO: A new Monte Carlo code in C language for electron beam interaction---Part I: Description of the program, Scanning 19, 1 (1997)
Zurück zum Zitat P. Hovington, D. Drouin, R. Gauvin, D.C. Joy, N. Evans: CASINO: A new Monte Carlo code in C language for electron beam interactions---Part III: Stopping power at low energies, Scanning 19, 29 (1997) P. Hovington, D. Drouin, R. Gauvin, D.C. Joy, N. Evans: CASINO: A new Monte Carlo code in C language for electron beam interactions---Part III: Stopping power at low energies, Scanning 19, 29 (1997)
Zurück zum Zitat H. Bethe: Zur Theorie des Durchgangs schneller Korpuskularstrahlen durch Materie, Ann. Phys. 5, 325 (1930) H. Bethe: Zur Theorie des Durchgangs schneller Korpuskularstrahlen durch Materie, Ann. Phys. 5, 325 (1930)
Zurück zum Zitat M.J. Berger, S.M. Seltzer: Tables of energy losses and ranges of electrons and positrons. In: Studies in Penetration of Charged Particles in Matter, ed. by U. Fano (National Academies Press, Washington 1964) pp. 205–268 M.J. Berger, S.M. Seltzer: Tables of energy losses and ranges of electrons and positrons. In: Studies in Penetration of Charged Particles in Matter, ed. by U. Fano (National Academies Press, Washington 1964) pp. 205–268
Zurück zum Zitat D.C. Joy, S. Luo: An empirical stopping power relationship for low-energy electrons, Scanning 11, 176 (1989) D.C. Joy, S. Luo: An empirical stopping power relationship for low-energy electrons, Scanning 11, 176 (1989)
Zurück zum Zitat R. Reichelt, A. Engel: Monte Carlo calculations of elastic and inelastic electron scattering in biological and plastic materials, Ultramicroscopy 13, 279 (1984) R. Reichelt, A. Engel: Monte Carlo calculations of elastic and inelastic electron scattering in biological and plastic materials, Ultramicroscopy 13, 279 (1984)
Zurück zum Zitat V. Krzyzanek, R. Reichelt: MONCA: A new MATLAB package for Monte Carlo simulation of electron scattering in thin specimens in the energy range 10–200 keV, Microsc. Microanal. 9(S3), 110 (2003) V. Krzyzanek, R. Reichelt: MONCA: A new MATLAB package for Monte Carlo simulation of electron scattering in thin specimens in the energy range 10–200 keV, Microsc. Microanal. 9(S3), 110 (2003)
Zurück zum Zitat R. Kollath: Sekundärelektronen-Emission fester Körper bei Bestrahlung mit Elektronen. In: Electron-Emission Gas Discharges I/Elektronen-Emission Gasentladungen I, Handbuch der Physik, Vol. 4/21 (Springer, Berlin 1956) pp. 232–302 R. Kollath: Sekundärelektronen-Emission fester Körper bei Bestrahlung mit Elektronen. In: Electron-Emission Gas Discharges I/Elektronen-Emission Gasentladungen I, Handbuch der Physik, Vol. 4/21 (Springer, Berlin 1956) pp. 232–302
Zurück zum Zitat A.J. Dekker: Secondary electron emission, Solid State Phys. 6, 251 (1958) A.J. Dekker: Secondary electron emission, Solid State Phys. 6, 251 (1958)
Zurück zum Zitat K. Kanaya, S. Ono: Interaction of electron beam with the target in scanning electron microscope. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 69–98 K. Kanaya, S. Ono: Interaction of electron beam with the target in scanning electron microscope. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 69–98
Zurück zum Zitat H. Seiler: Einige aktuelle Probleme der Sekundärelektron-Emission, Z. Angew. Phys. 22, 249 (1967) H. Seiler: Einige aktuelle Probleme der Sekundärelektron-Emission, Z. Angew. Phys. 22, 249 (1967)
Zurück zum Zitat H. Seiler: Secondary electron emission. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 33–42 H. Seiler: Secondary electron emission. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 33–42
Zurück zum Zitat J.L.H. Jonker: On the theory of secondary emission of metals, Philips Res. Rep. 12, 249 (1957) J.L.H. Jonker: On the theory of secondary emission of metals, Philips Res. Rep. 12, 249 (1957)
Zurück zum Zitat W. Oppel, H. Jahrreiss: Messungen der Winkelverteilung von Sekundärelektronen an dünnen freitragenden Al- und Au-Schichten, Z. Phys. 252, 107 (1972) W. Oppel, H. Jahrreiss: Messungen der Winkelverteilung von Sekundärelektronen an dünnen freitragenden Al- und Au-Schichten, Z. Phys. 252, 107 (1972)
Zurück zum Zitat H. Drescher, L. Reimer, H. Seidel: Rückstreukoeffizient und Sekundärelektronenausbeute von 10--100 keV-Elektronen und Beziehungen zur Raster-Elektronenmikroskopie, Z. Angew. Phys. 29, 331 (1970) H. Drescher, L. Reimer, H. Seidel: Rückstreukoeffizient und Sekundärelektronenausbeute von 10--100 keV-Elektronen und Beziehungen zur Raster-Elektronenmikroskopie, Z. Angew. Phys. 29, 331 (1970)
Zurück zum Zitat S. Ono, K. Kanaya: The energy dependence of secondary emission based on the range-energy retardation power formula, J. Phys. D 12, 619 (1979) S. Ono, K. Kanaya: The energy dependence of secondary emission based on the range-energy retardation power formula, J. Phys. D 12, 619 (1979)
Zurück zum Zitat H.E. Bauer, H. Seiler: Determination of the non-charging electron beam energies of electrically floating metal samples. In: Scanning Electron Microscopy, Vol. 3, ed. by O. Johari (Scanning Electron Microscopy, Chicago 1984) pp. 1081–1088 H.E. Bauer, H. Seiler: Determination of the non-charging electron beam energies of electrically floating metal samples. In: Scanning Electron Microscopy, Vol. 3, ed. by O. Johari (Scanning Electron Microscopy, Chicago 1984) pp. 1081–1088
Zurück zum Zitat K.F.J. Heinrich: Optiques de rayons X et microanalyse. In: Fourth International Congress on X-Ray Optics and Microanalysis, ed. by R. Castaing, P. Deschamps, J. Philibert (Hermann, Paris 1966) pp. 159–167 K.F.J. Heinrich: Optiques de rayons X et microanalyse. In: Fourth International Congress on X-Ray Optics and Microanalysis, ed. by R. Castaing, P. Deschamps, J. Philibert (Hermann, Paris 1966) pp. 159–167
Zurück zum Zitat D.B. Wittry: Secondary electron emission in the electron probe. In: 4th Int. Congr. X-ray Opt. Microanal., ed. by R. Castaing, P. Deschamps, J. Philibert (Hermann, Paris 1966) pp. 168–180 D.B. Wittry: Secondary electron emission in the electron probe. In: 4th Int. Congr. X-ray Opt. Microanal., ed. by R. Castaing, P. Deschamps, J. Philibert (Hermann, Paris 1966) pp. 168–180
Zurück zum Zitat H. Seiler: Die physikalischen Aspekte der Sekundärelektronenemission für die Elektronen-Raster-Mikroskopie, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 1, 27 (1968) H. Seiler: Die physikalischen Aspekte der Sekundärelektronenemission für die Elektronen-Raster-Mikroskopie, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 1, 27 (1968)
Zurück zum Zitat K. Murata: Monte Carlo simulation of electron scattering in resist film/substrate targets. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 311–329 K. Murata: Monte Carlo simulation of electron scattering in resist film/substrate targets. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 311–329
Zurück zum Zitat K. Murata: Spatial distribution of backscattered electrons in the SEM and electron microprobe, J. Appl. Phys. 45, 4110 (1974) K. Murata: Spatial distribution of backscattered electrons in the SEM and electron microprobe, J. Appl. Phys. 45, 4110 (1974)
Zurück zum Zitat H. Seiler: Determination of the information depth in the SEM, Scanning Electron Microsc. 1, 9 (1976) H. Seiler: Determination of the information depth in the SEM, Scanning Electron Microsc. 1, 9 (1976)
Zurück zum Zitat L. Reimer, C. Tollkamp: Measuring the backscattering coefficient and secondary electron yield inside a scanning electron microscope, Scanning 3, 35 (1980) L. Reimer, C. Tollkamp: Measuring the backscattering coefficient and secondary electron yield inside a scanning electron microscope, Scanning 3, 35 (1980)
Zurück zum Zitat W. Reuter: The ionization function and its application to the electron probe analysis of thin films. In: 6th Int. Congr. X-ray Opt. Microanal, ed. by G. Shinoda, K. Kohra, T. Ichinokawa (Tokyo Univ. Press, Tokyo 1972) pp. 121–130 W. Reuter: The ionization function and its application to the electron probe analysis of thin films. In: 6th Int. Congr. X-ray Opt. Microanal, ed. by G. Shinoda, K. Kohra, T. Ichinokawa (Tokyo Univ. Press, Tokyo 1972) pp. 121–130
Zurück zum Zitat H.-J. Hunger, L. Küchler: Measurements of the electron backscattering coefficient for quantitative EPMA in the energy range of 4 to 40 keV, Phys. Status Solidi (a) 56, K45 (1979) H.-J. Hunger, L. Küchler: Measurements of the electron backscattering coefficient for quantitative EPMA in the energy range of 4 to 40 keV, Phys. Status Solidi (a) 56, K45 (1979)
Zurück zum Zitat D.C. Joy: Contrast in high-resolution scanning electron microscope images, J. Microsc. 161, 343 (1991) D.C. Joy: Contrast in high-resolution scanning electron microscope images, J. Microsc. 161, 343 (1991)
Zurück zum Zitat M. Zadrazil, M.M. El-Gomati, A. Walker: Measurements of very low energy secondary and backscattered electron coefficients, J. Comput. Assist. Microsc. 9, 123 (1997) M. Zadrazil, M.M. El-Gomati, A. Walker: Measurements of very low energy secondary and backscattered electron coefficients, J. Comput. Assist. Microsc. 9, 123 (1997)
Zurück zum Zitat F. Arnal, P. Verdier, P.-D. Vincensini: Coefficient de retrodiffusion dans le cas d' électrons monocinétiques arrivant sur la cible sous une incidence oblique, C. R. Acad. Sci. 268, 1526 (1969) F. Arnal, P. Verdier, P.-D. Vincensini: Coefficient de retrodiffusion dans le cas d' électrons monocinétiques arrivant sur la cible sous une incidence oblique, C. R. Acad. Sci. 268, 1526 (1969)
Zurück zum Zitat L. Reimer, H.G. Badde, H. Seidel: Orientierungsanisotropie des Rückstreukoeffizienten und der Sekundärelektronenausbeute von 10–100 keV Elektronen, Z. Angew. Phys. 31, 145 (1971) L. Reimer, H.G. Badde, H. Seidel: Orientierungsanisotropie des Rückstreukoeffizienten und der Sekundärelektronenausbeute von 10–100 keV Elektronen, Z. Angew. Phys. 31, 145 (1971)
Zurück zum Zitat E. Oho, T. Sasaki, K. Adachi, Y. Muranaka, K. Kanaya: An inexpensive and highly efficient device for observing a STEM image in a SEM. In: 11th Int. Congr. Electron Microsc, ed. by T. Imura, S. Maruse, T. Suzuki (Japanese Society of Electron Microscopy, Kyoto 1986) pp. 421–422 E. Oho, T. Sasaki, K. Adachi, Y. Muranaka, K. Kanaya: An inexpensive and highly efficient device for observing a STEM image in a SEM. In: 11th Int. Congr. Electron Microsc, ed. by T. Imura, S. Maruse, T. Suzuki (Japanese Society of Electron Microscopy, Kyoto 1986) pp. 421–422
Zurück zum Zitat R. Reichelt, A. Engel: Quantitative scanning transmission ‘electron microscopy' in biology, J. Microsc. Spectrosc. Electron. 10, 491 (1985) R. Reichelt, A. Engel: Quantitative scanning transmission ‘electron microscopy' in biology, J. Microsc. Spectrosc. Electron. 10, 491 (1985)
Zurück zum Zitat J. Frank, P. Bussler, R. Langer, W. Hoppe: Einige Erfahrungen mit der rechnerischen Analyse und Synthese von elektronenmikroskopischen Bildern hoher Auflösung, Ber. Bunsenges. Phys. Chem. 74, 1105 (1970) J. Frank, P. Bussler, R. Langer, W. Hoppe: Einige Erfahrungen mit der rechnerischen Analyse und Synthese von elektronenmikroskopischen Bildern hoher Auflösung, Ber. Bunsenges. Phys. Chem. 74, 1105 (1970)
Zurück zum Zitat D.C. Joy: SMART–A program to measure SEM resolution and imaging performance, J. Microsc. 208, 24 (2002) D.C. Joy: SMART–A program to measure SEM resolution and imaging performance, J. Microsc. 208, 24 (2002)
Zurück zum Zitat J. Frank: The role of correlation techniques in computer image processing. In: Computer Processing of Electron Microscope Images, ed. by P.W. Hawkes (Springer, New York 1980) pp. 187–222 J. Frank: The role of correlation techniques in computer image processing. In: Computer Processing of Electron Microscope Images, ed. by P.W. Hawkes (Springer, New York 1980) pp. 187–222
Zurück zum Zitat M.D. Muir, P.R. Grant: Cathodoluminescence. In: Quantitative Scanning Electron Microscopy, ed. by D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Academic Press, London 1974) pp. 287–334 M.D. Muir, P.R. Grant: Cathodoluminescence. In: Quantitative Scanning Electron Microscopy, ed. by D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Academic Press, London 1974) pp. 287–334
Zurück zum Zitat D.B. Holt, B.G. Yacobi: Cathodoluminescence characterization of semiconductors. In: SEM Microcharacterization of Semiconductors, ed. by D.B. Holt, D.C. Joy (Academic Press, London 1989) pp. 373–423 D.B. Holt, B.G. Yacobi: Cathodoluminescence characterization of semiconductors. In: SEM Microcharacterization of Semiconductors, ed. by D.B. Holt, D.C. Joy (Academic Press, London 1989) pp. 373–423
Zurück zum Zitat B.G. Yakobi, D.B. Holt (Eds.): Cathodoluminescence Microscopy of Inorganic Solids (Plenum, New York 1990) B.G. Yakobi, D.B. Holt (Eds.): Cathodoluminescence Microscopy of Inorganic Solids (Plenum, New York 1990)
Zurück zum Zitat D.B. Holt, F.M. Saba: The cathodoluminescence mode of the SEM: A powerful microcharacterization technique, Scanning Electron Microsc. 3, 1023 (1985) D.B. Holt, F.M. Saba: The cathodoluminescence mode of the SEM: A powerful microcharacterization technique, Scanning Electron Microsc. 3, 1023 (1985)
Zurück zum Zitat M. DeMets: Relationship between cathodoluminescence and molecular structure of organic compounds, Microsc. Acta 76, 405 (1975) M. DeMets: Relationship between cathodoluminescence and molecular structure of organic compounds, Microsc. Acta 76, 405 (1975)
Zurück zum Zitat M. DeMets, K.J. Howlett, A.O. Yoffe: Cathodoluminescent spectra of organic compounds, J. Microsc. 102, 125 (1974) M. DeMets, K.J. Howlett, A.O. Yoffe: Cathodoluminescent spectra of organic compounds, J. Microsc. 102, 125 (1974)
Zurück zum Zitat W. Bröcker, E.-R. Krefting, L. Reimer: Abhängigkeit des Kathodolumineszenzsignals vom Kippwinkel der Probe im Raster-Elektronenmikroskop, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 10, 647 (1977) W. Bröcker, E.-R. Krefting, L. Reimer: Abhängigkeit des Kathodolumineszenzsignals vom Kippwinkel der Probe im Raster-Elektronenmikroskop, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 10, 647 (1977)
Zurück zum Zitat H.A. Kramers: On the theory of x-ray absorption and of the continuous x-ray spectrum, Philos. Mag. 46, 836 (1923) H.A. Kramers: On the theory of x-ray absorption and of the continuous x-ray spectrum, Philos. Mag. 46, 836 (1923)
Zurück zum Zitat S.T. Stephenson: The continuous x-ray spectrum. In: Handbuch der Physik, Vol. 30 (Springer, Berlin 1957) pp. 337–370 S.T. Stephenson: The continuous x-ray spectrum. In: Handbuch der Physik, Vol. 30 (Springer, Berlin 1957) pp. 337–370
Zurück zum Zitat W. Bambynek, B. Crasemann, R.W. Fink, H.U. Freund, H. Mark, C.D. Swift, R.E. Price, P.V. Rao: X-ray fluorescent yields, Auger, and Coster–Kronig transition probabilities, Rev. Mod. Phys. 44, 716 (1972) W. Bambynek, B. Crasemann, R.W. Fink, H.U. Freund, H. Mark, C.D. Swift, R.E. Price, P.V. Rao: X-ray fluorescent yields, Auger, and Coster–Kronig transition probabilities, Rev. Mod. Phys. 44, 716 (1972)
Zurück zum Zitat J.A. Bearden: X-ray wavelengths, Rev. Mod. Phys. 39, 78 (1967) J.A. Bearden: X-ray wavelengths, Rev. Mod. Phys. 39, 78 (1967)
Zurück zum Zitat J.A. Bearden: Reevaluation of x-ray atomic energy levels, Rev. Mod. Phys. 39, 125 (1967) J.A. Bearden: Reevaluation of x-ray atomic energy levels, Rev. Mod. Phys. 39, 125 (1967)
Zurück zum Zitat W.L. Baun: Changes in x-ray emission spectra observed between pure elements in combination with others to form compounds or alloys, Adv. Electron. Electron Phys. 6, 155 (1969) W.L. Baun: Changes in x-ray emission spectra observed between pure elements in combination with others to form compounds or alloys, Adv. Electron. Electron Phys. 6, 155 (1969)
Zurück zum Zitat E.H.S. Burhop: The Auger Effect (Cambridge Univ. Press, Cambridge 1952) E.H.S. Burhop: The Auger Effect (Cambridge Univ. Press, Cambridge 1952)
Zurück zum Zitat T. Åberg, G. Howat: Theory of the Auger effect. In: Handbuch der Physik, Vol. 31, ed. by W. Mehlhorn, S. Flügge (Springer, Berlin 1982) pp. 469–619 T. Åberg, G. Howat: Theory of the Auger effect. In: Handbuch der Physik, Vol. 31, ed. by W. Mehlhorn, S. Flügge (Springer, Berlin 1982) pp. 469–619
Zurück zum Zitat H.H. Madden: Chemical information from Auger electron spectroscopy, J. Vac. Sci. Technol. 18, 677 (1981) H.H. Madden: Chemical information from Auger electron spectroscopy, J. Vac. Sci. Technol. 18, 677 (1981)
Zurück zum Zitat H.E. Bishop: The role of the background in Auger spectroscopy. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 259–269 H.E. Bishop: The role of the background in Auger spectroscopy. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 259–269
Zurück zum Zitat P.W. Palmberg: Quantitative analysis of solid surfaces by Auger electron spectroscopy, Anal. Chem. 45, 549A (1973) P.W. Palmberg: Quantitative analysis of solid surfaces by Auger electron spectroscopy, Anal. Chem. 45, 549A (1973)
Zurück zum Zitat M.P. Seah, W.A. Dench: Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids, Surf. Interface Anal. 1, 2 (1979) M.P. Seah, W.A. Dench: Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids, Surf. Interface Anal. 1, 2 (1979)
Zurück zum Zitat E. Bauer, W. Telieps: Emission and low energy reflection ‘electron' microscopy. In: Surface and Interface Characterization by Electron Optical Methods, ed. by A. Howie, A. Valdre (Plenum, New York 1988) pp. 195–233 E. Bauer, W. Telieps: Emission and low energy reflection ‘electron' microscopy. In: Surface and Interface Characterization by Electron Optical Methods, ed. by A. Howie, A. Valdre (Plenum, New York 1988) pp. 195–233
Zurück zum Zitat H.E. Bishop, J.C. Riviere: Surface segregation in boron doped iron observed by Auger, J. Appl. Phys. 40, 1740 (1969) H.E. Bishop, J.C. Riviere: Surface segregation in boron doped iron observed by Auger, J. Appl. Phys. 40, 1740 (1969)
Zurück zum Zitat J. Kirschner: The role of backscattered electrons in scanning Auger microscopy. In: Scanning Electron Microscopy, Vol. 1, ed. by O. Johari (Scanning Electron Microscopy, Chicago 1976) pp. 215–220 J. Kirschner: The role of backscattered electrons in scanning Auger microscopy. In: Scanning Electron Microscopy, Vol. 1, ed. by O. Johari (Scanning Electron Microscopy, Chicago 1976) pp. 215–220
Zurück zum Zitat M. Jacka: Scanning Auger microscopy: Recent progress in data analysis and instrumentation, J. Electron Spectrosc. Relat. Phenom. 277, 114–116 (2001) M. Jacka: Scanning Auger microscopy: Recent progress in data analysis and instrumentation, J. Electron Spectrosc. Relat. Phenom. 277, 114–116 (2001)
Zurück zum Zitat D.E. Newbury: The utility of specimen current imaging in the SEM, Scanning Electron Microsc. 1, 111 (1976) D.E. Newbury: The utility of specimen current imaging in the SEM, Scanning Electron Microsc. 1, 111 (1976)
Zurück zum Zitat D.K. Hindermann, R.H. Davis: SEM techniques for the examination of blind and through holes, Scanning Electron Microsc. 1, 183 (1974) D.K. Hindermann, R.H. Davis: SEM techniques for the examination of blind and through holes, Scanning Electron Microsc. 1, 183 (1974)
Zurück zum Zitat K.-R. Peters: Generation, collection and properties of an SE-I enriched signal suitable for high resolution SEM on bulk specimens. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 363–372 K.-R. Peters: Generation, collection and properties of an SE-I enriched signal suitable for high resolution SEM on bulk specimens. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 363–372
Zurück zum Zitat H. Seiler, G. Kuhnle: Zur Anisotropie der Elektronenausbeute in Abhängigkeit von der Energie der auslösenden Primärelektronen von 5 bis 50 keV, Z. Angew. Phys. 29, 254 (1970) H. Seiler, G. Kuhnle: Zur Anisotropie der Elektronenausbeute in Abhängigkeit von der Energie der auslösenden Primärelektronen von 5 bis 50 keV, Z. Angew. Phys. 29, 254 (1970)
Zurück zum Zitat L. Reimer: Methods of detection of radiation damage in electron microscopy, Ultramicroscopy 14, 291 (1984) L. Reimer: Methods of detection of radiation damage in electron microscopy, Ultramicroscopy 14, 291 (1984)
Zurück zum Zitat B. Volbert, L. Reimer: Advantages of two opposite Everhart–Thornley detectors in SEM, Scanning Electron Microsc. 4, 1 (1980) B. Volbert, L. Reimer: Advantages of two opposite Everhart–Thornley detectors in SEM, Scanning Electron Microsc. 4, 1 (1980)
Zurück zum Zitat P. Rappaport: The electron-voltaic effect in p-n junctions induced by beta-particle bombardment, Phys. Rev. 93, 246 (1954) P. Rappaport: The electron-voltaic effect in p-n junctions induced by beta-particle bombardment, Phys. Rev. 93, 246 (1954)
Zurück zum Zitat C.W. Oatley, T.E. Everhart: The examination of p-n junctions with the scanning electron microscope, J. Electron. Control 2, 568 (1957) C.W. Oatley, T.E. Everhart: The examination of p-n junctions with the scanning electron microscope, J. Electron. Control 2, 568 (1957)
Zurück zum Zitat T.E. Everhart, O.C. Wells, C.W. Oatley: Factors affecting contrast and resolution in the scanning electron microscope, J. Electron. Control 7, 97 (1959) T.E. Everhart, O.C. Wells, C.W. Oatley: Factors affecting contrast and resolution in the scanning electron microscope, J. Electron. Control 7, 97 (1959)
Zurück zum Zitat W.S.M. Werner, H. Lakatha, H.E. Smith, L. LeTarte, V. Ambrose, J. Baker: Auger voltage contrast imaging for the delineation of two-dimensional junctions in cross-sectioned metal-oxide-semiconductor devices, J. Vac. Sci. Technol. B 16, 420 (1998) W.S.M. Werner, H. Lakatha, H.E. Smith, L. LeTarte, V. Ambrose, J. Baker: Auger voltage contrast imaging for the delineation of two-dimensional junctions in cross-sectioned metal-oxide-semiconductor devices, J. Vac. Sci. Technol. B 16, 420 (1998)
Zurück zum Zitat J. Edelmann, K. Wetzig: Low-temperature microscopy and analysis. In: In Situ Scanning Electron Microscopy in Materials Research, ed. by K. Wetzig, D. Schulze (Akademie, Berlin 1995) pp. 109–125 J. Edelmann, K. Wetzig: Low-temperature microscopy and analysis. In: In Situ Scanning Electron Microscopy in Materials Research, ed. by K. Wetzig, D. Schulze (Akademie, Berlin 1995) pp. 109–125
Zurück zum Zitat Y. Uchikawa, S. Ikeda: Application of scanning electron microscopy (SEM) to analysis of surface domain structure of ferroelectrics, Scanning Electron Microsc. 1, 209 (1981) Y. Uchikawa, S. Ikeda: Application of scanning electron microscopy (SEM) to analysis of surface domain structure of ferroelectrics, Scanning Electron Microsc. 1, 209 (1981)
Zurück zum Zitat D. Hesse, K.-P. Meyer: Domänenstruktur ferroelektrischer und ferromagnetischer Festkörper. In: Elektronenmikroskopie in der Festkörperphysik, ed. by H. Bethge, J. Heydenreich (DVW, Berlin 1982) pp. 473–507 D. Hesse, K.-P. Meyer: Domänenstruktur ferroelektrischer und ferromagnetischer Festkörper. In: Elektronenmikroskopie in der Festkörperphysik, ed. by H. Bethge, J. Heydenreich (DVW, Berlin 1982) pp. 473–507
Zurück zum Zitat D.V. Roshchupkin, M. Brunel: SEM observation of the voltage contrast image of the ferroelectric domain structure in the LiNbO3 crystal, Scanning Microsc. 7, 543 (1993) D.V. Roshchupkin, M. Brunel: SEM observation of the voltage contrast image of the ferroelectric domain structure in the LiNbO3 crystal, Scanning Microsc. 7, 543 (1993)
Zurück zum Zitat H. Bahadur, R. Parshad: SEM of vibrating quartz crystals—A review, Scanning Electron Microsc. 1, 509 (1980) H. Bahadur, R. Parshad: SEM of vibrating quartz crystals—A review, Scanning Electron Microsc. 1, 509 (1980)
Zurück zum Zitat A.E. Lukianov, G.V. Spivak: Electron mirror microscopy of transient phenomena in semiconductor diodes. In: Electron Microscopy, Vol. 2, ed. by R. Uyeda (Maruzen, Tokyo 1966) p. 611 A.E. Lukianov, G.V. Spivak: Electron mirror microscopy of transient phenomena in semiconductor diodes. In: Electron Microscopy, Vol. 2, ed. by R. Uyeda (Maruzen, Tokyo 1966) p. 611
Zurück zum Zitat G.S. Plows, W.C. Nixon: Stroboscopic electron microscopy, J. Phys. E 1, 595 (1968) G.S. Plows, W.C. Nixon: Stroboscopic electron microscopy, J. Phys. E 1, 595 (1968)
Zurück zum Zitat T. Hosokawa, H. Fujioka, K. Ura: Generation and measurement of subpicosecond electron beam pulses, Rev. Sci. Instrum. 49, 624 (1978) T. Hosokawa, H. Fujioka, K. Ura: Generation and measurement of subpicosecond electron beam pulses, Rev. Sci. Instrum. 49, 624 (1978)
Zurück zum Zitat H. Fujioka, K. Ura: Waveform measurements on gigahertz semiconductor devices by scanning electron microscope stroboscopy, Appl. Phys. Lett. 39, 81 (1981) H. Fujioka, K. Ura: Waveform measurements on gigahertz semiconductor devices by scanning electron microscope stroboscopy, Appl. Phys. Lett. 39, 81 (1981)
Zurück zum Zitat S.M. Davidson: Voltage contrast and stroboscopy. In: SEM Microcharacterization of Semiconductors, Techniques in Physics, Vol. 12, ed. by D.B. Holt, D.C. Joy (Academic Press, New York 1989) pp. 153–240 S.M. Davidson: Voltage contrast and stroboscopy. In: SEM Microcharacterization of Semiconductors, Techniques in Physics, Vol. 12, ed. by D.B. Holt, D.C. Joy (Academic Press, New York 1989) pp. 153–240
Zurück zum Zitat P. Girard: Voltage contrast, J. Phys. IV 01, C6–259 (1991) P. Girard: Voltage contrast, J. Phys. IV 01, C6–259 (1991)
Zurück zum Zitat L. Dubbeldam: Advances in voltage-contrast detectors in scanning electron microscopes. In: Advances in Optical and Electron Microscopy, Vol. 12, ed. by T. Mulvey, C.J.R. Sheppard (Academic Press, London 1991) pp. 139–242 L. Dubbeldam: Advances in voltage-contrast detectors in scanning electron microscopes. In: Advances in Optical and Electron Microscopy, Vol. 12, ed. by T. Mulvey, C.J.R. Sheppard (Academic Press, London 1991) pp. 139–242
Zurück zum Zitat J.M. McKenzie, D.A. Bromely: Observation of charged-particle reaction products, Phys. Rev. Lett. 2, 303 (1959) J.M. McKenzie, D.A. Bromely: Observation of charged-particle reaction products, Phys. Rev. Lett. 2, 303 (1959)
Zurück zum Zitat D.B. Holt: Quantitative scanning electron microscope studies of cathodoluminescence in adamantine semiconductors. In: Quantitative Scanning Electron Microscopy, ed. by D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Academic Press, London 1974) pp. 213–286 D.B. Holt: Quantitative scanning electron microscope studies of cathodoluminescence in adamantine semiconductors. In: Quantitative Scanning Electron Microscopy, ed. by D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Academic Press, London 1974) pp. 213–286
Zurück zum Zitat D.B. Holt: The conductive mode. In: SEM Microcharacterization of Semiconductors, ed. by D.B. Holt, D.C. Joy (Academic Press, London 1989) pp. 241–338 D.B. Holt: The conductive mode. In: SEM Microcharacterization of Semiconductors, ed. by D.B. Holt, D.C. Joy (Academic Press, London 1989) pp. 241–338
Zurück zum Zitat H.J. Deamy: Charge collection scanning electron microscopy, J. Appl. Phys. 53, R51 (1982) H.J. Deamy: Charge collection scanning electron microscopy, J. Appl. Phys. 53, R51 (1982)
Zurück zum Zitat S.P. Shea, L.D. Partain, P.J. Warter: Resolution limits of the EBIC technique in the determination of diffusion lengths in semiconductors, Scanning Electron Microsc. 1, 435 (1978) S.P. Shea, L.D. Partain, P.J. Warter: Resolution limits of the EBIC technique in the determination of diffusion lengths in semiconductors, Scanning Electron Microsc. 1, 435 (1978)
Zurück zum Zitat H. Alexander: What information on extended defects do we obtain from beam-injection methods?, Mater. Sci. Eng. B 24, 1 (1994) H. Alexander: What information on extended defects do we obtain from beam-injection methods?, Mater. Sci. Eng. B 24, 1 (1994)
Zurück zum Zitat E.B. Yakimov: Electron-beam-induced-current study of defects in GaN; experiments and simulation, J. Phys. Condens. Matter 14, 13069 (2002) E.B. Yakimov: Electron-beam-induced-current study of defects in GaN; experiments and simulation, J. Phys. Condens. Matter 14, 13069 (2002)
Zurück zum Zitat A.E. Grün: Lumineszenz-photometrische Messungen der Energieabsorption im Strahlungsfeld von Elektronenquellen. Eindimensionaler Fall in Luft, Z. Naturforsch. A 12, 89 (1957) A.E. Grün: Lumineszenz-photometrische Messungen der Energieabsorption im Strahlungsfeld von Elektronenquellen. Eindimensionaler Fall in Luft, Z. Naturforsch. A 12, 89 (1957)
Zurück zum Zitat T.E. Everhart, P.H. Hoff: Determination of kilovolt electron energy dissipation vs. penetration distance in solid materials, J. Appl. Phys. 42, 5837 (1971) T.E. Everhart, P.H. Hoff: Determination of kilovolt electron energy dissipation vs. penetration distance in solid materials, J. Appl. Phys. 42, 5837 (1971)
Zurück zum Zitat H.E. Bishop: Electron---Solid interactions and energy dissipation. In: Quantitative Scanning Electron Microscopy, ed. by D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Academic Press, London 1974) pp. 41–64 H.E. Bishop: Electron---Solid interactions and energy dissipation. In: Quantitative Scanning Electron Microscopy, ed. by D.B. Holt, M.D. Muir, P.R. Grant, I.M. Boswarva (Academic Press, London 1974) pp. 41–64
Zurück zum Zitat H.J. Leamy: Charge collection scanning electron microscopy, J. Appl. Phys. 53, R51 (1982) H.J. Leamy: Charge collection scanning electron microscopy, J. Appl. Phys. 53, R51 (1982)
Zurück zum Zitat A. Georges, J.M. Fournier, D. Bois: Time resolved EBIC: A non destructive method technique for an accurate determination of p-n junction depth, Scanning Electron Microsc. 1, 147 (1982) A. Georges, J.M. Fournier, D. Bois: Time resolved EBIC: A non destructive method technique for an accurate determination of p-n junction depth, Scanning Electron Microsc. 1, 147 (1982)
Zurück zum Zitat T. Sekiguchi, K. Sumino: Quantitative electron-beam tester for defects in semiconductors (CL/EBIC/SDLTS system), Rev. Sci. Instrum. 66, 4277 (1995) T. Sekiguchi, K. Sumino: Quantitative electron-beam tester for defects in semiconductors (CL/EBIC/SDLTS system), Rev. Sci. Instrum. 66, 4277 (1995)
Zurück zum Zitat D.S.H. Chan, J.C.H. Phang, J.M. Chin, S. Kolachina: Single contact beam induced current phenomena—A review, Solid State Phenom. 78–79, 11–18 (2000) D.S.H. Chan, J.C.H. Phang, J.M. Chin, S. Kolachina: Single contact beam induced current phenomena—A review, Solid State Phenom. 78–79, 11–18 (2000)
Zurück zum Zitat H. Drescher, E.-R. Krefting, L. Reimer, H. Seidel: The orientation dependence of the electron backscattering coefficient of gold single crystal films, Z. Naturforsch. A 29, 833 (1974) H. Drescher, E.-R. Krefting, L. Reimer, H. Seidel: The orientation dependence of the electron backscattering coefficient of gold single crystal films, Z. Naturforsch. A 29, 833 (1974)
Zurück zum Zitat J.R. Dorsey: Scanning electron probe measurements of magnetic fields. In: Electron Probe Microanalysis, ed. by A.J. Tousimis, L. Marton (Academic Press, New York 1969) pp. 291–321 J.R. Dorsey: Scanning electron probe measurements of magnetic fields. In: Electron Probe Microanalysis, ed. by A.J. Tousimis, L. Marton (Academic Press, New York 1969) pp. 291–321
Zurück zum Zitat G.A. Wardly: Magnetic contrast in the scanning electron microscope, J. Appl. Phys. 42, 376 (1971) G.A. Wardly: Magnetic contrast in the scanning electron microscope, J. Appl. Phys. 42, 376 (1971)
Zurück zum Zitat V. Szmaja: Improvements and actual problems in domain imaging by type-I magnetic contrast in SEM, Czechoslov. J. Phys. 52(S1), A145 (2002) V. Szmaja: Improvements and actual problems in domain imaging by type-I magnetic contrast in SEM, Czechoslov. J. Phys. 52(S1), A145 (2002)
Zurück zum Zitat W. Szmaja: Digitally enhanced type-I magnetic contrast in SEM as a method of domain investigation, J. Magn. Magn. Mater. 219, 281 (2000) W. Szmaja: Digitally enhanced type-I magnetic contrast in SEM as a method of domain investigation, J. Magn. Magn. Mater. 219, 281 (2000)
Zurück zum Zitat J. Philibert, R. Tixier: Effets de contraste cristallin en microscopie électronique à balayage, Micron 1, 174 (1969) J. Philibert, R. Tixier: Effets de contraste cristallin en microscopie électronique à balayage, Micron 1, 174 (1969)
Zurück zum Zitat D.J. Fathers, J.P. Jacubovics, D.C. Joy, D.E. Newbury, H. Yakowitz: A new method of observing magnetic domains by scanning electron microscopy. I. Theory of the image contrast, Phys. Status Solidi (a) 20, 535 (1973) D.J. Fathers, J.P. Jacubovics, D.C. Joy, D.E. Newbury, H. Yakowitz: A new method of observing magnetic domains by scanning electron microscopy. I. Theory of the image contrast, Phys. Status Solidi (a) 20, 535 (1973)
Zurück zum Zitat T. Yamamoto, H. Nishizawa, K. Tsuno: Magnetic domain contrast in backscattered electron images obtained with a scanning electron microscope, Philos. Mag. 34, 311 (1976) T. Yamamoto, H. Nishizawa, K. Tsuno: Magnetic domain contrast in backscattered electron images obtained with a scanning electron microscope, Philos. Mag. 34, 311 (1976)
Zurück zum Zitat O.C. Wells: Isolation of type-2 magnetic contrast in the SEM by a lock-in technique, Appl. Phys. Lett. 35, 644 (1979) O.C. Wells: Isolation of type-2 magnetic contrast in the SEM by a lock-in technique, Appl. Phys. Lett. 35, 644 (1979)
Zurück zum Zitat L. Reimer: Elektronenmikroskopische Untersuchungs- und Präparationsmethoden, 2nd edn. (Springer, Berlin 1967) L. Reimer: Elektronenmikroskopische Untersuchungs- und Präparationsmethoden, 2nd edn. (Springer, Berlin 1967)
Zurück zum Zitat M.A. Hayat (Ed.): Principles and Techniques of Biological Scanning Electron Microscopy (Univ. Park Press, Baltimore 1978) M.A. Hayat (Ed.): Principles and Techniques of Biological Scanning Electron Microscopy (Univ. Park Press, Baltimore 1978)
Zurück zum Zitat J.M. Polak, J.M. Varndell (Eds.): Immunolabelling for Electron Microscopy (Elsevier, Amsterdam 1984) J.M. Polak, J.M. Varndell (Eds.): Immunolabelling for Electron Microscopy (Elsevier, Amsterdam 1984)
Zurück zum Zitat M. Müller (Ed.): The Science of Biological Specimen Preparations for Microscopy and Microanalysis (Scanning Microscopy International, Chicago 1985) M. Müller (Ed.): The Science of Biological Specimen Preparations for Microscopy and Microanalysis (Scanning Microscopy International, Chicago 1985)
Zurück zum Zitat R.A. Steinbrecht, K. Zierold (Eds.): Cryotechniques in Biological Electron Microscopy (Springer, Berlin 1987) R.A. Steinbrecht, K. Zierold (Eds.): Cryotechniques in Biological Electron Microscopy (Springer, Berlin 1987)
Zurück zum Zitat R.M. Albrecht, R.L. Ornberg (Eds.): The Science of Biological Specimen Preparations for Microscopy and Microanalysis (Scanning Microscopy International, Chicago 1988) R.M. Albrecht, R.L. Ornberg (Eds.): The Science of Biological Specimen Preparations for Microscopy and Microanalysis (Scanning Microscopy International, Chicago 1988)
Zurück zum Zitat L. Edelmann, G.M. Roomans (Eds.): The Science of Biological Specimen Preparations for Microscopy and Microanalysis (Scanning Microscopy International, Chicago 1990) L. Edelmann, G.M. Roomans (Eds.): The Science of Biological Specimen Preparations for Microscopy and Microanalysis (Scanning Microscopy International, Chicago 1990)
Zurück zum Zitat F. Grasenick, A. Aldrian, R. Bauer, H. Bangert, R. Essl, R.H. Haefer, P. Hagemann, K.-H. Hermann, E.M. Hörl, P. Karnthaler, E. Knapek, R. Nobiling, K.-R. Peters, G. Weber: Elektronenmikroskopie. Erweiterte Einsatzmöglichkeiten und spezielle Abbildungs- und Präparationsmethoden (Expert, Ehningen 1991) F. Grasenick, A. Aldrian, R. Bauer, H. Bangert, R. Essl, R.H. Haefer, P. Hagemann, K.-H. Hermann, E.M. Hörl, P. Karnthaler, E. Knapek, R. Nobiling, K.-R. Peters, G. Weber: Elektronenmikroskopie. Erweiterte Einsatzmöglichkeiten und spezielle Abbildungs- und Präparationsmethoden (Expert, Ehningen 1991)
Zurück zum Zitat P. Echlin: Low-Temperature Microscopy and Analysis (Plenum, New York 1992) P. Echlin: Low-Temperature Microscopy and Analysis (Plenum, New York 1992)
Zurück zum Zitat M. Malecki, G.M. Roomans (Eds.): The Science of Biological Specimen Preparations for Microscopy (Scanning Microscopy International, Chicago 1996) M. Malecki, G.M. Roomans (Eds.): The Science of Biological Specimen Preparations for Microscopy (Scanning Microscopy International, Chicago 1996)
Zurück zum Zitat G. Schimmel, W. Vogell: Methodensammlung der Elektronenmikroskopie (Wissenschaftliche Verlagsgesellschaft, Stuttgart 1970) G. Schimmel, W. Vogell: Methodensammlung der Elektronenmikroskopie (Wissenschaftliche Verlagsgesellschaft, Stuttgart 1970)
Zurück zum Zitat A.W. Robards, A.J. Wilson (Eds.): Procedures in Electron Microscopy (Wiley, Chichester 1993) A.W. Robards, A.J. Wilson (Eds.): Procedures in Electron Microscopy (Wiley, Chichester 1993)
Zurück zum Zitat T.C. Isabell, P.E. Fischione, C. O’Keefe, M.U. Guruz, V.P. Dravid: Plasma cleaning and its applications for electron microscopy, Microsc. Microanal. 5, 126 (1999) T.C. Isabell, P.E. Fischione, C. O’Keefe, M.U. Guruz, V.P. Dravid: Plasma cleaning and its applications for electron microscopy, Microsc. Microanal. 5, 126 (1999)
Zurück zum Zitat J.H.M. Willison, A.J. Rowe: Replica, Shadowing and Freeze-Etching Techniques (North-Holland, Amsterdam 1980) J.H.M. Willison, A.J. Rowe: Replica, Shadowing and Freeze-Etching Techniques (North-Holland, Amsterdam 1980)
Zurück zum Zitat Y. Shibata, T. Arima, T. Yamamoto: Double-axis rotary replication for deep-etching, J. Microsc. 136, 121 (1984) Y. Shibata, T. Arima, T. Yamamoto: Double-axis rotary replication for deep-etching, J. Microsc. 136, 121 (1984)
Zurück zum Zitat R. Hermann, J. Pawley, T. Nagatani, M. Müller: Double-axis rotary shadowing for high resolution scanning electron microscopy, Scanning Microsc. 2, 1215 (1988) R. Hermann, J. Pawley, T. Nagatani, M. Müller: Double-axis rotary shadowing for high resolution scanning electron microscopy, Scanning Microsc. 2, 1215 (1988)
Zurück zum Zitat R.P. Apkarian, J.C. Curtis: Hormonal regulation of capillary fenestrae in the rat adrenal cortex: Quantitative studies using objective lens staging scanning electron microscopy, Scanning Electron Microsc. 4, 1381 (1986) R.P. Apkarian, J.C. Curtis: Hormonal regulation of capillary fenestrae in the rat adrenal cortex: Quantitative studies using objective lens staging scanning electron microscopy, Scanning Electron Microsc. 4, 1381 (1986)
Zurück zum Zitat T. Nagatani, S. Saito: Development of a high resolution SEM and comparative TEM/SEM observation of fine metal particles and thin films, Inst. Phys. Conf. Ser. 98, 519–522 (1989) T. Nagatani, S. Saito: Development of a high resolution SEM and comparative TEM/SEM observation of fine metal particles and thin films, Inst. Phys. Conf. Ser. 98, 519–522 (1989)
Zurück zum Zitat T. Müller, P. Walther, C. Scheidegger, R. Reichelt, S. Müller, R. Guggenheim: Cryo-preparation and planar magnetron sputtering for low temperature ‘scanning' electron microscopy, Scanning Microsc. 4, 863 (1990) T. Müller, P. Walther, C. Scheidegger, R. Reichelt, S. Müller, R. Guggenheim: Cryo-preparation and planar magnetron sputtering for low temperature ‘scanning' electron microscopy, Scanning Microsc. 4, 863 (1990)
Zurück zum Zitat H. Gross, T. Müller, I. Wildhaber, H. Winkler: High resolution metal replication, quantified by image processing of periodic test specimens, Ultramicroscopy 16, 287 (1985) H. Gross, T. Müller, I. Wildhaber, H. Winkler: High resolution metal replication, quantified by image processing of periodic test specimens, Ultramicroscopy 16, 287 (1985)
Zurück zum Zitat R. Wepf, H. Gross: Pt/Ir/C: a powerful coating material for high resolution SEM. In: 12th Int. Congr. Electron Microsc., ed. by L.D. Peachy, D.B. Williams (San Francisco Press, Seattle 1990) pp. 6–7 R. Wepf, H. Gross: Pt/Ir/C: a powerful coating material for high resolution SEM. In: 12th Int. Congr. Electron Microsc., ed. by L.D. Peachy, D.B. Williams (San Francisco Press, Seattle 1990) pp. 6–7
Zurück zum Zitat R. Wepf, M. Amrein, U. Bürkli, H. Gross: Platinum/iridium/carbon: A high-resolution shadowing material for TEM, STM and SEM of biological macromolecular structures, J. Microsc. 163, 51–64 (1991) R. Wepf, M. Amrein, U. Bürkli, H. Gross: Platinum/iridium/carbon: A high-resolution shadowing material for TEM, STM and SEM of biological macromolecular structures, J. Microsc. 163, 51–64 (1991)
Zurück zum Zitat K.-R. Peters: Penning sputtering of ultra thin metal films for high resolution electron microscopy, Scanning Electron Microsc. I, 143 (1980) K.-R. Peters: Penning sputtering of ultra thin metal films for high resolution electron microscopy, Scanning Electron Microsc. I, 143 (1980)
Zurück zum Zitat A.M. Glauert (Ed.): Practical Methods in Electron Microscopy (North-Holland, Amsterdam 1973) A.M. Glauert (Ed.): Practical Methods in Electron Microscopy (North-Holland, Amsterdam 1973)
Zurück zum Zitat W. Hauffe: Development of the surface topography on polycrystalline metals by ion bombardment investigated by scanning electron microscopy, Phys. Status Solidi (a) 4, 111 (1971) W. Hauffe: Development of the surface topography on polycrystalline metals by ion bombardment investigated by scanning electron microscopy, Phys. Status Solidi (a) 4, 111 (1971)
Zurück zum Zitat W. Hauffe: Ion bombardment experiments. In: In Situ Scanning Electron Microscopy in Materials Research, ed. by K. Wetzig, D. Schulze (Akademie, Berlin 1995) pp. 195–218 W. Hauffe: Ion bombardment experiments. In: In Situ Scanning Electron Microscopy in Materials Research, ed. by K. Wetzig, D. Schulze (Akademie, Berlin 1995) pp. 195–218
Zurück zum Zitat N. Reid, J.E. Beesely: Sectioning and Cryosectioning for Electron Microscopy, Practical Methods in Electron Microscopy, Vol. 13 (Elsevier, Amsterdam 1991) N. Reid, J.E. Beesely: Sectioning and Cryosectioning for Electron Microscopy, Practical Methods in Electron Microscopy, Vol. 13 (Elsevier, Amsterdam 1991)
Zurück zum Zitat H. Sitte: Process of ultrathin sectioning. In: The Science of Biological Specimen Preparation for Microscopy and Microanalysis (Scanning Electron Microscopy, Chicago 1984) pp. 97–104 H. Sitte: Process of ultrathin sectioning. In: The Science of Biological Specimen Preparation for Microscopy and Microanalysis (Scanning Electron Microscopy, Chicago 1984) pp. 97–104
Zurück zum Zitat H. Sitte: Advanced instrumentation and methodology related to cryoultramicrotomy: a review. In: The Science of Biological Specimen Preparation for Microscopy and Microanalysis, ed. by M. Malecki, G.M. Roomans (Scanning Microscopy International, Chicago 1996) pp. 387–466 H. Sitte: Advanced instrumentation and methodology related to cryoultramicrotomy: a review. In: The Science of Biological Specimen Preparation for Microscopy and Microanalysis, ed. by M. Malecki, G.M. Roomans (Scanning Microscopy International, Chicago 1996) pp. 387–466
Zurück zum Zitat W. Hauffe: Das Ionenstrahl-Böschungsschnitt-Verfahren, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 23, 305–310 (1990) W. Hauffe: Das Ionenstrahl-Böschungsschnitt-Verfahren, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 23, 305–310 (1990)
Zurück zum Zitat W. Hauffe, S. Pannicke, S. Däbritz, P. Schade: Combined application of ion beam slope cutting and SEM/EDX for investigation of the surface layer system on tungsten microwires after tribological treatment, Surf. Interface Anal. 34, 768 (2002) W. Hauffe, S. Pannicke, S. Däbritz, P. Schade: Combined application of ion beam slope cutting and SEM/EDX for investigation of the surface layer system on tungsten microwires after tribological treatment, Surf. Interface Anal. 34, 768 (2002)
Zurück zum Zitat N. Erdman, R. Campbell, S. Asahina: Precise SEM cross section polishing via argon beam milling, Microsc. Today 14(3), 22 (2006) N. Erdman, R. Campbell, S. Asahina: Precise SEM cross section polishing via argon beam milling, Microsc. Today 14(3), 22 (2006)
Zurück zum Zitat E.C.G. Kirk, R.A. McMahon, J.R.A. Cleaver, H. Ahmed: Scanning ion microscopy and microsectioning of electron beam recrystallized silicon on insulator devices, J. Vac. Sci. Technol. B 6, 1940 (1988) E.C.G. Kirk, R.A. McMahon, J.R.A. Cleaver, H. Ahmed: Scanning ion microscopy and microsectioning of electron beam recrystallized silicon on insulator devices, J. Vac. Sci. Technol. B 6, 1940 (1988)
Zurück zum Zitat K. Madl, A.L. Toth, A. Barna: p/n junction localization in integrated-circuits with scanning electron-microscope, Inst. Phys. Conf. Ser. 93, 65 (1988) K. Madl, A.L. Toth, A. Barna: p/n junction localization in integrated-circuits with scanning electron-microscope, Inst. Phys. Conf. Ser. 93, 65 (1988)
Zurück zum Zitat T. Ishitani, T. Yaguchi: Cross-sectional sample preparation by focused ion beam: A review of ion-sample interaction, Microsc. Res. Tech. 35, 320 (1996) T. Ishitani, T. Yaguchi: Cross-sectional sample preparation by focused ion beam: A review of ion-sample interaction, Microsc. Res. Tech. 35, 320 (1996)
Zurück zum Zitat M. Shibata: Cross section specimen preparation device using argon ion beam for SEM—Cross section polisher (CP) SM-09010, JEOL News 39(1), 28 (2004) M. Shibata: Cross section specimen preparation device using argon ion beam for SEM—Cross section polisher (CP) SM-09010, JEOL News 39(1), 28 (2004)
Zurück zum Zitat L.A. Giannuzzi, F.A. Stevie: Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Springer, New York 2005) L.A. Giannuzzi, F.A. Stevie: Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Springer, New York 2005)
Zurück zum Zitat P. Sudraud, P. Ballongue, E. Varoquaux, O. Avenel: Focused ion-beam milling of a submicrometer aperture for a hydrodynamic Josephson-effect experiment, J. Appl. Phys. 62, 2163 (1987) P. Sudraud, P. Ballongue, E. Varoquaux, O. Avenel: Focused ion-beam milling of a submicrometer aperture for a hydrodynamic Josephson-effect experiment, J. Appl. Phys. 62, 2163 (1987)
Zurück zum Zitat P. Gnauck, P. Hoffrogge, J. Greiser: New crossbeam inspection tool combining ultrahigh resolution FESEM and FIB, Microsc. Anal. 94(3), 11–13 (2003) P. Gnauck, P. Hoffrogge, J. Greiser: New crossbeam inspection tool combining ultrahigh resolution FESEM and FIB, Microsc. Anal. 94(3), 11–13 (2003)
Zurück zum Zitat P. Gnauck, U. Zeile, W. Rau, M. Schuhmann: Real time SEM imaging of FIB milling processes for extended accuracy in cross-sectioning and TEM preparation, Microsc. Microanal. 9(S3), 524 (2003) P. Gnauck, U. Zeile, W. Rau, M. Schuhmann: Real time SEM imaging of FIB milling processes for extended accuracy in cross-sectioning and TEM preparation, Microsc. Microanal. 9(S3), 524 (2003)
Zurück zum Zitat P.E. McGuinness: DualBeam focused ion beam technology, Scanning 25, 221 (2003) P.E. McGuinness: DualBeam focused ion beam technology, Scanning 25, 221 (2003)
Zurück zum Zitat L. Holzer, F. Indutnyi, P.H. Gasser, B. Munch, M. Wegmann: Three-dimensional analysis of porous BaTiO3 ceramics using FIB nanotomography, J. Microsc. 216, 84 (2004) L. Holzer, F. Indutnyi, P.H. Gasser, B. Munch, M. Wegmann: Three-dimensional analysis of porous BaTiO3 ceramics using FIB nanotomography, J. Microsc. 216, 84 (2004)
Zurück zum Zitat U. Sennhauser, P. Jacob, P. Gasser: Anwendung der FIB für Materialwissenschaft und Fehleranalyse, Prakt. Metallogr. 41, 199 (2004) U. Sennhauser, P. Jacob, P. Gasser: Anwendung der FIB für Materialwissenschaft und Fehleranalyse, Prakt. Metallogr. 41, 199 (2004)
Zurück zum Zitat R. Flindt: Biologie in Zahlen, 5th edn. (Spektrum, Berlin 2000) R. Flindt: Biologie in Zahlen, 5th edn. (Spektrum, Berlin 2000)
Zurück zum Zitat M. Milani, F.P. Pucillo, M. Ballerini, M. Camatini, M. Gualtieri, S. Martino: First evidence of tire debris characterization at the nanoscale by focused ion beam, Mater. Charact. 52, 283 (2004) M. Milani, F.P. Pucillo, M. Ballerini, M. Camatini, M. Gualtieri, S. Martino: First evidence of tire debris characterization at the nanoscale by focused ion beam, Mater. Charact. 52, 283 (2004)
Zurück zum Zitat N. Feder, R.L. Sidman: Methods and principles of fixation by freeze-substitution, J. Biophys. Biochem. Cytol. 4, 593 (1958) N. Feder, R.L. Sidman: Methods and principles of fixation by freeze-substitution, J. Biophys. Biochem. Cytol. 4, 593 (1958)
Zurück zum Zitat M.W. Hess: Of plants and other pets: Practical aspects of freeze-substitution and resin embedding, J. Microsc. 212, 44 (2003) M.W. Hess: Of plants and other pets: Practical aspects of freeze-substitution and resin embedding, J. Microsc. 212, 44 (2003)
Zurück zum Zitat E. Kellenberger, J. Kistler: The physics of specimen preparation. In: Unconventional Electron Microscopy for Molecular Structure Determination, Advances in Structure Research by Diffraction Methods, Vol. 3, ed. by W. Hoppe, R. Mason (Vieweg, Wiesbaden 1979) pp. 49–79 E. Kellenberger, J. Kistler: The physics of specimen preparation. In: Unconventional Electron Microscopy for Molecular Structure Determination, Advances in Structure Research by Diffraction Methods, Vol. 3, ed. by W. Hoppe, R. Mason (Vieweg, Wiesbaden 1979) pp. 49–79
Zurück zum Zitat E. Kellenberger, M. Häner, M. Wurtz: The wrapping phenomenon in air-dried and negatively stained preparations, Ultramicroscopy 9, 139 (1982) E. Kellenberger, M. Häner, M. Wurtz: The wrapping phenomenon in air-dried and negatively stained preparations, Ultramicroscopy 9, 139 (1982)
Zurück zum Zitat A.W. Robards, U.B. Sleytr: Low Temperature Methods in Biological Electron Microscopy, Vol. 10 (North-Holland, Amsterdam 1985) A.W. Robards, U.B. Sleytr: Low Temperature Methods in Biological Electron Microscopy, Vol. 10 (North-Holland, Amsterdam 1985)
Zurück zum Zitat M.J. Dykstra: Biological Electron Microscopy (Plenum, New York 1992) M.J. Dykstra: Biological Electron Microscopy (Plenum, New York 1992)
Zurück zum Zitat E. Kellenberger, R. Johansen, M. Maeder, B. Bohrmann, E. Stauffer, W. Villiger: Artefacts and morphological changes during chemical fixation, J. Microsc. 168, 181 (1992) E. Kellenberger, R. Johansen, M. Maeder, B. Bohrmann, E. Stauffer, W. Villiger: Artefacts and morphological changes during chemical fixation, J. Microsc. 168, 181 (1992)
Zurück zum Zitat N.J. Severs, D.M. Shotton (Eds.): Rapid Freezing, Freeze Fracture and Deep Etching (Wiley, Chichester 1995) N.J. Severs, D.M. Shotton (Eds.): Rapid Freezing, Freeze Fracture and Deep Etching (Wiley, Chichester 1995)
Zurück zum Zitat P. Walther: Recent progress in freeze-fracturing of high-pressure frozen samples, J. Microsc. 212, 34 (2003) P. Walther: Recent progress in freeze-fracturing of high-pressure frozen samples, J. Microsc. 212, 34 (2003)
Zurück zum Zitat P. Echlin: The examination of biological material at low temperatures, Scanning Electron Microsc. 1, 225 (1971) P. Echlin: The examination of biological material at low temperatures, Scanning Electron Microsc. 1, 225 (1971)
Zurück zum Zitat R. Hermann, M. Müller: Progress in scanning electron microscopy of frozen-hydrated biological specimens, Scanning Microsc. 7, 343 (1993) R. Hermann, M. Müller: Progress in scanning electron microscopy of frozen-hydrated biological specimens, Scanning Microsc. 7, 343 (1993)
Zurück zum Zitat P. Walther, M. Müller: Biological ultrastructure as revealed by high resolution cryo-SEM of block faces after cryo-sectioning, J. Microsc. 196, 279 (1999) P. Walther, M. Müller: Biological ultrastructure as revealed by high resolution cryo-SEM of block faces after cryo-sectioning, J. Microsc. 196, 279 (1999)
Zurück zum Zitat S.P. Shea: Energy and atomic number dependence of electron depth-dose and lateral-dose functions. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 145–151 S.P. Shea: Energy and atomic number dependence of electron depth-dose and lateral-dose functions. In: Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, ed. by D.F. Kyser, H. Niedrig, D.E. Newbury, R. Shimizu (Scanning Electron Microscopy, Chicago 1984) pp. 145–151
Zurück zum Zitat R.O. Bolt, J.G. Carroll (Eds.): Radiation Effects on Organic Materials (Academic Press, New York 1963) R.O. Bolt, J.G. Carroll (Eds.): Radiation Effects on Organic Materials (Academic Press, New York 1963)
Zurück zum Zitat M. Dole (Ed.): The Radiation Chemistry of Macromolecules (Academic Press, New York 1973) M. Dole (Ed.): The Radiation Chemistry of Macromolecules (Academic Press, New York 1973)
Zurück zum Zitat W. Baumeister, M. Hahn, J. Seredynski, L.M. Herbertz: Radiation damage of proteins in the solid state: Changes of amino acid composition in catalase, Ultramicroscopy 1, 377 (1976) W. Baumeister, M. Hahn, J. Seredynski, L.M. Herbertz: Radiation damage of proteins in the solid state: Changes of amino acid composition in catalase, Ultramicroscopy 1, 377 (1976)
Zurück zum Zitat R.F. Egerton: Electron-Energy-Loss Spectroscopy in the Electron Microscope, 2nd edn. (Plenum, New York 1989) R.F. Egerton: Electron-Energy-Loss Spectroscopy in the Electron Microscope, 2nd edn. (Plenum, New York 1989)
Zurück zum Zitat R.F. Egerton: Dose-rate dependence of electron-induced mass loss from organic specimens, Ultramicroscopy 80, 247 (1999) R.F. Egerton: Dose-rate dependence of electron-induced mass loss from organic specimens, Ultramicroscopy 80, 247 (1999)
Zurück zum Zitat R.F. Egerton, P.A. Crozier, P. Rice: Electron energy-loss spectroscopy and chemical change, Ultramicroscopy 23, 305 (1987) R.F. Egerton, P.A. Crozier, P. Rice: Electron energy-loss spectroscopy and chemical change, Ultramicroscopy 23, 305 (1987)
Zurück zum Zitat A. Engel: Beam damage, contamination and etching. In: Microsc. Électron. Sci. Matér., Bombannes, ed. by B. Jouffrey, A. Bourret, C. Colliex (CNRS, Toulouse 1983) pp. 185–192 A. Engel: Beam damage, contamination and etching. In: Microsc. Électron. Sci. Matér., Bombannes, ed. by B. Jouffrey, A. Bourret, C. Colliex (CNRS, Toulouse 1983) pp. 185–192
Zurück zum Zitat K. Siangchaew, M. Libera: The influence of fast secondary electrons on the aromatic structure of polystyrene, Philos. Mag. A 80, 1001 (2000) K. Siangchaew, M. Libera: The influence of fast secondary electrons on the aromatic structure of polystyrene, Philos. Mag. A 80, 1001 (2000)
Zurück zum Zitat J. Strane, L.D. Marks, D.E. Luzzi, M.I. Buckett, J.P. Zhang, B.W. Wessels: Encapsulation, diffusion and DIET in the electron microscope, Ultramicroscopy 25, 253 (1988) J. Strane, L.D. Marks, D.E. Luzzi, M.I. Buckett, J.P. Zhang, B.W. Wessels: Encapsulation, diffusion and DIET in the electron microscope, Ultramicroscopy 25, 253 (1988)
Zurück zum Zitat S.M. Salih, V.E. Cosslett: Reduction in electron irradiation damage to organic compounds by conducting coatings, Philos. Mag.: J. Theor. Exp. Appl. Phys. 30(1), 225–228 (1974) S.M. Salih, V.E. Cosslett: Reduction in electron irradiation damage to organic compounds by conducting coatings, Philos. Mag.: J. Theor. Exp. Appl. Phys. 30(1), 225–228 (1974)
Zurück zum Zitat J.T. Fourie: A theory of surface origination contamination and a method for its elimination, Scanning Electron Microsc. 2, 87 (1979) J.T. Fourie: A theory of surface origination contamination and a method for its elimination, Scanning Electron Microsc. 2, 87 (1979)
Zurück zum Zitat J.S. Wall: Contamination in the STEM at ultra high vacuum, Scanning Electron Microsc. 1, 99 (1980) J.S. Wall: Contamination in the STEM at ultra high vacuum, Scanning Electron Microsc. 1, 99 (1980)
Zurück zum Zitat M.T. Postek: Immunolabelling for electron microscopy, Scanning 18, 269 (1996) M.T. Postek: Immunolabelling for electron microscopy, Scanning 18, 269 (1996)
Zurück zum Zitat M. Isaacson, D. Kopf, M. Ohtsuki, M. Utlaut: Contamination as a psychological problem, Ultramicroscopy 4, 97 (1979) M. Isaacson, D. Kopf, M. Ohtsuki, M. Utlaut: Contamination as a psychological problem, Ultramicroscopy 4, 97 (1979)
Zurück zum Zitat L.-M. Peng, Q. Chen, X.L. Liang, S. Gao, J.Y. Wang, S. Kleindiek, S.W. Tai: Performing probe experiments in the SEM, Micron 35, 495 (2004) L.-M. Peng, Q. Chen, X.L. Liang, S. Gao, J.Y. Wang, S. Kleindiek, S.W. Tai: Performing probe experiments in the SEM, Micron 35, 495 (2004)
Zurück zum Zitat A. Boyde: Improved depth of field in the ‘scanning' electron microscope derived from through-focus image stacks, Scanning 26, 265 (2004) A. Boyde: Improved depth of field in the ‘scanning' electron microscope derived from through-focus image stacks, Scanning 26, 265 (2004)
Zurück zum Zitat G. Pfefferkorn, M. Pfautsch: Präparation biologischer Objekte für die Raster‑Elektronenmikroskopie, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 4, 137–157 (1971) G. Pfefferkorn, M. Pfautsch: Präparation biologischer Objekte für die Raster‑Elektronenmikroskopie, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 4, 137–157 (1971)
Zurück zum Zitat A. Rukosujew, R. Reichelt, A.M. Fabricius, G. Drees, T.T.D. Tjan, M. Rothen-Burger, A. Hoffmeier, H.H. Scheld, C. Schmid: Skeletonization versus pedicle preparation of the radial artery with and without the ultrasonic scalpel, Ann. Thorac. Surg. 77, 120 (2004) A. Rukosujew, R. Reichelt, A.M. Fabricius, G. Drees, T.T.D. Tjan, M. Rothen-Burger, A. Hoffmeier, H.H. Scheld, C. Schmid: Skeletonization versus pedicle preparation of the radial artery with and without the ultrasonic scalpel, Ann. Thorac. Surg. 77, 120 (2004)
Zurück zum Zitat H. Ishikawa, H. Dobashi, T. Kodama, T. Furuhashi, Y. Uchikawa: Investigation of micro mechanical vibration of piezoelectric actuators. Using a stroboscopic SEM, J. Electron Microsc. 42, 35 (1993) H. Ishikawa, H. Dobashi, T. Kodama, T. Furuhashi, Y. Uchikawa: Investigation of micro mechanical vibration of piezoelectric actuators. Using a stroboscopic SEM, J. Electron Microsc. 42, 35 (1993)
Zurück zum Zitat S. Aoyagi: JEOL’s challenge to nanotechnology, JEOL News 37, 70 (2002) S. Aoyagi: JEOL’s challenge to nanotechnology, JEOL News 37, 70 (2002)
Zurück zum Zitat J.L. Hernandez-Lopez, R.E. Bauer, W.S. Chang, G. Glasser, D. Grebel-Koehler, M. Klapper, M. Kreiter, J. Leclaire, J.P. Majoral, S. Mittler, K. Mullen, K. Vasilev, T. Weil, J. Wu, T. Zhu, W. Knoll: Functional polymers as nanoscopic building blocks, Mater. Sci. Eng. C 23, 267 (2003) J.L. Hernandez-Lopez, R.E. Bauer, W.S. Chang, G. Glasser, D. Grebel-Koehler, M. Klapper, M. Kreiter, J. Leclaire, J.P. Majoral, S. Mittler, K. Mullen, K. Vasilev, T. Weil, J. Wu, T. Zhu, W. Knoll: Functional polymers as nanoscopic building blocks, Mater. Sci. Eng. C 23, 267 (2003)
Zurück zum Zitat B. Khamsehpour, S.T. Davies: Micromachining of semi-conductor materials by focused ion beams, Vacuum 45, 1169 (2004) B. Khamsehpour, S.T. Davies: Micromachining of semi-conductor materials by focused ion beams, Vacuum 45, 1169 (2004)
Zurück zum Zitat K.D. Micheva, S.J. Smith: Array tomography: A new tool for imaging the molecular architecture and ultrastructure of neural circuits, Neuron 55, 25 (2007) K.D. Micheva, S.J. Smith: Array tomography: A new tool for imaging the molecular architecture and ultrastructure of neural circuits, Neuron 55, 25 (2007)
Zurück zum Zitat W. Denk, H. Horstmann: Serial block-face scanning electron microscopy to reconstruct three-dimensional tissue nanostructure, PLoS Biol. 2, e329 (2004) W. Denk, H. Horstmann: Serial block-face scanning electron microscopy to reconstruct three-dimensional tissue nanostructure, PLoS Biol. 2, e329 (2004)
Zurück zum Zitat D.W. Tuggle, L.W. Swanson: Emission characteristics of the ZrO/W thermal field electron source, J. Vac. Sci. Technol. B 3, 220 (1985) D.W. Tuggle, L.W. Swanson: Emission characteristics of the ZrO/W thermal field electron source, J. Vac. Sci. Technol. B 3, 220 (1985)
Zurück zum Zitat T. Mulvey: Electron lenses, Scanning Electron Microsc. 1, 43 (1974) T. Mulvey: Electron lenses, Scanning Electron Microsc. 1, 43 (1974)
Zurück zum Zitat Hitachi: The S-5200 Ultra-High Resolution Field Emission SEM: Features and Some Applications, Technical Data Sheet No. 98, HTD-E050-01 2001.11 (Hitachi, Tokyo 2001) Hitachi: The S-5200 Ultra-High Resolution Field Emission SEM: Features and Some Applications, Technical Data Sheet No. 98, HTD-E050-01 2001.11 (Hitachi, Tokyo 2001)
Zurück zum Zitat K.-R. Peters: Conditions required for high quality high magnification images in secondary electron, Scanning Electron Microsc. 4, 1359 (1982) K.-R. Peters: Conditions required for high quality high magnification images in secondary electron, Scanning Electron Microsc. 4, 1359 (1982)
Zurück zum Zitat D.C. Joy: Monte Carlo studies of high-resolution secondary imaging. In: Microbeam Analysis, ed. by A.D. Romig Jr., J.I. Goldstein (San Francisco Press, San Francisco 1984) pp. 81–86 D.C. Joy: Monte Carlo studies of high-resolution secondary imaging. In: Microbeam Analysis, ed. by A.D. Romig Jr., J.I. Goldstein (San Francisco Press, San Francisco 1984) pp. 81–86
Zurück zum Zitat R. Hermann, H. Schwarz, M. Müller: High precision immunoscanning electron microscopy using Fab fragments coupled to ultra-small colloidal gold, J. Struct. Biol. 107, 38 (1991) R. Hermann, H. Schwarz, M. Müller: High precision immunoscanning electron microscopy using Fab fragments coupled to ultra-small colloidal gold, J. Struct. Biol. 107, 38 (1991)
Zurück zum Zitat W. Baumeister, F. Karrenberg, R. Rachel, A. Engel, B. ten Heggeler, W.O. Saxton: The major cell envelope protein of Micrococcus radiodurans (R1): Structural and chemical characterization, Eur. J. Biochem. 125, 535 (1982) W. Baumeister, F. Karrenberg, R. Rachel, A. Engel, B. ten Heggeler, W.O. Saxton: The major cell envelope protein of Micrococcus radiodurans (R1): Structural and chemical characterization, Eur. J. Biochem. 125, 535 (1982)
Zurück zum Zitat R. Reichelt: Rasterelektronenmikroskopie und Röntgenmikroanalyse. In: Mikroskopie in Forschung und Praxis, ed. by H. Robenek (GIT, Darmstadt 1995) pp. 185–217 R. Reichelt: Rasterelektronenmikroskopie und Röntgenmikroanalyse. In: Mikroskopie in Forschung und Praxis, ed. by H. Robenek (GIT, Darmstadt 1995) pp. 185–217
Zurück zum Zitat G. Griffith: Fine Structure Immunocytochemistry (Springer, Berlin 1993) G. Griffith: Fine Structure Immunocytochemistry (Springer, Berlin 1993)
Zurück zum Zitat M.A. Hayat (Ed.): Colloidal Gold. Principles, Methods, and Applications, Vol. 1 (Academic Press, London 1989) M.A. Hayat (Ed.): Colloidal Gold. Principles, Methods, and Applications, Vol. 1 (Academic Press, London 1989)
Zurück zum Zitat M.A. Hayat (Ed.): Microscopy, Immunohistochemistry, and Antigen Retrieval Methods: For Light and Electron Microscopy (Kluwer Academic/Plenum, New York 2002) M.A. Hayat (Ed.): Microscopy, Immunohistochemistry, and Antigen Retrieval Methods: For Light and Electron Microscopy (Kluwer Academic/Plenum, New York 2002)
Zurück zum Zitat A. Verkleij, J. Leunissen: Immunogold Labelling in Cell Biology (CRC, Boca Raton 1989) A. Verkleij, J. Leunissen: Immunogold Labelling in Cell Biology (CRC, Boca Raton 1989)
Zurück zum Zitat E. de Harven, R. Leung, H. Christensen: A novel approach for scanning electron microscopy of colloidal gold-labeled cell surfaces, J. Cell Biol. 99, 53 (1984) E. de Harven, R. Leung, H. Christensen: A novel approach for scanning electron microscopy of colloidal gold-labeled cell surfaces, J. Cell Biol. 99, 53 (1984)
Zurück zum Zitat H. Gamliel, A. Polliack: The use of scanning immuno-electron microscopy to detect surface membrane immunoglobulins and antigens on normal and leukemic human leukocytes: Current status, Scanning Electron Microsc. 2, 929 (1983) H. Gamliel, A. Polliack: The use of scanning immuno-electron microscopy to detect surface membrane immunoglobulins and antigens on normal and leukemic human leukocytes: Current status, Scanning Electron Microsc. 2, 929 (1983)
Zurück zum Zitat D. Hicks, R.S. Molday: Analysis of cell labelling for scanning and transmission electron microscopy. In: The Science of Biological Specimen Preparation for Microscopy and Microanalysis, ed. by J.-P. Revel, T. Barnard, C.H. Haggis (Scanning Electron Microscopy, Chicago 1984) pp. 203–220 D. Hicks, R.S. Molday: Analysis of cell labelling for scanning and transmission electron microscopy. In: The Science of Biological Specimen Preparation for Microscopy and Microanalysis, ed. by J.-P. Revel, T. Barnard, C.H. Haggis (Scanning Electron Microscopy, Chicago 1984) pp. 203–220
Zurück zum Zitat R.S. Molday, P. Maher: A review of cell surface markers and labelling techniques for scanning electron microscopy, Histochem. J. 12, 273 (1980) R.S. Molday, P. Maher: A review of cell surface markers and labelling techniques for scanning electron microscopy, Histochem. J. 12, 273 (1980)
Zurück zum Zitat P. Walther, M. Müller: Detection of small (5--15 nm) gold-labelled surface antigens by back-scattered electrons. In: 43rd Annu. Meet. Electron Microsc. Soc. Am, ed. by G.W. Bailey (San Francisco Press, San Francisco 1985) pp. 538–541 P. Walther, M. Müller: Detection of small (5--15 nm) gold-labelled surface antigens by back-scattered electrons. In: 43rd Annu. Meet. Electron Microsc. Soc. Am, ed. by G.W. Bailey (San Francisco Press, San Francisco 1985) pp. 538–541
Zurück zum Zitat P. Walther, M. Müller: Detection of small (5--15 nm) gold-labelled surface antigens by back-scattered electrons. In: Science of Biological Specimen Preparation, ed. by M. Müller, R.P. Becker, A. Boyde, J.J. Wolosewick (Scanning Electron Microscopy, Chicago 1986) pp. 195–201 P. Walther, M. Müller: Detection of small (5--15 nm) gold-labelled surface antigens by back-scattered electrons. In: Science of Biological Specimen Preparation, ed. by M. Müller, R.P. Becker, A. Boyde, J.J. Wolosewick (Scanning Electron Microscopy, Chicago 1986) pp. 195–201
Zurück zum Zitat T. Ushiki, R. Yui, T. Fujita: Immunohistochemical localization of serotonin in the third ventricular wall of the lamprey, using backscattered electron imaging, J. Electron Microsc. 35, 157 (1986) T. Ushiki, R. Yui, T. Fujita: Immunohistochemical localization of serotonin in the third ventricular wall of the lamprey, using backscattered electron imaging, J. Electron Microsc. 35, 157 (1986)
Zurück zum Zitat R.M. Albrecht, S.R. Simmons, J.R. Prudent, C.M. Erickson: High resolution SEM of colloidal gold labels. In: Proc. 46th Annu. Meet. Electron Microsc. Soc. Am, ed. by G.W. Bailey (San Francisco Press, San Francisco 1988) pp. 214–217 R.M. Albrecht, S.R. Simmons, J.R. Prudent, C.M. Erickson: High resolution SEM of colloidal gold labels. In: Proc. 46th Annu. Meet. Electron Microsc. Soc. Am, ed. by G.W. Bailey (San Francisco Press, San Francisco 1988) pp. 214–217
Zurück zum Zitat P. Hirsch, M. Kässens, L. Reimer, R. Senkel, M. Spranck: Contrast of colloidal gold particles and thin films on a silicon substrate observed by backscattered electrons in a low-voltage scanning electron microscope, Ultramicroscopy 50, 263 (1993) P. Hirsch, M. Kässens, L. Reimer, R. Senkel, M. Spranck: Contrast of colloidal gold particles and thin films on a silicon substrate observed by backscattered electrons in a low-voltage scanning electron microscope, Ultramicroscopy 50, 263 (1993)
Zurück zum Zitat S.R. Simmons, J.B. Pawley, R.M. Albrecht: Optimizing parameters for correlative immunogold localization by video-enhanced light microscopy, high-voltage transmission electron microscopy, and field emission scanning electron microscopy, J. Histochem. Cytochem. 38, 1781 (1990) S.R. Simmons, J.B. Pawley, R.M. Albrecht: Optimizing parameters for correlative immunogold localization by video-enhanced light microscopy, high-voltage transmission electron microscopy, and field emission scanning electron microscopy, J. Histochem. Cytochem. 38, 1781 (1990)
Zurück zum Zitat W. Baschong, N.G. Wrigley: Colloidal gold conjugated to Fab fragments or to immunoglobulin G as high resolution labels for immunoelectron microscopy, J. Electron Microsc. Tech. 14, 313 (1990) W. Baschong, N.G. Wrigley: Colloidal gold conjugated to Fab fragments or to immunoglobulin G as high resolution labels for immunoelectron microscopy, J. Electron Microsc. Tech. 14, 313 (1990)
Zurück zum Zitat M. Müller, R. Hermann: Towards high resolution SEM of biological objects, Hitachi Instrum. News 19, 50 (1990) M. Müller, R. Hermann: Towards high resolution SEM of biological objects, Hitachi Instrum. News 19, 50 (1990)
Zurück zum Zitat R.P. Apkarian, D.C. Joy: Analysis of metal films suitable for high-resolution SE-I microscopy. In: Microbeam Analysis, ed. by D.E. Newbury (San Francisco Press, San Francisco 1988) pp. 459–462 R.P. Apkarian, D.C. Joy: Analysis of metal films suitable for high-resolution SE-I microscopy. In: Microbeam Analysis, ed. by D.E. Newbury (San Francisco Press, San Francisco 1988) pp. 459–462
Zurück zum Zitat S.L. Erlandsen, R.D. Nelson, S.R. Hasslen, G.M. Dunney, S.B. Olmsted, C. Frethem, C.L. Wells: High resolution. FESEM: Application of backscatter electron (BSE) imaging for biological samples, Hitachi Instrum. News 27, 10 (1995) S.L. Erlandsen, R.D. Nelson, S.R. Hasslen, G.M. Dunney, S.B. Olmsted, C. Frethem, C.L. Wells: High resolution. FESEM: Application of backscatter electron (BSE) imaging for biological samples, Hitachi Instrum. News 27, 10 (1995)
Zurück zum Zitat M. Grote, V. Mahler, S. Spitzauer, T. Fuchs, R. Valenta, R. Reichelt: In situ localization of latex allergens in 3 different brands of latex gloves by means of immunogold field emission scanning and transmission electron microscopy, J. Allergy Clin. Immunol. 105, 561 (2000) M. Grote, V. Mahler, S. Spitzauer, T. Fuchs, R. Valenta, R. Reichelt: In situ localization of latex allergens in 3 different brands of latex gloves by means of immunogold field emission scanning and transmission electron microscopy, J. Allergy Clin. Immunol. 105, 561 (2000)
Zurück zum Zitat M. Müller, R. Hermann: High resolution SEM‑immunocytochemistry. In: 10th Eur. Congr. Electron Microsc., Vol. 3, ed. by L. Megías-Megías, M.I. Rodríguez-García, A. Ríos, J.M. Arias (Secretariado de Publicaciones de la Universidad de Granada, Granada 1992) pp. 741–742 M. Müller, R. Hermann: High resolution SEM‑immunocytochemistry. In: 10th Eur. Congr. Electron Microsc., Vol. 3, ed. by L. Megías-Megías, M.I. Rodríguez-García, A. Ríos, J.M. Arias (Secretariado de Publicaciones de la Universidad de Granada, Granada 1992) pp. 741–742
Zurück zum Zitat H. Ris, M. Malecki: High-resolution field emission scanning electron microscope imaging of internal cell structures after Epon extraction from sections: A new approach to correlative ultrastructural and immunocytochemical studies, J. Struct. Biol. 111, 148 (1993) H. Ris, M. Malecki: High-resolution field emission scanning electron microscope imaging of internal cell structures after Epon extraction from sections: A new approach to correlative ultrastructural and immunocytochemical studies, J. Struct. Biol. 111, 148 (1993)
Zurück zum Zitat J. Yamaguchi, M. Shibano, T. Saito: Immuno-scanning electron microscopic study of cytoskeletons and actin-binding proteins on phagocytosis of zymosans in mouse macrophages by using double marking method. In: 13th Int. Congr. Electron Microsc, Vol. 3A, ed. by B. Jouffrey, C. Colliex (Les Editions de Physique, Les Ulis 1994) pp. 43–44 J. Yamaguchi, M. Shibano, T. Saito: Immuno-scanning electron microscopic study of cytoskeletons and actin-binding proteins on phagocytosis of zymosans in mouse macrophages by using double marking method. In: 13th Int. Congr. Electron Microsc, Vol. 3A, ed. by B. Jouffrey, C. Colliex (Les Editions de Physique, Les Ulis 1994) pp. 43–44
Zurück zum Zitat P. Walther, E. Wehrli, R. Hermann, M. Müller: Double-layer coating for high-resolution low-temperature scanning electron ‘microscopy', J. Microsc. 179, 229 (1995) P. Walther, E. Wehrli, R. Hermann, M. Müller: Double-layer coating for high-resolution low-temperature scanning electron ‘microscopy', J. Microsc. 179, 229 (1995)
Zurück zum Zitat M. Suga, S. Asahina, Y. Sakuda, H. Kazumori, H. Nishiyama, T. Nokuo, V. Alfredsson, T. Kjellman, S.M. Stevens, H.S. Cho, M. Cho, L. Han, S. Che, M.W. Anderson, F. Schüth, H. Deng, O.M. Yaghi, Z. Liu, H.Y. Jeong, A. Stein, K. Sakamoto, R. Ryoo, O. Terasaki: Recent ‘progress' in scanning electron microscopy for the characterization of fine structural details of nano materials, Prog. Solid State Chem. 42, 1 (2014) M. Suga, S. Asahina, Y. Sakuda, H. Kazumori, H. Nishiyama, T. Nokuo, V. Alfredsson, T. Kjellman, S.M. Stevens, H.S. Cho, M. Cho, L. Han, S. Che, M.W. Anderson, F. Schüth, H. Deng, O.M. Yaghi, Z. Liu, H.Y. Jeong, A. Stein, K. Sakamoto, R. Ryoo, O. Terasaki: Recent ‘progress' in scanning electron microscopy for the characterization of fine structural details of nano materials, Prog. Solid State Chem. 42, 1 (2014)
Zurück zum Zitat B. Fruhstorfer, V. Mohles, R. Reichelt, E. Nembach: Quantitative characterisation of second phase particles by atomic force microscopy (AFM) and scanning electron microscopy (SEM), Philos. Mag. A 82, 2575 (2002) B. Fruhstorfer, V. Mohles, R. Reichelt, E. Nembach: Quantitative characterisation of second phase particles by atomic force microscopy (AFM) and scanning electron microscopy (SEM), Philos. Mag. A 82, 2575 (2002)
Zurück zum Zitat E. Nembach: Particle Strengthening of Metals and Alloys (Wiley, New York 1996) E. Nembach: Particle Strengthening of Metals and Alloys (Wiley, New York 1996)
Zurück zum Zitat E.J. Anglin, M.P. Schwartz, V.P. Ng, L.A. Perelman, M.J. Sailor: Engineering the chemistry and nanostructure of porous silicon Fabry-Pérot films for loading and release of a steroid, Langmuir 20, 11264 (2004) E.J. Anglin, M.P. Schwartz, V.P. Ng, L.A. Perelman, M.J. Sailor: Engineering the chemistry and nanostructure of porous silicon Fabry-Pérot films for loading and release of a steroid, Langmuir 20, 11264 (2004)
Zurück zum Zitat A.C. Galca, E.S. Kooij, H. Wormeester, C. Salm, V. Leca, J.H. Rector, B. Poelsema: Structural and optical characterization of porous anodic aluminum oxide, J. Appl. Phys. 94, 4296 (2003) A.C. Galca, E.S. Kooij, H. Wormeester, C. Salm, V. Leca, J.H. Rector, B. Poelsema: Structural and optical characterization of porous anodic aluminum oxide, J. Appl. Phys. 94, 4296 (2003)
Zurück zum Zitat H. Pan, H. Gao, S.H. Lim, Y.P. Feng, J. Lin: Highly ordered carbon nanotubes based on porous aluminum oxide, J. Nanosci. Nanotechnol. 4, 1014 (2004) H. Pan, H. Gao, S.H. Lim, Y.P. Feng, J. Lin: Highly ordered carbon nanotubes based on porous aluminum oxide, J. Nanosci. Nanotechnol. 4, 1014 (2004)
Zurück zum Zitat Y. Yamazaki: Application of MEMS technology to micro fuel cells, Electrochim. Acta 50, 663 (2004) Y. Yamazaki: Application of MEMS technology to micro fuel cells, Electrochim. Acta 50, 663 (2004)
Zurück zum Zitat Y.C. Zhao, M. Chen, Y.N. Zhang, T. Xu, W.M. Liu: A facile approach to formation of through-hole porous anodic aluminum oxide film, Mater. Lett. 59, 40 (2005) Y.C. Zhao, M. Chen, Y.N. Zhang, T. Xu, W.M. Liu: A facile approach to formation of through-hole porous anodic aluminum oxide film, Mater. Lett. 59, 40 (2005)
Zurück zum Zitat Z.X. Zhao, R.Q. Cui, F.Y. Meng, Z.B. Zhou, H.C. Yu, T.T. Sun: Nanocrystalline silicon thin films deposited by high-frequency sputtering at low temperature, Solar Energy Mater. Solar Cells 86, 135–144 (2005) Z.X. Zhao, R.Q. Cui, F.Y. Meng, Z.B. Zhou, H.C. Yu, T.T. Sun: Nanocrystalline silicon thin films deposited by high-frequency sputtering at low temperature, Solar Energy Mater. Solar Cells 86, 135–144 (2005)
Zurück zum Zitat A. Engel: Molecular weight determination by scanning transmission electron microscopy, Ultramicroscopy 3, 273 (1978) A. Engel: Molecular weight determination by scanning transmission electron microscopy, Ultramicroscopy 3, 273 (1978)
Zurück zum Zitat J.S. Wall: Mass measurement in electron microscope, Scanning Electron Microsc. 2, 291 (1979) J.S. Wall: Mass measurement in electron microscope, Scanning Electron Microsc. 2, 291 (1979)
Zurück zum Zitat R. Reichelt, A. Engel, U. Aebi: Adaptation of an annular dark field detector capable of single-electron counting to a high resolution field emission scanning electron microscopy. In: Proc. 9th Eur. Congr. Electron Microsc., ed. by H.G. Dickinson, P.J. Goodhew (IOP, York 1988) pp. 33–34 R. Reichelt, A. Engel, U. Aebi: Adaptation of an annular dark field detector capable of single-electron counting to a high resolution field emission scanning electron microscopy. In: Proc. 9th Eur. Congr. Electron Microsc., ed. by H.G. Dickinson, P.J. Goodhew (IOP, York 1988) pp. 33–34
Zurück zum Zitat D.C. Bell, M. Mankin, R.W. Day, N. Erdman: Successful application of low voltage electron microscopy to practical materials problems, Ultramicroscopy 145, 56–65 (2014) D.C. Bell, M. Mankin, R.W. Day, N. Erdman: Successful application of low voltage electron microscopy to practical materials problems, Ultramicroscopy 145, 56–65 (2014)
Zurück zum Zitat S.A. Müller, A. Engel: Structure and mass analysis by scanning transmission electron microscopy, Micron 32, 21 (2001) S.A. Müller, A. Engel: Structure and mass analysis by scanning transmission electron microscopy, Micron 32, 21 (2001)
Zurück zum Zitat M. Nagase, K. Kurihara: Imaging of Si nano-patterns embedded in SiO2 using scanning electron microscopy, Microelectron. Eng. 53, 57 (2000) M. Nagase, K. Kurihara: Imaging of Si nano-patterns embedded in SiO2 using scanning electron microscopy, Microelectron. Eng. 53, 57 (2000)
Zurück zum Zitat M. Nagase, H. Namatsu: A method for assembling nano-electromechanical devices on microcantilevers using focused ion beam technology, Jpn. J. Appl. Phys. 43, 4624 (2004) M. Nagase, H. Namatsu: A method for assembling nano-electromechanical devices on microcantilevers using focused ion beam technology, Jpn. J. Appl. Phys. 43, 4624 (2004)
Zurück zum Zitat D.C. Joy: Control of charging in low-voltage SEM, Scanning 11, 1 (1989) D.C. Joy: Control of charging in low-voltage SEM, Scanning 11, 1 (1989)
Zurück zum Zitat R. Schmid, K.H. Gaukler, H. Seiler: Measurement of elastically reflected electrons (E\(<2.5\) keV) for imaging of surfaces in a simple ultra high vacuum ‘scanning electron microscope', Scanning Electron Microsc. 2, 501 (1983) R. Schmid, K.H. Gaukler, H. Seiler: Measurement of elastically reflected electrons (E\(<2.5\) keV) for imaging of surfaces in a simple ultra high vacuum ‘scanning electron microscope', Scanning Electron Microsc. 2, 501 (1983)
Zurück zum Zitat I. Müllerová, L. Frank, O. Hutar: Visualization of the energy band contrast in SEM through low-energy electron reflectance, Scanning 23, 115 (2001) I. Müllerová, L. Frank, O. Hutar: Visualization of the energy band contrast in SEM through low-energy electron reflectance, Scanning 23, 115 (2001)
Zurück zum Zitat D.C. Joy: Low voltage scanning electron microscopy. In: Electron Microscopy Microanalysis, Institute of Physics Conference Series, Vol. 90, ed. by J.N. Chapman, A.J. Craven (Institute of Physics, Bristol 1987) pp. 175–180 D.C. Joy: Low voltage scanning electron microscopy. In: Electron Microscopy Microanalysis, Institute of Physics Conference Series, Vol. 90, ed. by J.N. Chapman, A.J. Craven (Institute of Physics, Bristol 1987) pp. 175–180
Zurück zum Zitat R. Böngeler, U. Golla, M. Kässens, L. Reimer, B. Schindler, R. Senkel, M. Spranck: Electron-specimen interactions in LVSEM, Scanning 15, 1 (1993) R. Böngeler, U. Golla, M. Kässens, L. Reimer, B. Schindler, R. Senkel, M. Spranck: Electron-specimen interactions in LVSEM, Scanning 15, 1 (1993)
Zurück zum Zitat E.H. Darlington, V.E. Cosslett: Backscattering of 0.5–10 keV electrons from solid targets, J. Phys. D 5, 1969 (1972) E.H. Darlington, V.E. Cosslett: Backscattering of 0.5–10 keV electrons from solid targets, J. Phys. D 5, 1969 (1972)
Zurück zum Zitat B. Lödding, L. Reimer: Monte Carlo Rechnungen im Energiebereich 1--20 keV, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 14, 315 (1981) B. Lödding, L. Reimer: Monte Carlo Rechnungen im Energiebereich 1--20 keV, Beitr. Elektronenmikr. Direktabb. Anal. Oberfl. 14, 315 (1981)
Zurück zum Zitat S. Uno, K. Honda, N. Nakamura, M. Matsuya, J. Zach: Probe shape extraction and automatic aberration correction in scanning electron microscopes. In: 8th Asia-Pac. Conf. Electron Microsc. (Yoshida, Kanazawa 2004) pp. 46–47 S. Uno, K. Honda, N. Nakamura, M. Matsuya, J. Zach: Probe shape extraction and automatic aberration correction in scanning electron microscopes. In: 8th Asia-Pac. Conf. Electron Microsc. (Yoshida, Kanazawa 2004) pp. 46–47
Zurück zum Zitat H. Kazumori, K. Honda, M. Matsuya, M. Date, C. Nielsen: Field emission SEM with a spherical and chromatic aberration corrector, Microsc. Microanal. 10(S02), 1370–1371 (2004) H. Kazumori, K. Honda, M. Matsuya, M. Date, C. Nielsen: Field emission SEM with a spherical and chromatic aberration corrector, Microsc. Microanal. 10(S02), 1370–1371 (2004)
Zurück zum Zitat R.J. Young, G.N. van Veen, A. Henstra, L. Tuma: Extreme high-resolution (XHR) SEM using S beam monochromator. In: Low Voltage Electron Microscopy: Principles and Applications, ed. by D.C. Bell, N. Erdman (Wiley, Chichester 2013) pp. 57–71 R.J. Young, G.N. van Veen, A. Henstra, L. Tuma: Extreme high-resolution (XHR) SEM using S beam monochromator. In: Low Voltage Electron Microscopy: Principles and Applications, ed. by D.C. Bell, N. Erdman (Wiley, Chichester 2013) pp. 57–71
Zurück zum Zitat B. Lencová, M. Lenc: Computation of properties of electrostatic lenses, Optik 97, 121 (1994) B. Lencová, M. Lenc: Computation of properties of electrostatic lenses, Optik 97, 121 (1994)
Zurück zum Zitat B. Lencová: Electrostatic lenses. In: Handbook of Charged Particle Optics, ed. by J. Orloff (CRC, New York 1997) pp. 177–221 B. Lencová: Electrostatic lenses. In: Handbook of Charged Particle Optics, ed. by J. Orloff (CRC, New York 1997) pp. 177–221
Zurück zum Zitat R.S. Paden, W.C. Nixon: Retarding field scanning electron microscopy, J. Phys. E 2, 1073 (1968) R.S. Paden, W.C. Nixon: Retarding field scanning electron microscopy, J. Phys. E 2, 1073 (1968)
Zurück zum Zitat E. Munro, J. Orloff, R. Rutherford, J. Wallmark: High-resolution, low-energy beams by means of mirror optics, J. Vac. Sci. Technol. B 6, 1971 (1988) E. Munro, J. Orloff, R. Rutherford, J. Wallmark: High-resolution, low-energy beams by means of mirror optics, J. Vac. Sci. Technol. B 6, 1971 (1988)
Zurück zum Zitat I. Müllerová, M. Lenc: The scanning very low-energy electron microscope, Mikrochim. Acta 12, 173 (1992) I. Müllerová, M. Lenc: The scanning very low-energy electron microscope, Mikrochim. Acta 12, 173 (1992)
Zurück zum Zitat P. Adamec, A. Delong, B. Lencova: Miniature magnetic electron lenses with permanent magnets, J. Microsc. 179, 129 (1995) P. Adamec, A. Delong, B. Lencova: Miniature magnetic electron lenses with permanent magnets, J. Microsc. 179, 129 (1995)
Zurück zum Zitat A. Khursheed, J.C. Phang, J.T.L. Thong: A portable scanning electron microscope column design based on the use of permanent magnets, Scanning 20, 87 (1998) A. Khursheed, J.C. Phang, J.T.L. Thong: A portable scanning electron microscope column design based on the use of permanent magnets, Scanning 20, 87 (1998)
Zurück zum Zitat A. Khursheed: Recent developments in scanning electron microscope design, Rev. Sci. Instrum. 71, 1712 (2000) A. Khursheed: Recent developments in scanning electron microscope design, Rev. Sci. Instrum. 71, 1712 (2000)
Zurück zum Zitat T.H.P. Chang, D.P. Kern, L.P. Muray: Microminiaturization of electron optical systems, J. Vac. Sci. Technol. B 8, 1698 (1990) T.H.P. Chang, D.P. Kern, L.P. Muray: Microminiaturization of electron optical systems, J. Vac. Sci. Technol. B 8, 1698 (1990)
Zurück zum Zitat W. Liu, T. Ambe, R.F. Pease: Micro objective lens with compact secondary electron detector for miniature low voltage electron beam systems, J. Vac. Sci. Technol. B 14, 3738 (1996) W. Liu, T. Ambe, R.F. Pease: Micro objective lens with compact secondary electron detector for miniature low voltage electron beam systems, J. Vac. Sci. Technol. B 14, 3738 (1996)
Zurück zum Zitat E.W. Wollman, C.D. Frisbie, M.S. Wrighton: Scanning electron microscopy for imaging photopatterned, self-assembled monolayers on gold, Langmuir 9, 1517 (1993) E.W. Wollman, C.D. Frisbie, M.S. Wrighton: Scanning electron microscopy for imaging photopatterned, self-assembled monolayers on gold, Langmuir 9, 1517 (1993)
Zurück zum Zitat A.L. Bleloch, M.R. Castell, A. Howie, C.A. Walsh: Atomic and electronic Z-contrast effects in high-resolution imaging, Ultramicroscopy 54, 107 (1994) A.L. Bleloch, M.R. Castell, A. Howie, C.A. Walsh: Atomic and electronic Z-contrast effects in high-resolution imaging, Ultramicroscopy 54, 107 (1994)
Zurück zum Zitat D.D. Perovic, M.R. Castell, A. Howie, C. Lavoie, T. Tiedje, J.S.W. Cole: Doping layer imaging in the field emission scanning electron microscope. In: 13th Int. Congr. Electron Microsc., ed. by B. Jouffrey, C. Colliex (Les Editions de Physique, Les Ulis 1994) pp. 91–92 D.D. Perovic, M.R. Castell, A. Howie, C. Lavoie, T. Tiedje, J.S.W. Cole: Doping layer imaging in the field emission scanning electron microscope. In: 13th Int. Congr. Electron Microsc., ed. by B. Jouffrey, C. Colliex (Les Editions de Physique, Les Ulis 1994) pp. 91–92
Zurück zum Zitat T.R. Matzelle, N. Kruse, R. Reichelt: Characterization of the cutting edge of glass knives for ultramicrotomy by scanning force ‘microscopy' using cantilevers with a defined tip geometry, J. Microsc. 199, 239 (2000) T.R. Matzelle, N. Kruse, R. Reichelt: Characterization of the cutting edge of glass knives for ultramicrotomy by scanning force ‘microscopy' using cantilevers with a defined tip geometry, J. Microsc. 199, 239 (2000)
Zurück zum Zitat T.R. Matzelle, H. Gnaegi, A. Ricker, R. Reichelt: Characterization of the cutting edge of glass and diamond knives for ultramicrotomy by scanning force ‘microscopy' using cantilevers with a defined tip geometry, J. Microsc. 209, 113 (2003) T.R. Matzelle, H. Gnaegi, A. Ricker, R. Reichelt: Characterization of the cutting edge of glass and diamond knives for ultramicrotomy by scanning force ‘microscopy' using cantilevers with a defined tip geometry, J. Microsc. 209, 113 (2003)
Zurück zum Zitat R. Reichelt: Unpublished results (1997) R. Reichelt: Unpublished results (1997)
Zurück zum Zitat A. von Nahmen, M. Schenk, M. Sieber, M. Amrein: The structure of a model pulmonary surfactant as revealed by scanning force microscopy, Biophys. J. 72, 463 (1997) A. von Nahmen, M. Schenk, M. Sieber, M. Amrein: The structure of a model pulmonary surfactant as revealed by scanning force microscopy, Biophys. J. 72, 463 (1997)
Zurück zum Zitat A.G. Bittermann, S. Jacobi, L.F. Chi, H. Fuchs, R. Reichelt: Contrast studies on organic monolayers of different molecular packing in FESEM and their correlation with SFM data, Langmuir 17, 1872 (2001) A.G. Bittermann, S. Jacobi, L.F. Chi, H. Fuchs, R. Reichelt: Contrast studies on organic monolayers of different molecular packing in FESEM and their correlation with SFM data, Langmuir 17, 1872 (2001)
Zurück zum Zitat V.K. Berry: Characterization of polymer blends by low voltage scanning electron microscopy, Scanning 10, 19 (1988) V.K. Berry: Characterization of polymer blends by low voltage scanning electron microscopy, Scanning 10, 19 (1988)
Zurück zum Zitat J.H. Butler, D.C. Joy, G.F. Bradley, S.J. Krause: Low-voltage scanning electron microscopy of polymers, Polymer 36, 1781 (1995) J.H. Butler, D.C. Joy, G.F. Bradley, S.J. Krause: Low-voltage scanning electron microscopy of polymers, Polymer 36, 1781 (1995)
Zurück zum Zitat G.M. Brown, J.H. Butler: New method for the characterization of domain morphology of polymer blends using ruthenium tetroxide staining and low voltage scanning electron microscopy (LVSEM), Polymer 38, 3937 (1997) G.M. Brown, J.H. Butler: New method for the characterization of domain morphology of polymer blends using ruthenium tetroxide staining and low voltage scanning electron microscopy (LVSEM), Polymer 38, 3937 (1997)
Zurück zum Zitat V.N.E. Robinson: The elimination of charging artefacts in the scanning electron microscope, J. Phys. E 8, 638 (1975) V.N.E. Robinson: The elimination of charging artefacts in the scanning electron microscope, J. Phys. E 8, 638 (1975)
Zurück zum Zitat G.D. Danilatos: An atmospheric scanning electron microscope (ASEM), Scanning 3, 215 (1980) G.D. Danilatos: An atmospheric scanning electron microscope (ASEM), Scanning 3, 215 (1980)
Zurück zum Zitat G.D. Danilatos: The examination of fresh or living plant material in an environmental scanning electron ‘microscope', J. Microsc. 121, 235 (1981) G.D. Danilatos: The examination of fresh or living plant material in an environmental scanning electron ‘microscope', J. Microsc. 121, 235 (1981)
Zurück zum Zitat E. Lax (Ed.): D’Ans-Lax Taschenbuch für Chemiker und Physiker (Springer, Berlin 1967) E. Lax (Ed.): D’Ans-Lax Taschenbuch für Chemiker und Physiker (Springer, Berlin 1967)
Zurück zum Zitat G.D. Danilatos: Review and outline of environmental SEM at present, J. Microsc. 162, 391 (1991) G.D. Danilatos: Review and outline of environmental SEM at present, J. Microsc. 162, 391 (1991)
Zurück zum Zitat S.A. Wight, C.J. Zeissler: Direct measurement of electron beam scattering in the environmental scanning electron microscope using phosphor imaging plates, Scanning 22, 167 (2000) S.A. Wight, C.J. Zeissler: Direct measurement of electron beam scattering in the environmental scanning electron microscope using phosphor imaging plates, Scanning 22, 167 (2000)
Zurück zum Zitat G.D. Danilatos: Design and construction of an atmospheric or environmental SEM (Part 3), Scanning 7, 26 (1985) G.D. Danilatos: Design and construction of an atmospheric or environmental SEM (Part 3), Scanning 7, 26 (1985)
Zurück zum Zitat G.D. Danilatos: Cathodoluminescence and gaseous scintillation in the environmental SEM, Scanning 8, 279 (1986) G.D. Danilatos: Cathodoluminescence and gaseous scintillation in the environmental SEM, Scanning 8, 279 (1986)
Zurück zum Zitat B.L. Thiel, I.C. Bache, A.L. Fletcher, P. Meredith, A.M. Donald: An improved model for gaseous amplification in the environmental SEM, J. Microsc. 187, 143 (1997) B.L. Thiel, I.C. Bache, A.L. Fletcher, P. Meredith, A.M. Donald: An improved model for gaseous amplification in the environmental SEM, J. Microsc. 187, 143 (1997)
Zurück zum Zitat J. Cazaux: About the mechanisms of charging in EPMA, SEM, and ESEM with their time evolution, Microsc. Microanal. 10, 670 (2004) J. Cazaux: About the mechanisms of charging in EPMA, SEM, and ESEM with their time evolution, Microsc. Microanal. 10, 670 (2004)
Zurück zum Zitat Y. Ji, H.S. Guo, T.X. Zhong, H. Zhang, X.L. Quan, Y.Q. Zhang, X.D. Xu: Charge and charging compensation on oxides and hydroxides in oxygen environmental SEM, Ultramicroscopy 103, 191 (2005) Y. Ji, H.S. Guo, T.X. Zhong, H. Zhang, X.L. Quan, Y.Q. Zhang, X.D. Xu: Charge and charging compensation on oxides and hydroxides in oxygen environmental SEM, Ultramicroscopy 103, 191 (2005)
Zurück zum Zitat X. Tang, D.C. Joy: Quantitative measurements of charging in a gaseous environment, Scanning 25, 194 (2003) X. Tang, D.C. Joy: Quantitative measurements of charging in a gaseous environment, Scanning 25, 194 (2003)
Zurück zum Zitat B.L. Thiel, M. Toth, J.P. Craven: Charging processes in low vacuum scanning electron microscopy, Microsc. Microanal. 10, 711 (2004) B.L. Thiel, M. Toth, J.P. Craven: Charging processes in low vacuum scanning electron microscopy, Microsc. Microanal. 10, 711 (2004)
Zurück zum Zitat K. Robertson, R. Gauvin, J. Finch: Charge contrast imaging of gibbsite using the variable pressure SEM, Microsc. Microanal. 10, 721 (2004) K. Robertson, R. Gauvin, J. Finch: Charge contrast imaging of gibbsite using the variable pressure SEM, Microsc. Microanal. 10, 721 (2004)
Zurück zum Zitat M. Toth, M.R. Phillips: The role of induced contrast in images obtained using the environmental scanning electron microscope, Scanning 22, 370 (2000) M. Toth, M.R. Phillips: The role of induced contrast in images obtained using the environmental scanning electron microscope, Scanning 22, 370 (2000)
Zurück zum Zitat M. Schenk, M. Füting, R. Reichelt: Direct visualization of the dynamic behavior of a water meniscus by scanning electron microscopy, J. Appl. Phys. 84, 4880 (1998) M. Schenk, M. Füting, R. Reichelt: Direct visualization of the dynamic behavior of a water meniscus by scanning electron microscopy, J. Appl. Phys. 84, 4880 (1998)
Zurück zum Zitat S. Thiberge, A. Nechushtan, D. Sprinzak, O. Gileadi, V. Behar, O. Zik, Y. Chowers, S. Michaeli, J. Schlessinger, E. Moses: Scanning electron microscopy of cells and tissues under fully hydrated conditions, Proc. Natl. Acad. Sci. U.S.A. 101, 3346 (2004) S. Thiberge, A. Nechushtan, D. Sprinzak, O. Gileadi, V. Behar, O. Zik, Y. Chowers, S. Michaeli, J. Schlessinger, E. Moses: Scanning electron microscopy of cells and tissues under fully hydrated conditions, Proc. Natl. Acad. Sci. U.S.A. 101, 3346 (2004)
Zurück zum Zitat A. Cismak, M. Schwanecke, M. Füting, A. Heilmann: Environmental scanning electron microscopy of living mammalian cell cultures, Microsc. Microanal. 9(S3), 480 (2003) A. Cismak, M. Schwanecke, M. Füting, A. Heilmann: Environmental scanning electron microscopy of living mammalian cell cultures, Microsc. Microanal. 9(S3), 480 (2003)
Zurück zum Zitat R.E. de la Parra: A method to detect variations in the wetting properties of microporous polymer membranes, Microsc. Res. Tech. 25, 362 (1993) R.E. de la Parra: A method to detect variations in the wetting properties of microporous polymer membranes, Microsc. Res. Tech. 25, 362 (1993)
Zurück zum Zitat N.A. Stelmashenko, J.P. Craven, A.M. Donald, E.M. Terentjev, B.L. Thiel: Topographic contrast of partially wetting water droplets in environmental scanning electron microscopy, J. Microsc. 204, 172 (2001) N.A. Stelmashenko, J.P. Craven, A.M. Donald, E.M. Terentjev, B.L. Thiel: Topographic contrast of partially wetting water droplets in environmental scanning electron microscopy, J. Microsc. 204, 172 (2001)
Zurück zum Zitat A. Liukkonen: Contact angle of water on paper components: Sessile drops versus environmental scanning electron microscope measurements, Scanning 19, 411 (1997) A. Liukkonen: Contact angle of water on paper components: Sessile drops versus environmental scanning electron microscope measurements, Scanning 19, 411 (1997)
Zurück zum Zitat M.P. Rossi, H.H. Ye, Y. Gogotsi, S. Babu, P. Ndungu, J.C. Bradley: Environmental scanning electron microscopy study of water in carbon nanopipes, Nano Lett. 4, 989 (2004) M.P. Rossi, H.H. Ye, Y. Gogotsi, S. Babu, P. Ndungu, J.C. Bradley: Environmental scanning electron microscopy study of water in carbon nanopipes, Nano Lett. 4, 989 (2004)
Zurück zum Zitat B. Bennett, J.O. Buckman, B.F. Bowler, S.R. Larter: Wettability alteration in petroleum systems: The role of polar non-hydrocarbons, Petroleum Geosci. 10, 271 (2004) B. Bennett, J.O. Buckman, B.F. Bowler, S.R. Larter: Wettability alteration in petroleum systems: The role of polar non-hydrocarbons, Petroleum Geosci. 10, 271 (2004)
Zurück zum Zitat E. Kowalewski, T. Boassen, O. Torsaeter: Wettability alterations due to aging in crude oil; wettability and cryo-ESEM analyses, J. Petrol Sci. Eng. 39, 377 (2003) E. Kowalewski, T. Boassen, O. Torsaeter: Wettability alterations due to aging in crude oil; wettability and cryo-ESEM analyses, J. Petrol Sci. Eng. 39, 377 (2003)
Zurück zum Zitat M. Robin: Interfacial phenomena: Reservoir wettability in oil recovery, Oil Gas Sci. Technol. 56, 55 (2001) M. Robin: Interfacial phenomena: Reservoir wettability in oil recovery, Oil Gas Sci. Technol. 56, 55 (2001)
Zurück zum Zitat Y. Cao, H.L. Li: Interfacial activity of a novel family of polymeric surfactants, Eur. Polym. J. 38, 1457 (2002) Y. Cao, H.L. Li: Interfacial activity of a novel family of polymeric surfactants, Eur. Polym. J. 38, 1457 (2002)
Zurück zum Zitat S. Kitching, A.M. Donald: Beam damage in the ESEM: an FTIR study of polypropylene. In: 11th Europ. Conf. Electron Microsc., Dublin, Vol. 1 (1996) pp. 138–139 S. Kitching, A.M. Donald: Beam damage in the ESEM: an FTIR study of polypropylene. In: 11th Europ. Conf. Electron Microsc., Dublin, Vol. 1 (1996) pp. 138–139
Zurück zum Zitat C.P. Royall, B.L. Thiel, A.M. Donald: Radiation damage of water in environmental scanning electron ‘microscopy', J. Microsc. 204, 185 (2001) C.P. Royall, B.L. Thiel, A.M. Donald: Radiation damage of water in environmental scanning electron ‘microscopy', J. Microsc. 204, 185 (2001)
Zurück zum Zitat K. Kanaya, S.O. Kayama: Penetration and energy-loss theory of electrons in solid targets, J. Appl. Phys. D 5, 43 (1972) K. Kanaya, S.O. Kayama: Penetration and energy-loss theory of electrons in solid targets, J. Appl. Phys. D 5, 43 (1972)
Zurück zum Zitat K.F.J. Heinrich: Microbeam Analysis (San Francisco Press, San Francisco 1982) K.F.J. Heinrich: Microbeam Analysis (San Francisco Press, San Francisco 1982)
Zurück zum Zitat K.F.J. Heinrich, D.E. Newbury (Eds.): Electron Probe Quantification (Plenum, New York 1991) K.F.J. Heinrich, D.E. Newbury (Eds.): Electron Probe Quantification (Plenum, New York 1991)
Zurück zum Zitat D.E. Newbury, D.S. Bright: ‘‘Derived spectra'' software tools for detecting spatial and spectral features in spectrum images, Scanning 27, 15 (2005) D.E. Newbury, D.S. Bright: ‘‘Derived spectra'' software tools for detecting spatial and spectral features in spectrum images, Scanning 27, 15 (2005)
Zurück zum Zitat V.E. Cosslett, P. Duncumb: Micro-analysis by a flying-spot x-ray method, Nature 177, 1172 (1956) V.E. Cosslett, P. Duncumb: Micro-analysis by a flying-spot x-ray method, Nature 177, 1172 (1956)
Zurück zum Zitat J.J. Friel, R. Terborg, S. Langner, T. Salge, M. Rohde, J. Berlin: X-Ray and Image Analysis in Electron Microscopy, 3rd edn. (Pro Business, Berlin 2017) J.J. Friel, R. Terborg, S. Langner, T. Salge, M. Rohde, J. Berlin: X-Ray and Image Analysis in Electron Microscopy, 3rd edn. (Pro Business, Berlin 2017)
Zurück zum Zitat J. Goldstein, D.E. Newbury, D.C. Joy, C.E. Lyman, P. Echlin, E. Lifshin, L. Sawyer, J.R. Michael: Scanning Electron Microscopy and X-Ray Microanalysis, 3rd edn. (Springer, New York 2003) J. Goldstein, D.E. Newbury, D.C. Joy, C.E. Lyman, P. Echlin, E. Lifshin, L. Sawyer, J.R. Michael: Scanning Electron Microscopy and X-Ray Microanalysis, 3rd edn. (Springer, New York 2003)
Zurück zum Zitat L. Strüder, P. Lechner, P. Leutenegger: Silicon drift detector—The key to new experiments, Naturwissenschaften 85, 539 (1998) L. Strüder, P. Lechner, P. Leutenegger: Silicon drift detector—The key to new experiments, Naturwissenschaften 85, 539 (1998)
Zurück zum Zitat L. Strüder, N. Meidinger, D. Stotter, J. Kemmer, P. Lechner, P. Leutenegger, H. Soltau, F. Eggert, M. Rohde, T. Schulein: High-resolution x-ray spectroscopy close to room temperature, Microsc. Microanal. 4, 622 (1998) L. Strüder, N. Meidinger, D. Stotter, J. Kemmer, P. Lechner, P. Leutenegger, H. Soltau, F. Eggert, M. Rohde, T. Schulein: High-resolution x-ray spectroscopy close to room temperature, Microsc. Microanal. 4, 622 (1998)
Zurück zum Zitat P. Lechner, C. Fiorini, R. Hartmann, J. Kemmer, N. Krause, P. Leutenegger, A. Longoni, H. Soltau, D. Stotter, R. Stotter, L. Strüder, U. Weber: Silicon drift detectors for high count rate x-ray spectroscopy at room temperature, Nucl. Instrum. Methods Phys. Res. A 458, 281 (2001) P. Lechner, C. Fiorini, R. Hartmann, J. Kemmer, N. Krause, P. Leutenegger, A. Longoni, H. Soltau, D. Stotter, R. Stotter, L. Strüder, U. Weber: Silicon drift detectors for high count rate x-ray spectroscopy at room temperature, Nucl. Instrum. Methods Phys. Res. A 458, 281 (2001)
Zurück zum Zitat P. Poelt, M. Schmied, I. Obernberger, T. Brunner, J. Dahl: Automated analysis of submicron particles by computer-controlled scanning electron microscopy, Scanning 24, 92 (2002) P. Poelt, M. Schmied, I. Obernberger, T. Brunner, J. Dahl: Automated analysis of submicron particles by computer-controlled scanning electron microscopy, Scanning 24, 92 (2002)
Zurück zum Zitat Y. Hu, Y. Pan: Method for the calculation of the chemical composition of a thin film by Monte Carlo simulation and electron probe microanalysis, X-Ray Spectrom. 30, 110 (2001) Y. Hu, Y. Pan: Method for the calculation of the chemical composition of a thin film by Monte Carlo simulation and electron probe microanalysis, X-Ray Spectrom. 30, 110 (2001)
Zurück zum Zitat D.G. Rickerby, N. Wächter, R. Reichelt: Quantitative EDX analysis of SiO2/Al2O3/TiO2 multilayer films, Mikrochim. Acta Suppl. 15, 149 (1998) D.G. Rickerby, N. Wächter, R. Reichelt: Quantitative EDX analysis of SiO2/Al2O3/TiO2 multilayer films, Mikrochim. Acta Suppl. 15, 149 (1998)
Zurück zum Zitat G.C. Smith, D. Park, O. Cochonneau: Maximum entropy reconstruction of compositional depth profiles from electron probe microanalysis data, J. Microsc. 178, 48 (1995) G.C. Smith, D. Park, O. Cochonneau: Maximum entropy reconstruction of compositional depth profiles from electron probe microanalysis data, J. Microsc. 178, 48 (1995)
Zurück zum Zitat P. Poelt: Low voltage EDXS and elements of the first transition series, Mikrochim. Acta 132, 129 (2000) P. Poelt: Low voltage EDXS and elements of the first transition series, Mikrochim. Acta 132, 129 (2000)
Zurück zum Zitat R. Wurster: EDX measurements on nanoparticles in a high resolution scanning electron microscope, J. Trace Microprobe Tech. 15, 467 (1997) R. Wurster: EDX measurements on nanoparticles in a high resolution scanning electron microscope, J. Trace Microprobe Tech. 15, 467 (1997)
Zurück zum Zitat D.C. Joy, D.E. Newbury, D.L. Davidson: Electron channeling patterns in scanning electron microscope, J. Appl. Phys. 53, R81 (1982) D.C. Joy, D.E. Newbury, D.L. Davidson: Electron channeling patterns in scanning electron microscope, J. Appl. Phys. 53, R81 (1982)
Zurück zum Zitat C.G. van Essen, E.M. Schulson, R.H. Donaghay: The generation and identification of SEM channeling patterns from 10 \(\upmu\)m selected areas, J. Mater. Sci. 6, 213 (1971) C.G. van Essen, E.M. Schulson, R.H. Donaghay: The generation and identification of SEM channeling patterns from 10 \(\upmu\)m selected areas, J. Mater. Sci. 6, 213 (1971)
Zurück zum Zitat J.A. Venables, C.J. Harland: Electron back-scattering patterns—A new technique for obtaining crystallographic information in the scanning electron microscope, Philos. Mag. 27, 74 (1973) J.A. Venables, C.J. Harland: Electron back-scattering patterns—A new technique for obtaining crystallographic information in the scanning electron microscope, Philos. Mag. 27, 74 (1973)
Zurück zum Zitat A.J. Wilkinson, P.B. Hirsch: Electron diffraction based techniques in scanning electron microscopy of bulk materials, Micron 28, 279 (1997) A.J. Wilkinson, P.B. Hirsch: Electron diffraction based techniques in scanning electron microscopy of bulk materials, Micron 28, 279 (1997)
Zurück zum Zitat N.C. Krieger-Lassen, D. Juul-Jensen, K. Conradsen: Image processing procedures for analysis of electron back scattering patterns, Scanning Microsc. 6, 115 (1992) N.C. Krieger-Lassen, D. Juul-Jensen, K. Conradsen: Image processing procedures for analysis of electron back scattering patterns, Scanning Microsc. 6, 115 (1992)
Zurück zum Zitat B.L. Adams, S.I. Wright, K. Kunze: Orientation imaging: The emergence of a new microscopy, Metall. Trans. A 24, 819 (1993) B.L. Adams, S.I. Wright, K. Kunze: Orientation imaging: The emergence of a new microscopy, Metall. Trans. A 24, 819 (1993)
Zurück zum Zitat S. Zaefferer: The electron backscatter diffraction technique—A powerful tool to study microstructures by SEM, JEOL News 39, 10 (2004) S. Zaefferer: The electron backscatter diffraction technique—A powerful tool to study microstructures by SEM, JEOL News 39, 10 (2004)
Zurück zum Zitat S. Zaefferer, J. Ohlert, W. Bleck: A study of microstructure, transformation mechanisms and correlation between microstructure and mechanical properties of a low alloyed TRIP steel, Acta Mater. 52, 2765 (2004) S. Zaefferer, J. Ohlert, W. Bleck: A study of microstructure, transformation mechanisms and correlation between microstructure and mechanical properties of a low alloyed TRIP steel, Acta Mater. 52, 2765 (2004)
Zurück zum Zitat A.J. Wilkinson: Advances in SEM-based diffraction studies of defects and strains in semiconductors, J. Electron Microsc. 49, 299 (2000) A.J. Wilkinson: Advances in SEM-based diffraction studies of defects and strains in semiconductors, J. Electron Microsc. 49, 299 (2000)
Zurück zum Zitat D. Katrakova, F. Mücklich: Specimen preparation for electron backscatter diffraction (EBSD)-Part II: Ceramics, Prakt. Metallogr. 39, 644 (2002) D. Katrakova, F. Mücklich: Specimen preparation for electron backscatter diffraction (EBSD)-Part II: Ceramics, Prakt. Metallogr. 39, 644 (2002)
Zurück zum Zitat M.R. Koblischka, A. Koblischka-Veneva: Characterization of bulk superconductors through EBSD methods, Physica C 392, 545 (2003) M.R. Koblischka, A. Koblischka-Veneva: Characterization of bulk superconductors through EBSD methods, Physica C 392, 545 (2003)
Zurück zum Zitat A. Mauler, G. Godard, K. Kunze: Crystallographic fabrics of omphacite, rutile and quartz in vendee eclogites (Armorican Massif, France): Consequences for deformation mechanisms and regimes, Tectonophysics 342, 81 (2001) A. Mauler, G. Godard, K. Kunze: Crystallographic fabrics of omphacite, rutile and quartz in vendee eclogites (Armorican Massif, France): Consequences for deformation mechanisms and regimes, Tectonophysics 342, 81 (2001)
Zurück zum Zitat D.J. Prior, A.P. Boyle, F. Brenker, M.C. Cheadle, A. Day, G. Lopez, L. Peruzzo, G.J. Potts, S. Reddy, R. Spiess, N.E. Timms, P. Trimby, J. Wheeler, L. Zeterstrom: The application of electron backscatter diffraction and orientation contrast imaging in the SEM to textural problems in rocks, Am. Mineral. 84, 1741 (1999) D.J. Prior, A.P. Boyle, F. Brenker, M.C. Cheadle, A. Day, G. Lopez, L. Peruzzo, G.J. Potts, S. Reddy, R. Spiess, N.E. Timms, P. Trimby, J. Wheeler, L. Zeterstrom: The application of electron backscatter diffraction and orientation contrast imaging in the SEM to textural problems in rocks, Am. Mineral. 84, 1741 (1999)
Zurück zum Zitat P.W. Trimby: Orientation mapping of nanostructured materials using transmission Kikuchi diffraction in the scanning electron microscope, Ultramicroscopy 120, 16 (2012) P.W. Trimby: Orientation mapping of nanostructured materials using transmission Kikuchi diffraction in the scanning electron microscope, Ultramicroscopy 120, 16 (2012)
Metadaten
Titel
Scanning Electron Microscopy
verfasst von
Natasha Erdman
David C. Bell
Rudolf Reichelt
Copyright-Jahr
2019
Verlag
Springer International Publishing
DOI
https://doi.org/10.1007/978-3-030-00069-1_5

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.