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Erschienen in:
2006 | OriginalPaper | Buchkapitel
Semiconductor-Based Chemical Microsensors
verfasst von : Andreas Hierlemann, Henry Baltes
Erschienen in: MEMS: A Practical Guide to Design, Analysis, and Applications
Verlag: Springer Berlin Heidelberg
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The detection of molecules or chemical compounds is a general analytical task in the efforts of chemists to obtain qualitative and/or quantitative time-and spatially resolved information on specific chemical components.[
1
] Examples of qualitative information include the presence or absence of certain odorant, toxic, carcinogenic, or hazardous compounds. Examples of quantitative information include concentrations, activities, or partial pressures of such specific compounds exceeding, e.g., a certain threshold-limited value or the lower explosive limits of combustible gases.