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Microsystem Technologies
Erschienen in: Microsystem Technologies 7/2016

31.12.2015 | Technical Paper

Single-mode—multimode—single-mode and lossy mode resonance-based devices: a comparative study for sensing applications

verfasst von: Abian Bentor Socorro, Miguel Hernaez, Ignacio Del Villar, Jesús María Corres, Francisco Javier Arregui, Ignacio Raul Matias

Erschienen in: Microsystem Technologies | Ausgabe 7/2016

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Abstract

In this work, a thin-film consisting of 15 bilayers (estimated thickness: 210 nm) of titanium (IV) oxide and poly(sodium 4-styrenesulfonate) is simultaneously deposited onto two optical fiber structures: a single-mode—multimode—single-mode (SMS) device and a lossy mode resonance (LMR)-based device. The performance of both structures, as refractometers and relative humidity sensors, is studied and compared. In both cases, the sensitivity of the LMR-based device (955 nm/RIU and 3.54 nm/RH %, respectively) highly improves the one of the SMS (142 nm/RIU and 0.3 nm/RH %). These facts can be taken into account when developing sensors based on either SMS or LMR technologies.
Vorheriger Artikel Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate
Nächster Artikel Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design concept

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Metadaten
Titel
Single-mode—multimode—single-mode and lossy mode resonance-based devices: a comparative study for sensing applications
verfasst von
Abian Bentor Socorro
Miguel Hernaez
Ignacio Del Villar
Jesús María Corres
Francisco Javier Arregui
Ignacio Raul Matias
Publikationsdatum
31.12.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 7/2016
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2793-z

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