nach oben

Erschienen in:

2019 | OriginalPaper | Buchkapitel

11. Spectroscopy with the Low Energy Electron Microscope

verfasst von : Rudolf Tromp

Erschienen in: Springer Handbook of Microscopy

Verlag: Springer International Publishing

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

Photo electron emission microscopy (PEEM), going back to the earliest days of electron microscopy, and low-energy electron microscopy (LEEM), successfully deployed since the late 1980s, are examples of cathode lens microscopy in which the sample itself is an integral part of the image forming system. While applications have naturally gravitated towards the acquisition of images to elucidate structure and structural evolution, recent years have also seen a rapidly expanding range of spectroscopic capabilities. These address, for example, the occupied and unoccupied electronic band structures of materials, electrical transport in 2-D systems, crystal growth and 2-D strain, inelastic electron energy loss mechanisms, as well as radiation damage in organic materials during low-energy electron irradiation. In this chapter, we discuss applications of these new spectroscopic methods, as well as recent instrumental developments that further expand the potential uses of cathode lens microscopy.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Vorheriges Kapitel Photoemission Electron Microscopy

Nächstes Kapitel Model-Based Electron Microscopy

O. Hayes Griffith, W. Engel: Historical perspective and current trends in emission microscopy, mirror electron microscopy and low-energy electron microscopy, Ultramicroscopy 36, 1–28 (1991)

E. Bauer: Surface Microscopy with Low Energy Electrons (Springer, Berlin 2014)

E. Brüche: Elektronenmikroskopische Abbildung mit lichtelektrischen Elektronen, Z. Phys. 86, 448 (1933)

M. Knoll, E. Ruska: Das Elektronenmikroskop, Z. Phys. 78, 318–339 (1932)

D. Gabor: The Electron Microscope—Its Development, Present Performance and Future Possibilities (Chemical Publishing, Brooklyn, New York 1948)

P.W. Hawkes: The long road to spherical aberration correction, Biol. Cell 93, 432–439 (2001)

W. Engel: Emission microscopy with different kinds of electron emission. In: Proc. 6th Intern. Congr. Electron Microsc., Kyoto, ed. by R. Ueda (Maruzen, Tokyo 1966) pp. 217–218

E. Bauer: A brief history of PEEM, J. Electron Spectrosc. Relat. Phenom. 185, 314–322 (2012)

L. Mayer: Electron mirror microscopy of magnetic domains, J. Appl. Phys. 28, 975–983 (1957)

A.E. Luk'yanov, G.V. Spivak, R.S. Gvozdover: Mirror electron microscopy, Sov. Phys. Usp. 16, 529–552 (1973)

W. Telieps, E. Bauer: An analytical reflection and emission UHV surface electron microscope, Ultramicroscopy 17, 57–66 (1985)

R.M. Tromp, M.C. Reuter: Design of a new photo-emission/low-energy electron microscope for surface studies, Ultramicroscopy 36, 99–106 (1991)

L.H. Veneklasen: Design of a spectroscopic low-energy electron microscope, Ultramicroscopy 36, 76–90 (1991)

M.S. Altman, H. Pinkvos, J. Hurst, H. Poppa, G. Marx, E. Bauer: Polarized low energy electron microscopy of surface magnetic structure, Mater. Res. Soc. Symp. Proc. 232, 125 (1991)

G.F. Rempfer, D.M. Desloge, W.P. Skoczylas, O.H. Griffith: Simultaneous correction of spherical and chromatic aberrations with an electron mirror: an electron optical achromat, Microsc. Microanal. 3, 14–27 (1997)

R. Fink, M.R. Weiss, E. Umbach, D. Preikszas, R. Spehr, P. Hartel, W. Engel, R. Degenhardt, R. Wichtendahl, H. Kuhlenbeck, K. Ihmann, R. Schlögl, H.-J. Freund, A.M. Bradshaw, T. Schmidt, E. Bauer, G. Benner: SMART: a planned ultrahigh-resolution spectromicroscope for BESSY II, J. Electron Spectrosc. Relat. Phenom. 84, 231–250 (1997)

R.M. Tromp, J.B. Hannon, A.W. Ellis, W. Wan, A. Berghaus, O. Schaff: A new aberration-corrected, energy-filtered LEEM/PEEM instrument. I. Principles and design, Ultramicroscopy 110, 852–861 (2010)

R.M. Tromp, J.B. Hannon, W. Wan, A. Berghaus, O. Schaff: A new aberration-corrected, energy-filtered LEEM/PEEM instrument. II. Operation and results, Ultramicroscopy 127, 25–39 (2013)

T. Schmidt, H. Marchetto, P.L. Lévesque, U. Groh, F. Maier, D. Preikszas, P. Hartel, R. Spehr, G. Lilienkamo, W. Engel, R. Fink, E. Bauer, H. Rose, E. Umbach, H.-J. Freund: Double aberration correction in a low-energy electron microscope, Ultramicroscopy 110, 1358–1361 (2010)

R. Comin, A. Damascelli: ARPES: a probe of electronic correlations. In: Strongly Correlated Systems, Springer Series in Solid-State Sciences, Vol. 180, ed. by A. Avella, F. Mancini (Springer, Berlin 2014) pp. 31–71

Y. Fujikawa, T. Sakurai, R.M. Tromp: Micrometer-scale band mapping of single silver islands in real and reciprocal space, Phys. Rev. B 79, 121401 (2009)

C. Tusche, M. Ellguth, A. Krasyuk, A. Winkelmann, D. Kutnyakhov, P. Luschyk, K. Medjanik, G. Schönhense, J. Kirchner: Quantitative spin polarization analysis in photoelectron emission microscopy with an imaging spin filter, Ultramicroscopy 130, 70–76 (2013)

G. Schönhense, K. Medjanik, H.-J. Elmers: Space-, time- and spin-resolved photoemission, J. Electron Spectrosc. Relat. Phenom. 200, 94–118 (2015)

E. Bauer: The resolution of the low energy electron reflection microscope, Ultramicroscopy 17, 51 (1985)

G.F. Rempfer, O.H. Griffith: The resolution of photoelectron microscopes with UV, X-ray, and synchrotron excitation sources, Ultramicroscopy 27, 273–300 (1989)

A.B. Pang, T. Müller, M.S. Altman, E. Bauer: Fourier optics of image formation in LEEM, J. Phys. Condens. Matter 21, 314006 (2009)

S.M. Kennedy, N.E. Schofield, D.M. Paganin, D.E. Jesson: Wave optical treatment of surface step contrast in low-energy electron microscopy, Surf. Rev. Lett. 16, 855–867 (2009)

S.M. Schramm, A.B. Pang, M.S. Altman, R.M. Tromp: A contrast transfer function approach for image calculations in standard and aberration-corrected LEEM and PEEM, Ultramicroscopy 115, 88–108 (2012)

R.M. Tromp, W. Wan, S.M. Schramm: Aberrations of the cathode objective lens up to fifth order, Ultramicroscopy 119, 33–39 (2012)

J.B. Hannon, J. Sun, K. Pohl, G.L. Kellogg: Origins of nanoscale heterogeneity in ultrathin films, Phys. Rev. Lett. 96, 246103 (2006)

J.I. Flege, E.E. Krasovskii: Intensity-voltage low-energy electron microscopy for functional materials characterization, Phys. Status Solidi Rapid Res. Lett. 8, 463–477 (2014)

J. Jobst, J. Kautz, D. Geelen, R.M. Tromp, S.J. van der Molen: Nanoscale measurements of unoccupied band dispersion in few-layer graphene, Nature Commun. 6, 8926 (2015)

J. Jobst, A.J.H. van der Torren, E.E. Krasovskii, J. Balgley, C.R. Dean, R.M. Tromp, S.J. van der Molen: Quantifying electron band interactions in van der Waals materials using angle-resolved reflected-electron spectroscopy, Nature Commun. 7, 13621 (2016)

M. Henzler: LEED studies of surface imperfections, Appl. Surf. Sci. 11/12, 450–469 (1982)

T.-M. Lu, M.G. Lagally: Diffraction from surfaces with randomly distributed steps, Surf. Sci. 120, 47–66 (1982)

A.J.H. van der Torren: Growing Oxide Thin Films in a Low-Energy Electron Microscope, Ph.D. Thesis (Leiden Univ., Leiden 2016)

K.L. Man, M.S. Altman: Small-angle lattice rotations in graphene on Ru(0001), Phys. Rev. B 84, 235415 (2011)

J. Kautz, J. Jobst, C. Sorger, R.M. Tromp, H.B. Weber, S.J. van der Molen: Low-energy electron potentiometry: Contactless imaging of charge transport on the nanoscale, Sci. Rep. 5, 13604 (2015)

L. Reimer (Ed.): Energy-Filtering Transmission Electron Microscopy (Springer, Berlin 1994)

Y. Fujikawa, T. Sakurai, R.M. Tromp: Surface plasmon microscopy using an energy-filtered low energy electron microscope, Phys. Rev. Lett. 100, 126803 (2008)

J. Sun, J.B. Hannon, R.M. Tromp, P. Johari, A.A. Bol, V.B. Shenoy, K. Pohl: Spatially-resolved structure and electronic properties of graphene on polycrystalline Ni, ACS Nano 4, 7073–7077 (2010)

A. Thete, D. Geelen, S. Wuister, S.J. van der Molen, R.M. Tromp: Low-energy electron (0-100 eV) interaction with resists using LEEM, Proc. SPIE 9422, 94220A (2015)

S. Bhattarai, A.R. Neureuther, P.A. Naulleau: Study of energy delivery and mean free path of low energy electrons in EUV resists, Proc. SPIE 9779, 97790B (2016)

A. Thete, D. Geelen, S.J. van der Molen, R.M. Tromp: Charge catastrophe and dielectric breakdown during exposure of organic thin films to low-energy electron radiation, Phys. Rev. Lett. 119, 266803 (2017)

R.M. Tromp: Low-voltage transmission electron microscopy, US Patent 85869191 (2013)

D. Geelen, A. Thete, O. Schaff, A. Kaiser, S.J. van der Molen, R.M. Tromp: eV-TEM: Transmission electron microscopy in a low energy cathode lens instrument, Ultramicroscopy 159, 482–487 (2015)

S. Tanuma, C.J. Powell, D.R. Penn: Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range, Surf. Interface Anal. 43, 689–713 (2011)

D. Gabor: A new microscopic principle, Nature 161, 777 (1948)

C.J. Davisson, C.J. Calbick: Electron lenses, Phys. Rev. 42, 580 (1932)

R.M. Tromp: Measuring and correcting aberrations of a cathode objective lens, Ultramicroscopy 111, 273–281 (2011)

O. Scherzer: Über einige Fehler von Elektronenlinsen, Z. Phys. 101, 593–600 (1936)

E. Abbe: Beiträge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung, Arch. Mikrosk. Anat. 9, 413–468 (1873)

M. Herzberger, N.R. McClure: The design of superachromatic lenses, Appl. Opt. 2, 553–560 (1963)

R.M. Tromp: Catadioptric aberration correction in cathode lens microscopy, Ultramicroscopy 151, 191–198 (2015)

O. Scherzer: Sphärische and chromatische Korrektur von Elektronenlinsen, Optik 2, 114–132 (1947)

A. Recknagel: Zur Theorie des Elektronenspiegels, Z. Phys. 104, 381–394 (1937)

R. Rüdenberg: Electron lenses of hyperbolic field structure, J. Frankl. Inst. 246, 311–339–377–407 (1948)

G.F. Rempfer: A theoretical study of the hyperbolic electron mirror as a correcting element for spherical and chromatic aberration in electron optics, J. Appl. Phys. 67, 6027–6040 (1990)

W. Wan, J. Feng, H.A. Padmore, D.S. Robin: Simulation of a mirror corrector for PEEM3, Nucl. Instrum. Methods Phys. Res. A 519, 222–229 (2004)

L. Wang, E. Munro, J. Rouse, H. Liu: Simulation of electron mirrors by the differential algebraic method, Phys. Procedia 1, 297–304 (2008)

R.M. Tromp: Characterization of the cathode objective lens by real-space microspot low energy electron diffraction, Ultramicroscopy 130, 2–6 (2013)

R.M. Tromp: An adjustable electron achromat for cathode lens microscopy, Ultramicroscopy 159, 497–502 (2015)

R.M. Tromp, M.S. Altman: Defocus in cathode lens instruments, Ultramicroscopy 183, 2–7 (2017)

S.M. Schramm, S.J. van der Molen, R.M. Tromp: Intrinsic instability of aberration-corrected electron microscopes, Phys. Rev. Lett. 109, 163901 (2012)

J. Barthel, A. Thust: On the optical stability of high-resolution transmission electron microscopes, Ultramicroscopy 134, 6–17 (2013)

R.M. Tromp, M. Mankos, M.C. Reuter, A.W. Ellis, M. Copel: A new low energy electron microscope, Surf. Rev. Lett. 5, 1189–1197 (1998)

Elmitec: www.elmitec.de

R. Könenkamp, R. Word, G.F. Rempfer, T. Dixon, L. Almaraz, T. Jones: 5.4 nm spatial resolution in biological photoemission electron microscopy, Ultramicroscopy 110, 899–902 (2010)

R. Sissingh: Metingen over de Elliptische Polarisatie van het Licht (S.C. van Doesburgh, Leiden 1885)

C.J. Davisson, L.H. Germer: Diffraction of electrons by a crystal of nickel, Phys. Rev. 30, 705–740 (1927)

E.J. Scheibner, L.H. Germer, C.D. Hartman: Apparatus for direct observation of low-energy electron diffraction patterns, Rev. Sci. Instrum. 31, 112 (1960)

W. Ehrenberg: A new method of investigating the diffraction of slow electrons by crystals, Lond. Edinb. Dublin Philos. Mag. J. Sci. 18(122), 878 (1934)

G.P. Thomson, A. Reid: Diffraction of cathode rays by a thin film, Nature 119, 890 (1927)

E. Ruska: The development of the electron microscope and of electron microscopy, Nobel Prize Lecture (1986)

J.M. McLaren, J.B. Pendry, P.J. Rous, D.K. Saldin, G.A. Somorjai, M.A. van Hove, D.D. Vvedensky: Surface Crystallographic Information Service—A Handbook of Surface Structures (Springer, Dordrecht 1987)

A.K. Schmid, W. Święch, C.S. Rastomjee, B. Rausenberger, W. Engel, E. Zeitler, A.M. Bradshaw: The chemistry of reaction-diffusion fronts investigated by microscopic LEED I–V fingerprinting, Surf. Sci. 331–333, 225–230 (1995)

M. Li, J.B. Hannon, R.M. Tromp, J. Sun, J. Li, V. Shenoy, E. Chason: Equilibrium shapes of graphene domains on Ni(111), Phys. Rev. B 88, 041402(R) (2013)

D. Jariwala, T.J. Marks, M.C. Hersam: Mixed-dimensional van der Waals heterostructures, Nature Mater. 16, 170–181 (2017)

H. Hibino, H. Kageshima, F. Maeda, M. Nagase, K. Kobayashi, Y. Kobayashi, H. Yamaguchi: Microscopic thickness determination of thin graphite films formed on SiC from quantized oscillation in reflectivity of low-energy electrons, E-J. Surf. Sci. Nanotech. 6, 107–110 (2008)

R.M. Feenstra, M. Widom: Low-energy electron reflectivity from graphene: first-principles computations and approximate models, Ultramicroscopy 130, 101–108 (2013)

P.C. Mende, Q. Gao, A. Ismach, H. Chou, M. Widom, R. Ruoff, L. Colombo, R.M. Feenstra: Characterization of hexagonal boron nitride layers on nickel surfaces by low-energy electron microscopy, Surf. Sci. 659, 31–42 (2017)

S.C. de la Barrera, Y.-C. Lin, S.M. Eicheld, J.A. Robinson, Q. Gao, M. Widom, R.M. Feenstra: Thickness characterization of atomically thin WSe₂ on epitaxial graphene by low-energy electron reflectivity oscillations, J. Vac. Sci. Technol. B 34, 04J106 (2016)

M.S. Altman, W.F. Chung, Z.Q. He, H.C. Poon, S.Y. Tong: Quantum size effect in low energy electron diffraction of thin films, Appl. Surf. Sci. 169–170, 82–87 (2001)

W. Jin, P.-C. Yeh, N. Zaki, D. Zhang, J.T. Sadowski, A. Al-Mahboob, A.M. van der Zande, D.A. Chenet, J.I. Dadap, I.P. Herman, P. Sutter, J. Hone, R.M. Osgood Jr.: Direct measurement of the thickness-dependent electronic band structure of MoS₂ using angle-resolved photoemission spectroscopy, Phys. Rev. Lett. 111, 106801 (2013)

M. Escher, N. Weber, M. Merkel, C. Ziethen, P. Bernhard, G. Schönhense, S. Schmidt, F. Forster, F. Reinert, B. Krömker: Nanoelectron spectroscopy for chemical analysis, a novel energy filter for imaging x-ray photoemission microscopy, J. Phys. Condens. Matter 17, S1329–S1338 (2005)

R.M. Tromp, Y. Fujikawa, J.B. Hannon, A.W. Ellis, A. Berghaus, O. Schaff: A simple energy filter for low energy electron microscopy/photoelectron emission microscopy, J. Phys. Condens. Matter 21, 314007 (2009)

F.J. Himpsel, T. Fauster: Probing valence states with photoemission and inverse photoemission, J. Vac. Sci. Technol. A 2, 815–821 (1984)

G. Denninger, V. Dose, H.P. Bonzel: Evidence for direct optical interband transitions in isochromat spectra from Pt single-crystal surfaces, Phys. Rev. Lett. 48, 279–282 (1982)

D.W. Jepsen, P.M. Marcus, F. Jona: Low-energy-electron-diffraction spectra from [001] surfaces of face-centered cubic metals: theory and experiment, Phys. Rev. B 5, 3933–3952 (1972)

P.J. Møller, M.H. Mohamed: Total current spectroscopy, Vacuum 35, 29–37 (1985)

E.E. Krasovskii, W. Schattke, V.N. Strocov, R. Claessen: Unoccupied band structure of NbSe₂ by very low-energy electron diffraction: Experiment and theory, Phys. Rev. B 66, 235403 (2002)

T.O. Mentes, A. Locatelli: Angle-resolved X-ray photoemission electron microscopy, J. Electron Spectrosc. Relat. Phenom. 185, 323–329 (2012)

O. Klemperer, W.D. Right: The investigation of electron lenses, Proc. Phys. Soc. 51, 296–317 (1939)

P. Muralt, D.W. Pohl: Scanning tunneling potentiometry, Appl. Phys. Lett. 48, 514–516 (1986)

A. Bannani, C. Bobisch, R. Möller: Local potentiometry using a multiprobe scanning tunneling microscope, Rev. Sci. Instrum. 79, 083704 (2008)

S.-H. Ji, J.B. Hannon, R.M. Tromp, V. Perebeinos, J. Tersoff, F.M. Ross: Atomic-scale transport in epitaxial graphene, Nature Mater. 11, 114–119 (2012)

A.L.F. Cauduro, R. dos Reis, G. Chen, A.K. Schmid, H.-G. Rubahn, M. Madsen: Work function mapping of MoO_x thin-films for application in electronic devices, Ultramicroscopy 183, 99–103 (2017)

J. Jobst, L.M. Boers, C. Yin, J. Aarts, R.M. Tromp, S.J. van der Molen: Quantifying work function differences using low-energy electron microscopy: The case of mixed-terminated strontium titanate, Ultramicroscopy 200, 43–49 (2019)

C. Klein, T. Nabbefeld, H. Hattab, D. Meyer, M. Kammler, F.-J. Meyer zu Heringdorf, A. Golla-Franz, B.H. Müller, T. Schmidt, M. Henzler, M. Horn-von Hoegen: Lost in reciprocal space? Determination of the scattering condition in spot profile analysis low-energy electron diffraction, Rev. Sci. Instrum. 82, 035111 (2011)

H. Ibach, D.L. Mills: Electron Energy Loss Spectroscopy and Surface Vibrations (Academic Press, London 1982)

K.P. Weidkamp, R.M. Tromp, R.J. Hamers: Epitaxial growth of large pentacene crystals on Si(001) surfaces functionalized with molecular monolayers, J. Phys. Chem. C 111, 16489–16497 (2007)

R.M. Tromp, M.C. Reuter: Wavy steps on Si(001), Phys. Rev. Lett. 68, 820–822 (1992)

R.S. Becker, G.S. Higashi, Y.J. Chabal, A.J. Becker: Atomic-scale conversion of clean Si(111):H-1×1 to Si(111)-2×1 by electron-stimulated desorption, Phys. Rev. Lett. 65, 1917–1920 (1990)

R.D. Ramsier, J.T. Yates Jr.: Electron-stimulated desorption: Principles and applications, Surf. Sci. Rep. 12, 243–378 (1991)

V. Bakshi (Ed.): EUV Lithography (SPIE, Bellingham 2009)

M. Pope, C.E. Swemberg: Electronic Processes in Organic Crystal and Polymers (Oxford Univ. Press, Oxford 1998)

Y. Lin, D.C. Joy: A new examination of secondary electron yield data, Surf. Interface Anal. 37, 895–900 (2005)

M.P. Seah, W.A. Dench: Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids, Surf. Interface Anal. 1, 2–11 (1979)

H.W. Fink, H. Schmid, H.J. Kreuzer, A. Wierzbicki: Atomic resolution in lensless low-energy electron holography, Phys. Rev. Lett. 67, 1543 (1991)

J.C.H. Spence, W. Qian, A.J. Melmed: Experimental low-voltage point-projection microscopy and its possibilities, Ultramicroscopy 52, 473–477 (1993)

H. Hibino, H. Kageshima, F.-Z. Guo, F. Maeda, M. Kotsugi, Y. Watanabe: Two-dimensional emission patterns of secondary electrons from graphene layers formed on SiC(0001), Appl. Surf. Sci. 254, 7596 (2008)

Titel: Spectroscopy with the Low Energy Electron Microscope
verfasst von: Rudolf Tromp
Verlag: Springer International Publishing
Buch: Springer Handbook of Microscopy
Print ISBN: 978-3-030-00068-4

Electronic ISBN: 978-3-030-00069-1

Copyright-Jahr: 2019
DOI: https://doi.org/10.1007/978-3-030-00069-1_11

Premium Partner

Marktübersichten

Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.

Zur Marktübersicht