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Zeitschrift

Microsystem Technologies

Microsystem Technologies 1/2015

Ausgabe 1/2015

Inhaltsverzeichnis ( 39 Artikel )

01.01.2015 | Review Paper | Ausgabe 1/2015

Recent progress in low temperature nanoimprint lithography

Hongwen Sun

01.01.2015 | Review Paper | Ausgabe 1/2015

A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C

Noraini Marsi, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Faisal Mohd-Yasin

01.01.2015 | Technical Paper | Ausgabe 1/2015

Development research of thermocouple-based microwave power sensors using AC/DC substitution method

De-bo Wang, Wen-juan Bai, Changchun Zhang, Yanyan Guo, Jing Chen

01.01.2015 | Technical Paper | Ausgabe 1/2015

Experimental study of a low-g micromachined electrostatically suspended accelerometer for space applications

G. Y. Ma, F. T. Han, P. C. You, L. Zhang, X. J. Yan

01.01.2015 | Technical Paper | Ausgabe 1/2015

Multichannel oscillatory-flow PCR micro-fluidic chip with controllable temperature gradient

Jinquan Nie, Yulong Zhao, Niancai Peng

01.01.2015 | Technical Paper | Ausgabe 1/2015

Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers

Korakoch Phetdee, Alongkorn Pimpin, Werayut Srituravanich

01.01.2015 | Technical Paper | Ausgabe 1/2015

Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers

Anindya Lal Roy, Tarun Kanti Bhattacharyya

01.01.2015 | Technical Paper | Ausgabe 1/2015

Hydrodynamic focusing micropump module with PDMS/nickel-particle composite diaphragms for microfluidic systems

Jeonghwan Kim, Kyung-Nam Kang, Yoonyoung Jin, Jost Goettert, Pratul K. Ajmera

01.01.2015 | Technical Paper | Ausgabe 1/2015 Open Access

A new validation method for clinical grade micro-encapsulation: quantitative high speed video analysis of alginate capsule

Ina Meiser, Sabine C. Müller, Friederike Ehrhart, Stephen G. Shirley, Heiko Zimmermann

01.01.2015 | Technical Paper | Ausgabe 1/2015

Design optimization of linearly DC controlled staggered vertical comb drive actuators

Alaa Elhady, Diaa Khalil, M. A. E. Mahmoud

01.01.2015 | Technical Paper | Ausgabe 1/2015

Design and characterization of miniature fluid dynamic bearing using novel multi-step elliptical grooves

Chien-Yu Chen, Chien-Sheng Liu, Yu-Cheng Li

01.01.2015 | Technical Paper | Ausgabe 1/2015

Optimal design of piezoelectric micromachined modal gyroscope (PMMG) with modes matched: modal analysis

Xiaosheng Wu, Wenyuan Chen, Abdolvand Reza

01.01.2015 | Technical Paper | Ausgabe 1/2015

A new silicon biaxial decoupled resonant micro-accelerometer

Bo Yang, Hui Zhao, Bo Dai, Xiaojun Liu

01.01.2015 | Technical Paper | Ausgabe 1/2015

Graphene diaphragm analysis for pressure or acoustic sensor applications

Dongxue Wang, Shangchun Fan, Wei Jin

01.01.2015 | Technical Paper | Ausgabe 1/2015

Biomimetic superhydrophobic polymer surfaces by replication of hierarchical structures fabricated using precision tooling machine and anodized aluminum oxidation

Donghui Chu, Akihiko Nemoto, Hiroshi Ito

01.01.2015 | Technical Paper | Ausgabe 1/2015

A near zero skew actuation mechanism for hard disk drives

Zhimin He, Jianqiang Mou, Kheong Sann Chan, Suet Hoi Lam, Wuzhong Lin

01.01.2015 | Technical Paper | Ausgabe 1/2015

Implantable electrode array with platinum black coating for brain stimulation in fish

Chuan Zhang, Jing-Quan Liu, Hong-Chang Tian, Xiao-Yang Kang, Jing-Cheng Du, Yue-Feng Rui, Bin Yang, Chun-Sheng Yang

01.01.2015 | Technical Paper | Ausgabe 1/2015

Development of a simple and reliable PDMS interconnect for high throughput microfluidic applications

C. J. Mu, Z. Y. Zhang, M. Lin, X. C. Cao

01.01.2015 | Technical Paper | Ausgabe 1/2015

Integration method of silicon sensors on SU-8-based microfluidic platforms

Francisco Perdigones, Carmen Aracil, José M. Quero, Manuel Gutiérrez, Cecilia Jiménez, Pablo Giménez

01.01.2015 | Technical Paper | Ausgabe 1/2015

Design and fabrication of a novel tri-axis gyroscope with sensing diagonal-pendulums

M. C. Wang, J. W. Jiao, P. L. Yan, B. W. Mi, S. Qin, W. J. Liu

01.01.2015 | Technical Paper | Ausgabe 1/2015

Piezoelectric micro power harvester using flow-induced vibration for intrastructure health monitoring applications

Young Ho Seo, Byeong-Hee Kim, Doo-Sun Choi

01.01.2015 | Technical Paper | Ausgabe 1/2015

Ultra-small micro pressure sensor chip design and fabrication featuring high-sensitivity and good-linearity

B. R. Zheng, C. Zhou, Q. Wang, X. M. Pan, W. Xue

01.01.2015 | Technical Paper | Ausgabe 1/2015

Electromagnetic modeling and parameter extraction of RF-MEMS switch

Ashish Kumar Sharma, Navneet Gupta

01.01.2015 | Technical Paper | Ausgabe 1/2015

Numerical study of the effect of microchannel geometry on temperature gradient focusing using the Joule heating effect

Taeheon Han, Sungjin Park, Tae-Joon Jeon, Sun Min Kim

01.01.2015 | Technical Paper | Ausgabe 1/2015

Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm

Hongyun So, Albert P. Pisano

01.01.2015 | Technical Paper | Ausgabe 1/2015

Fabrication of through substrate grooves on GaAs by deep wet etching and its application in GaAs CCD wafer level packaging

S. F. Wang, M. Han, J. T. Ye, G. W. Xu, L. Luo

01.01.2015 | Technical Paper | Ausgabe 1/2015

High temperature characteristic for wireless pressure LTCC-based sensor

Tan Qiulin, Kang Hao, Qin Li, Xiong Jijun, Liu Jun, Xue Chenyang, Zhang Wendong, Luo Tao

01.01.2015 | Technical Paper | Ausgabe 1/2015

Suspended high Q integrated inductor by wafer level packaging technology

M. Han, S. F. Wang, G. W. Xu, Le Luo

01.01.2015 | Technical Paper | Ausgabe 1/2015

Study on effects of the damping ratio on output performance of micro electromagnetic vibration energy harvesters

YiMing Lei, Zhiyu Wen

01.01.2015 | Technical Paper | Ausgabe 1/2015

A high sensitive and robust controllable MEMS gyroscope with inherently linear control force using a high performance 2-DOF oscillator

Zahra Deyhim, Zeinab Yousefi, Habib Badri Ghavifekr, Esmaeil Najafi Aghdam

01.01.2015 | Technical Paper | Ausgabe 1/2015

Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer

Jeong Il Lee, Mitsuhiro Shikida, Kazuo Sato

01.01.2015 | Technical Paper | Ausgabe 1/2015

Design and simulation of bidirectional impact sensors array with optimized air damped response

Saeid Hematian Dehkordi, Reza Askari Moghadam, Javad Koohsorkhi

01.01.2015 | Technical Paper | Ausgabe 1/2015

Microfluidic chip for rapid and automatic extraction of plasma from whole human blood

Ju-Nan Kuo, Yu-Hui Zhan

01.01.2015 | Technical Paper | Ausgabe 1/2015

Design of experiments based factorial design and response surface methodology for MEMS optimization

M. M. Saleem, A. Somá

01.01.2015 | Technical Paper | Ausgabe 1/2015

Analysis of spring-back deformation of head-mounting-block after ball-swaging in hard disk drives

Shinji Koganezawa

01.01.2015 | Technical Paper | Ausgabe 1/2015

Field effect transistor with integrated microfluidic channel as pH sensor

I. Bouhadda, O. De Sagazan, F. Le Bihan

01.01.2015 | Technical Paper | Ausgabe 1/2015

Application of vertically aligned carbon nanotubes on burnishing slider in cleaning process of magnetic disk surfaces

Hiroshi Tani, Keisuke Konishi, Wataru Norimatsu, Michiko Kusunoki, Norio Tagawa

01.01.2015 | Technical Paper | Ausgabe 1/2015

Temperature dependence of the electromechanical characteristics of superconducting RF-MEMS switches

N. Alcheikh, P. Xavier, J. M. Duchamp, K. F. Schuster, C. Malhaire, B. Remaki, C. Boucher, X. Mescot

01.01.2015 | Technical Paper | Ausgabe 1/2015

Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber

N. Zieyana Mohamed Annuar, Mohd Faizul Mohd Sabri, A. Shuhaimi Abu Bakar

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