Ausgabe 3/2016
Special issue on design, test, integration and packaging of MEMS/MOEMS: DTIP, Cannes, 2014
Inhalt (27 Artikel)
Special issue on design, test, integration and packaging of MEMS/MOEMS: DTIP, Cannes, 2014
Souhil Megherbi, Bernd Michel
Meter-scale large-area capacitive pressure sensors with fabric with stripe electrodes of conductive polymer-coated fibers
Seiichi Takamatsu, Takahiro Yamashita, Toshihiro Itoh
A dual-axis MEMS capacitive inertial sensor with high-density proof mass
Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida
Capacitive flexible pressure sensor: microfabrication process and experimental characterization
T. H. N. Dinh, E. Martincic, E. Dufour-Gergam, P.-Y. Joubert
Phononic band engineering for thermal conduction control and similarity with photonic band engineering
Masahiro Nomura
Reliability characterization of a soot particle sensor in terms of stress- and electromigration in thin-film platinum
Radoslav Rusanov, Holger Rank, Tino Fuchs, Roland Mueller-Fiedler, Oliver Kraft
Reliable response of RF MEMS LTCC packaged switches after mechanical and thermal stress
A. Lucibello, G. Capoccia, E. Proietti, R. Marcelli, B. Margesin, V. Mulloni, F. Giacomozzi, F. Vitulli, M. Scipioni, G. Bartolucci
Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor
Zhuoqing Yang, Wenguo Chen, Guifu Ding, Yan Wang, Hong Wang, Xiaolin Zhao
Micro-mixer device with deep channels in silicon using modified RIE process: fabrication, packaging and characterization
Saakshi Dhanekar, Sudhir Chandra, R. Balasubramaniam
Simulation of a high-power LED lamp for the evaluation and design of heat dissipation mechanisms
De-Shau Huang, Yi-Sheng Liao, Heng-Jen Kuo, Fang-Jui Kuo, Ming-Tzer Lin
The robustness of an algorithm applied in wafer-level material property extraction
Wan-Chun Chuang
Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch
Li-Ya Ma, Anis Nurashikin Nordin, Norhayati Soin
Characterization of strain microgauges for the monitoring of the deformations of a medical needle during its insertion in human tissues
Agnès Bonvilain, Mathilde Gangneron
Robust design optimization of electro-thermal microactuator using probabilistic methods
B. Khayatzadeh Safaie, M. Shamshirsaz, M. Bahrami
Investigating fracture strength of poly-silicon membranes using microscopic loading tests and numerical simulation
John Brueckner, Alfons Dehé, Ellen Auerswald, Rainer Dudek, Dietmar Vogel, Bernd Michel, Sven Rzepka
Development of thin film based flexible current clamp sensor using screen-printed coil
Takahiro Yamashita, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda
Fabrication, simulations, and measurements of self-assembled millimeter-wave antennas for system-on-chip applications
Sae-Won Lee, Ying Chen, Diane Titz, Fabien Ferrero, Cyril Luxey, Rodney G. Vaughan, Meenakshinathan Parameswaran
Characterization of capacitive micromachined ultrasonic transducers
Fayçal Bellared, Joseph Lardiès, Gilles Bourbon, Patrice Le Moal, Vincent Walter, Marc Berthillier
Microwave atomic force microscope: MG63 osteoblast-like cells analysis on nanometer scale
Lan Zhang, Yuanhui Song, Atsushi Hosoi, Yasuyuki Morita, Yang Ju
Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers
Maira Possas, Lionel Rousseau, Farbod Ghassemi, Gaelle Lissorgues, Emmanuel Scorsone, Philippe Bergonzo
Bulk metallic glass mold for high volume fabrication of micro optics
Peng He, Likai Li, Fei Wang, Olaf Dambon, Fritz Klocke, Katharine M. Flores, Allen Y. Yi
Using MEMS-based inertial sensor with ankle foot orthosis for telerehabilitation and its clinical evaluation in brain injuries and total knee replacement patients
Shao-Li Han, Meng-Jie Xie, Chih-Cheng Chien, Yu-Che Cheng, Chia-Wen Tsao
Screen-pad printing for electrode patterning on curvy surfaces
Ken-ichi Nomura, Yasuyuki Kusaka, Hirobumi Ushijima, Kazuro Nagase, Hiroaki Ikedo
Low temperature wafer level conformal polymer dielectric spray coating for through silicon vias with 2:1 aspect ratio
Yuechen Zhuang, Daquan Yu, Fengwei Dai, Zhongcai Niu
Human breast cancer cell enrichment by Dean flow driven microfluidic channels
M. Zuvin, N. Mansur, S. Z. Birol, L. Trabzon, A. Sayı Yazgan
Modeling and test result of closed-loop MEMS accelerometer with wide dynamic range
Feng Zhang, Xiangliang Jin, Longsheng Wang
Capacitive solvent sensing with interdigitated microelectrodes
Ismail Bilican, Mustafa Tahsin Guler, Neset Gulener, Mustafa Yuksel, Sedat Agan