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Zeitschrift

Microsystem Technologies

Microsystem Technologies 6/2017

Ausgabe 6/2017

Part II of the Special Issue on 3rd International Conference on Engineering and Technology Innovation (ICETI 2014), held in Kenting, Taiwan Oct 31–Nov 2, 2014

Inhaltsverzeichnis ( 70 Artikel )

22.02.2017 | Editorial | Ausgabe 6/2017

Part II of the Special Issue on 3rd International Conference on Engineering and Technology Innovation (ICETI 2014), held in Kenting, Taiwan Oct 31–Nov 2, 2014

Wen-Hsiang Hsieh, Bernd Michel

09.09.2015 | Technical Paper | Ausgabe 6/2017

High resolution topography utilizing a line scan stereo vision technique

Po-Cheng Chen, Ming Chang, Jacque Lynn Gabayno, Xiangning Wang, Xiaojun Liu

30.12.2015 | Technical Paper | Ausgabe 6/2017

Fabrication of microfluidic structures in quartz via micro machining technologies

Ying-Chieh Lin, Chung-Ching Lee, Heng-Sheng Lin, Zheng-Han Hong, Fu-Chuan Hsu, Tsung-Pin Hung, Yu-Ting Lyu

06.05.2016 | Technical Paper | Ausgabe 6/2017

Micromirror based virtual image automotive head-up display

Chao Fan, Siyuan He

11.12.2015 | Technical Paper | Ausgabe 6/2017

Ultrasonic assisted thermoforming for rapid fabrication of a microspeaker diaphragm

Ho-Jin Bae, Hyun-Joong Lee, Keun Park

06.10.2015 | Technical Paper | Ausgabe 6/2017

The characteristics of GZO/Ti/GZO multilayer films deposited on flexible substrates under different annealing temperatures

Tao-Hsing Chen, Chia-Chin Chiang, Ting-You Chen

21.12.2015 | Technical Paper | Ausgabe 6/2017

Experiment study of laser thermal enhanced electrochemical deposition

Zhaoyang Zhang, Yujia Jiang, Lei Huang, Xin Nie, Gao Liu

08.01.2016 | Technical Paper | Ausgabe 6/2017

Fabrication of ultra-high-sensitivity flexible strain sensor based on single ZnO nanowire

Hao Zhao, Xiaojun Liu, Liangzhou Chen, Suping Chang, Ming Chang

30.12.2015 | Technical Paper | Ausgabe 6/2017

Characteristic studies of a novel piezoelectric impedance micropump

Chiang-Ho Cheng, An-Shik Yang, Chih-Jer Lin, Wei-Jui Huang

26.12.2015 | Technical Paper | Ausgabe 6/2017

Study and design of resistive switching behaviors in PMMA-based conducting-bridge random-access memory (CBRAM) devices

Jiaying Jian, Honglong Chang, Arnaud Vena, Brice Sorli

28.03.2017 | Technical Paper | Ausgabe 6/2017

A model for the metal deposition process

Bo Wun Huang, Wen-Ye Huang, Nan-Wem Lin

22.03.2016 | Technical Paper | Ausgabe 6/2017

A single asperity sliding contact model for molecularly thin lubricant

Youfeng Zhang, Andreas A. Polycarpou

26.03.2016 | Technical Paper | Ausgabe 6/2017

Stable electrical, morphological and optical properties of titanium dioxide nanoparticles affected by annealing temperature

Sh. Nadzirah, Uda Hashim, M. Kashif, Shahidah Arina Shamsuddin

28.04.2016 | Technical Paper | Ausgabe 6/2017

Design and development of guided four beam cantilever type MEMS based piezoelectric energy harvester

Shanky Saxena, Ritu Sharma, B. D. Pant

08.04.2016 | Technical Paper | Ausgabe 6/2017

Design of piezoelectric micromachined ultrasonic transducers (pMUTs) for high pressure output

Mingjun Wang, Yufeng Zhou

15.03.2016 | Technical Paper | Ausgabe 6/2017

Generalized fractional magneto-thermo-viscoelasticity

Magdy A. Ezzat, Alaa A. El-Bary

16.04.2016 | Technical Paper | Ausgabe 6/2017

Thermohydrodynamic analysis of micro spherical spiral groove gas bearings under slip flow and surface roughness coupling effect

Kai Feng, Wen-Jun Li, Shen-Bing Wu, Wan-Hui Liu

28.06.2016 | Technical Paper | Ausgabe 6/2017

MEMS based vacuum packaging method of optically readable infrared focal plane array

Fei Feng, Yunsheng Zhang, Fan Luo, Xudong Wei, Xiaohong Ge, Yuelin Wang, Xinxin Li

25.04.2016 | Technical Paper | Ausgabe 6/2017

Silicon tip sharpening based on thermal oxidation technology

Huan He, Jinying Zhang, Jinling Yang, Fuhua Yang

08.03.2016 | Technical Paper | Ausgabe 6/2017

Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials

Jafar Alvankarian, Burhanuddin Yeop Majlis

19.05.2016 | Technical Paper | Ausgabe 6/2017

Free transverse vibration analysis of size dependent Timoshenko FG cracked nanobeams resting on elastic medium

Mahdi Soltanpour, Majid Ghadiri, Ali Yazdi, Mohsen Safi

11.05.2016 | Technical Paper | Ausgabe 6/2017

High precision tracking of a piezoelectric positioner using a discrete-time sliding mode control

Geng Wang, Yanru Zhao, Yeming Zhang, Chunchao Chen

31.03.2016 | Technical Paper | Ausgabe 6/2017

Distilling determination of water content in hydraulic oil with a ZnO/glass surface acoustic wave device

Zebing Mao, Jiuxuan Zhao, Weipeng Xuan, Wenbo Wang, Jikui Luo, Jin Xie

18.04.2016 | Technical Paper | Ausgabe 6/2017

A flexible three-axial capacitive tactile sensor with multilayered dielectric for artificial skin applications

Ying Huang, Haitao Yuan, Wenqing Kan, Xiaohui Guo, Caixia Liu, Ping Liu

03.06.2016 | Technical Paper | Ausgabe 6/2017

A small size Ka band six-bit DMTL phase shifter using new design of MEMS switch

Saied Afrang, Keyvan Samandari, Ghader Rezazadeh

28.06.2016 | Technical Paper | Ausgabe 6/2017

Stress reduction method in fabrication of a multi-scale inertial switch with ultra-high aspect ratio

Liqun Du, Shengli Chen, Yousheng Tao, Lei Luo, Ming Zhao, Tong Yang, Shuangjie Liu, Yongping Hao

09.08.2016 | Technical Paper | Ausgabe 6/2017

Characterizing the nonlinear behaviour of double walled carbon nanotube based nano mass sensor

Ajay M. Patel, Anand Y. Joshi

03.02.2017 | Technical Paper | Ausgabe 6/2017

The fabrication and rapid replication of WR-10 filter with NOA73 materials

Xueli Nan, Binzhen Zhang, Xin Yang, Jianli Cui, Shaolei Ge

30.03.2016 | Technical Paper | Ausgabe 6/2017

Gas-assisted microstructure elastic multiform UV imprint replication molding technology

Cheng-Chang Lien, Yung-Jin Weng, Chun-Yu Tsai, Shih-Hsuan Wu

30.03.2016 | Technical Paper | Ausgabe 6/2017

Design and simulation of a novel RF MEMS shunt capacitive switch with low actuation voltage and high isolation

Somayye Molaei, Bahram Azizollah Ganji

03.05.2016 | Technical Paper | Ausgabe 6/2017

Nonlinear dynamics of MEMS/NEMS resonators: analytical solution by the homotopy analysis method

Farid Tajaddodianfar, Mohammad Reza Hairi Yazdi, Hossein Nejat Pishkenari

26.03.2016 | Technical Paper | Ausgabe 6/2017

A thermal-calorimetric gas flow meter with improved isolating feature

Yousef Valizadeh Yaghmourali, Nima Ahmadi, Ebrahim Abbaspour-sani

02.04.2016 | Technical Paper | Ausgabe 6/2017

PMMA microfluidic chip fabrication using laser ablation and low temperature bonding with OCA film and LOCA

Kan Liu, Jianzhen Xiang, Zhao Ai, Shoukun Zhang, Yi Fang, Ting Chen, Qiongwei Zhou, Songzhan Li, Shengxiang Wang, Nangang Zhang

17.08.2016 | Technical Paper | Ausgabe 6/2017

Characterization of RF sputtered thin film potassium sodium niobate (KNN) with silicon and nickel electrodes

Ali Madani, Ridha Ben Mrad, Anthony N. Sinclair

31.05.2016 | Technical Paper | Ausgabe 6/2017

Design of compact multiband pattern diversity antenna for WiMax, LTE and WLAN applications

Ramkrishnan B Kasyap, Gourang Namdeo Mulay

28.07.2016 | Technical Paper | Ausgabe 6/2017

Experimental and numerical investigation of flexibility of ITO electrode for application in flexible electronic devices

Hoon Sun Jung, Kyoungtae Eun, Yong Taek Kim, Eun Kyung Lee, Sung-Hoon Choa

28.04.2016 | Technical Paper | Ausgabe 6/2017

Fluid mixing in a swirl-inducing microchannel with square and T-shaped cross-sections

S.-W. Huang, C.-Y. Wu, B.-H. Lai, Y.-C. Chien

10.05.2016 | Technical Paper | Ausgabe 6/2017

Silicon-on-quartz bonding based SPR chip

Yeonsu Lee, Sung-min Sim, Eduardo Fontana, Ignacio Llamas-Garro, Gustavo Oliveira Cavalcanti, Jung-Mu Kim

13.06.2016 | Technical Paper | Ausgabe 6/2017

Comparison analysis of energy loss between micro clamped–clamped and clamped-free beam in vertical motion flux modulation magnetic sensor

Wenyin Li, Mengchun Pan, Xuezhong Wu, Dingbang Xiao, Wugang Tian, Jiafei Hu, Zhanqiang Hou, Jianqiang Zhao, Jinghua Hu

17.05.2016 | Technical Paper | Ausgabe 6/2017

Design and characteristic evaluation of a novel amphibious spherical robot

Jian Guo, Shuxiang Guo, Liguo Li

13.04.2016 | Technical Paper | Ausgabe 6/2017

Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

Ju Liao, Jingjing Wang, Nannan Li, Yinfang Zhu, Jinying Zhang, Jinling Yang, Fuhua Yang

30.04.2016 | Technical Paper | Ausgabe 6/2017

A new approach to design safe-supported HDD against random excitation by using optimization of rubbers spatial parameters

Seyed Rashid Alavi, Mehdi Rahmati, Saeed Ziaei-Rad

01.04.2016 | Technical Paper | Ausgabe 6/2017

Small scale effect on the pull-in instability and vibration of graphene sheets

K. F. Wang, B. L. Wang, S. Zeng

12.05.2016 | Technical Paper | Ausgabe 6/2017

Analysis of phase drift based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

Huichao Shi, Shangchun Fan, Yuwen Zhang

29.03.2016 | Technical Paper | Ausgabe 6/2017

Effect of Ge interface control layer on the interfacial and electrical properties of TaYOx thin films on GaAs substrates

P. S. Das, A. Biswas

07.05.2016 | Technical Paper | Ausgabe 6/2017

Micro-pillars enhanced all vanadium redox flow batteries and the effect of assembly torque on the electrochemical performance

Shi-Wei Luo, Shyong Lee, Yiin-Kuen Fuh

02.05.2016 | Technical Paper | Ausgabe 6/2017

Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer

Jun-Ho Kim, Haesoo Jeong, Seung-Ki Lee, Chang-Hyeon Ji, Jae-Hyoung Park

09.06.2016 | Technical Paper | Ausgabe 6/2017

Replication of large scale micro pillar array with different diameters by micro injection molding

Mancang Song, Hui Zhao, Junshan Liu, Chong Liu, Jingmin Li

03.06.2016 | Technical Paper | Ausgabe 6/2017

New simulation approach for tuneable trapezoidal and rectangular piezoelectric bimorph energy harvesters

Mohammed Salim, Hanim Salleh, Eric Wooi Kee LOH, Mhd Khir, Dhia Salim

12.05.2016 | Technical Paper | Ausgabe 6/2017

High performance suspended spiral inductor and band-pass filter by wafer level packaging technology

Tao Zheng, Gaowei Xu, Le Luo

13.07.2016 | Technical Paper | Ausgabe 6/2017

Study on comparing WO3 and W18O49 gas sensing abilities under NO2 environment

C. T. Pan, C. Y. Su, Y. C. Luo

20.04.2016 | Technical Paper | Ausgabe 6/2017

Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect

Kimberly L. Harrison, William A. Clary, J. Provine, Roger T. Howe

21.05.2016 | Technical Paper | Ausgabe 6/2017

A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer

S. S. Singh, V. N. Avvaru, S. Veerla, A. K. Pandey, P. Pal

08.06.2016 | Technical Paper | Ausgabe 6/2017

Ultrasonically manufactured microfluidic device for yeast analysis

Tim Runge, Johannes Sackmann, Werner Karl Schomburg, Lars Mathias Blank

05.07.2016 | Technical Paper | Ausgabe 6/2017

Buckling analysis of biaxially compressed double-layered graphene sheets with various boundary conditions based on nonlocal elasticity theory

M. E. Golmakani, M. N. Sadraee Far

29.07.2016 | Technical Paper | Ausgabe 6/2017

An improved analytical and finite element method model of nanoelectromechanical system based micromachined ultrasonic transducers

Reshmi Maity, Niladri Pratap Maity, R. K. Thapa, Srimanta Baishya

30.04.2016 | Technical Paper | Ausgabe 6/2017

A modified model for dynamic instability of CNT based actuators by considering rippling deformation, tip-charge concentration and Casimir attraction

Hamid M. Sedighi, Nazanin Farjam

12.05.2016 | Technical Paper | Ausgabe 6/2017

Effect of fused silica surface wettability on thermal reflow of polymer microlens arrays

D. Jucius, V. Grigaliūnas, A. Lazauskas, E. Sapeliauskas, B. Abakevičienė, S. Smetona, S. Tamulevičius

20.10.2016 | Technical Paper | Ausgabe 6/2017

Investigation of the anti-adhesion layers for nanoimprint molding

C. T. Pan, T. L. Yang, C. Y. Su, C. H. Chao, Z. K. Wang, S. C. Shen

23.03.2016 | Technical Paper | Ausgabe 6/2017

Uncooled microbolometer system-level co-simulation using finite element analysis method and intellectual property core

Chao Chen, Xing Zheng, Yun Zhou, Jianghui Dong

18.05.2016 | Technical Paper | Ausgabe 6/2017

Structural, optical and electrical investigations of Cu2Zn1-xCdxSnS4/Si quinternary alloy nanostructures synthesized by spin coating technique

A. S. Ibraheam, Y. Al-Douri, U. Hashim, M. Ameri, A. Bouhemadou, R. Khenata

29.07.2016 | Technical Paper | Ausgabe 6/2017

Modal and fatigue analysis of critical components of an amphibious spherical robot

Shuxiang Guo, Yanlin He, Liwei Shi, Shaowu Pan, Kun Tang, Rui Xiao, Ping Guo

06.07.2016 | Technical Paper | Ausgabe 6/2017

Plastic deformation of membrane with mesa silicon microstructure

Wanli Jiang, Dehui Xu, Bin Xiong, Yuelin Wang

30.05.2016 | Technical Paper | Ausgabe 6/2017

A push-pull double-contact MEMS relay fabricated by MetalMUMPs process

Lifeng Wang, Yue Jin

05.07.2016 | Technical Paper | Ausgabe 6/2017

A broad review on desulfation of lead-acid battery for electric hybrid vehicle

Anupama Singh, P. B. Karandikar

28.03.2016 | Technical Paper | Ausgabe 6/2017

Continuous ultra-thin carbon nitride thin film for magnetic hard disk via post nitrogen plasma treatment

Wah Lawrence Ng, Amalina Balqis binti Abu Bakar, Mohammad Azrul Firdhaus bin Azmi, Khoo Wee Shen, Yonggang Meng

23.08.2016 | Technical Paper | Ausgabe 6/2017

Probe system design for three dimensional micro/nano scratching machine

Zhiyong Guo, Yanling Tian, Jia Tian, Xianping Liu, Fujun Wang, Hongjie Zhang, Dawei Zhang

11.07.2016 | Technical Paper | Ausgabe 6/2017

Feature coefficient prediction of micro-channel based on artificial neural network

Liu Huang, Weirong Nie, Xiaofeng Wang, Teng Shen

26.11.2016 | Technical Paper | Ausgabe 6/2017

Tracking control of a piezoelectric actuator with hysteresis compensation using RST digital controller

Irfan Ahmad, Akram M. Abdurraqeeb

10.12.2016 | Erratum | Ausgabe 6/2017

Erratum to: Tracking control of a piezoelectric actuator with hysteresis compensation using RST digital controller

Irfan Ahmad, Akram M. Abdurraqeeb

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