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Microsystem Technologies

Ausgabe 7/2018

Inhalt (35 Artikel)

Review Paper

MEMS based energy harvesting for the Internet of Things: a survey

Hongwen Sun, Minqi Yin, Wangtong Wei, Jiacheng Li, Haibin Wang, Xin Jin

Technical Paper

Investigation of new micromachined coplanar probe for near-field microwave microscopy

Sofiane Ben Mbarek, Fethi Choubani, Bernard Cretin

Technical Paper

Cell therapy using an array of ultrathin hollow microneedles

Florina Silvia Iliescu, Jeremy Choon Meng Teo, Danilo Vrtacnik, Hayden Taylor, Ciprian Iliescu

Technical Paper

Effects of the ‘spring structure’ on the performance of a vibrating plate of the piezoelectric inkjet print-head

Xing Wang, Xiaolei Xiao, Liping Qi, Qiusen Wang, Jiao Dou, Helin Zou

Technical Paper

Design, fabrication and testing of reduced graphene oxide strain gauge based pressure sensor with increased sensitivity

M. S. Manjunath, N. Nagarjuna, G. Uma, M. Umapathy, M. M. Nayak, K. Rajanna

Technical Paper

Use of double-raised-border structure for quality factor enhancement of type II piston mode FBAR

Xinyi Li, Jingfu Bao, Yulin Huang, Benfeng Zhang, Gongbin Tang, Tatsuya Omori, Ken-ya Hashimoto

Technical Paper

Wideband auto-tunable vibration energy harvester using change in centre of gravity

Rohit Somkuwar, Jaya Chandwani, Raghavendra Deshmukh

Technical Paper

Investigation of free vibration response of smart sandwich micro-beam on Winkler–Pasternak substrate exposed to multi physical fields

Ali Ghorbanpour Arani, Hassan BabaAkbar-Zarei, Pouya Pourmousa, Masume Eskandari

Technical Paper

Synthesis, green emission and photosensitivity of Al-doped ZnO film

Deepu Thomas, Kishor Kumar Sadasivuni, Sadiya Waseem, Bijandra Kumar, John-John Cabibihan

Technical Paper

A design method and its CAD prototype system for surface micromachined MEMS devices

Changfu Zhang, Kang Yun, Peiyong Cheng, Haihong Ai

Technical Paper

Thermal performance optimization of Si micro flat heat pipes by Box–Behnken design

Mohammad Hamidnia, Yi Luo, Xiaodong Wang, Gang Jing

Technical Paper

Design of a XYZ scanner for home-made high-speed atomic force microscopy

Kunhai Cai, Xianbin He, Yanling Tian, Xianping Liu, Dawei Zhang, Bijan Shirinzadeh

Technical Paper

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Bahram Azizollah Ganji, Sedighe Babaei Sedaghat, Alberto Roncaglia, Luca Belsito

Technical Paper

Residual stress release for SU-8 structures by water assist ultrasonic

Xingtian Qu, Jinlai Li, Zhifu Yin

Technical Paper

Optimization of a MEMS variable capacitor with high linearity and large tuning ratio

Zhuhao Gong, Huiliang Liu, Xin Guo, Zewen Liu

Technical Paper

A contact-enhanced MEMS inertial switch with electrostatic force assistance and multi-step pulling action for prolonging contact time

Jian Li, Yan Wang, Yue Li, Bo Fu, Yunna Sun, Jinyuan Yao, Guifu Ding, Xiaolin Zhao, Zhuoqing Yang

Technical Paper

Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment

Jing Liu, Hu Cheng, Yanchun Li, Junran Zhang, Futing Yi

Correction

Correction to: A new analytical model for switching time of a perforated MEMS switch

K. Guha, N. M. Laskar, H. J. Gogoi, K. L. Baishnab, K. Srinivasa Rao, N. P. Maity

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