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Zeitschrift

Microsystem Technologies

Microsystem Technologies 8/2011

Ausgabe 8/2011

Inhaltsverzeichnis ( 17 Artikel )

01.08.2011 | Technical Paper | Ausgabe 8/2011

MEMS-based resonant heat engine: scaling analysis

H. Bardaweel, B. S. Preetham, R. Richards, C. Richards, M. Anderson

01.08.2011 | Technical Paper | Ausgabe 8/2011

Tunable magnetic metamaterial based multi-split-ring resonator (MSRR) using MEMS switch components

Xunjun He, Zhiqiu Lv, Bo Liu, Zhihong Li

01.08.2011 | Technical Paper | Ausgabe 8/2011

Simplified molecular gas film lubrication equation and accommodation coefficient effects

Bao-Jun Shi, Jia-Dong Ji, Ting-Yi Yang

01.08.2011 | Technical Paper | Ausgabe 8/2011

Digitally-controlled array of solid-state microcoolers for use in surgery

J. P. Carmo, M. F. Silva, J. F. Ribeiro, R. F. Wolffenbuttel, P. Alpuim, J. G. Rocha, L. M. Gonçalves, J. H. Correia

01.08.2011 | Technical Paper | Ausgabe 8/2011

Formation and optical properties of silver superlattice using hydrazine hydrate as reducing agent

Danhui Zhang, Xiaoheng Liu, Xin Wang

01.08.2011 | Technical Paper | Ausgabe 8/2011

Design, fabrication, and testing of VDP MEMS pressure sensors

Robert Cassel, Ahsan Mian, Todd Kaiser

01.08.2011 | Technical Paper | Ausgabe 8/2011

Multilayer high-aspect-ratio RF coil for NMR applications

C. Y. Hsieh, Y. T. Yeh, L. S. Fan

01.08.2011 | Technical Paper | Ausgabe 8/2011

Design, fabrication and characterization of piezoelectric micro-cantilever operated in liquid environment for ultrasound energy source applications

Kun Hoon Baek, Yeong-Tai Seo, Yong-Seung Bang, Dongyun Lee, Jong-Man Kim, Yong-Kweon Kim

01.08.2011 | Technical Paper | Ausgabe 8/2011

Dynamic simulation of a contact-enhanced MEMS inertial switch in Simulink®

Zhuoqing Yang, Haogang Cai, Guifu Ding, Hong Wang, Xiaolin Zhao

01.08.2011 | Technical Paper | Ausgabe 8/2011

A voltage source model on thermoelectric power sensor based on MEMS technology

De-bo Wang, Xiao-ping Liao

01.08.2011 | Technical Paper | Ausgabe 8/2011

RF-MEMS switch actuation pulse optimization using Taguchi’s method

M. Spasos, K. Tsiakmakis, N. Charalampidis, R. Nilavalan

01.08.2011 | Technical Paper | Ausgabe 8/2011

Comparative analysis of a variety of high-Q capacitively transduced bulk-mode microelectromechanical resonator geometries

Joydeep Basu, Tarun Kanti Bhattacharyya

01.08.2011 | Technical Paper | Ausgabe 8/2011

Investigation of wear resistance and lifetime of diamond-like carbon (DLC) coated glass disk in flying height measurement process

Korakoch Phetdee, Alongkorn Pimpin, Werayut Srituravanich

01.08.2011 | Technical Paper | Ausgabe 8/2011

Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances

M. Mubasher Saleem, Shafaat A. Bazaz

01.08.2011 | Technical Paper | Ausgabe 8/2011

Design and fabrication of PZT microcantilevers with freestanding structure

Ziping Cao, Jinya Zhang, Hiroki Kuwano

01.08.2011 | Technical Paper | Ausgabe 8/2011

Determination of adhesive forces and sticking temperature of coated glasses for the hot-embossing-process

Christian Worsch, Jan Edelmann, Christian Rüssel, Andreas Schubert

01.08.2011 | Technical Paper | Ausgabe 8/2011

RETRACTED ARTICLE: Liquid filtration and particle concentration using a cross-flow filter for microfluidics applications

A. K. Sen, M. Mowlem, H. Morgan

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