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Microsystem Technologies

Ausgabe 8/2016

Inhalt (25 Artikel)

Technical Paper

Studies on contact resistance in graphene based devices

Chen Liang, Yuelin Wang, Tie Li

Technical Paper

Silicon micro-cantilever chemical sensors fabricated in double-layer silicon-on-insulator (SOI) wafer

Chuanzhao Chen, Ying Chen, Pengcheng Xu, Xinxin Li

Technical Paper

Mixed frequency excitation of an electrostatically actuated resonator

Abdallah Ramini, Alwathiqbellah I. Ibrahim, Mohammad I. Younis

Technical Paper

A piezoelectric inertia rotary actuator based on asymmetric clamping mechanism

Ji Jie Ma, Jian Ming Wen, Guang Ming Cheng, Ping Zeng

Technical Paper

Novel combined through-wafer-groove fabrication approach and its application in wafer level packaging of GaAs CCD

Jiaotuo Ye, Shuangfu Wang, Chunsheng Zhu, Gaowei Xu, Le Luo

Technical Paper

Microfabrication of a dual-mode rectangular waveguide filter

Junping Duan, Binzhen Zhang, Anxue Zhang, Jun Liu, Chengyang Xue, Jun Tang, Wanjun Wang

Technical Paper

Analysis of intrinsic damping in vibrating piezoelectric microcantilevers

Huacheng Qiu, Abdallah Ababneh, Dara Feili, Xuezhong Wu, Helmut Seidel

Technical Paper

The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes

Zhanwen Xi, Yun Cao, Pingxin Yu, Weirong Nie, Jiong Wang

Technical Paper

Preliminary mechanical analysis of an improved amphibious spherical father robot

Yanlin He, Liwei Shi, Shuxiang Guo, Shaowu Pan, Zhe Wang

Technical Paper

On-chip whole blood plasma separator based on microfiltration, sedimentation and wetting contrast

Sanghoon Park, Roxana Shabani, Mark Schumacher, Yoon-Seoung Kim, Young Min Bae, Kyeong-Hee Lee, Hyoung Jin Cho

Technical Paper

Effect of mold stiffness on surface flatness of mold-pressed glass

Hiroshi Ikeda, Haruya Kasa, Junji Nishii

Technical Paper

Ultrahigh precision low-cost pinpointed SiO2 patterns nanofabrication by using traditional MEMS fabrication processes

Pengfei Dai, Honglu Zhang, Jie Chao, Chunhai Fan, Yuelin Wang, Tie Li

Technical Paper

Thermomechanical behavior of bulk NiTi shape-memory-alloy microactuators based on bimorph actuation

Alaa AbuZaiter, Marwan Nafea, Ahmad Athif Mohd Faudzi, Suhail Kazi, Mohamed Sultan Mohamed Ali

Technical Paper

Design and analysis a novel RF MEMS switched capacitor for low pull-in voltage application

Zhongliang Deng, Hao Wei, Sen Fan, Jun Gan

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