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2016 | OriginalPaper | Buchkapitel

CMOS MEMS Fabrication Technologies

verfasst von : Dr. Hongwei Qu, Prof. Huikai Xie

Verlag: Springer Netherlands

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CMOS (complementary metal-oxide-semiconductor); CMOS-MEMS; Integration; MEMS (micro-electro-mechanical systems) …

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Titel: CMOS MEMS Fabrication Technologies
verfasst von: Dr. Hongwei Qu
Prof. Huikai Xie
Verlag: Springer Netherlands
DOI: https://doi.org/10.1007/978-90-481-9751-4_310

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