2018 | OriginalPaper | Buchkapitel
State of the art
verfasst von : Alexey Ivanov
Erschienen in: Silicon Anodization as a Structuring Technique
Verlag: Springer Fachmedien Wiesbaden
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Electrochemical etching of silicon in fluoride containing electrolytes, also named as anodization process, is a fascinating process which provides material for research for more than half a century. The first report on anodization of silicon (and germanium) was published by Uhlir [78]. Further investigations of silicon anodization were performed ten years later by Memming and Schwandt [79].