Structural-Kinematic Analysis and Synthesis of Measuring Systems Using a Scanning Probe Microscope

The modern stage in the development of nanotechnology is characterized by a fundamentally new approach to the design of high-precision information-measuring systems (MIS) of mechanical quantities. In this regard, the system approach to solving the problems of structural-kinematic analysis and the synthesis of measuring systems based on scanning probe microscopes (SPM) for various purposes and developing the classification of the basic mechanical part of SPM is topical. Based on the analysis of functional problems of scanning probe microscope, an object-oriented structure of the basic measuring system for working in the nanometer range. An algorithm is developed for combining the control contours of a mathematical model, the measured nano-object, and the parametrization of the trajectory of the measuring sensor along with the object. In the article, the problems of the choice of the velocity of the measuring tip moving along a given trajectory with allowance for a limited number of degrees of freedom are solved, as well as the stabilization of the mechanical part of the system with small errors in the positioning of the measuring tip.