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Microsystem Technologies
Erschienen in: Microsystem Technologies 3/2020

19.09.2019 | Technical Paper

Study on the stability of gas film in electrochemical discharge machining of ultra-white glass micro array holes

verfasst von: Liang Huang, Yan Cao, Feng Jia, Yan Lei

Erschienen in: Microsystem Technologies | Ausgabe 3/2020

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Abstract

With the widespread application of non-conducting tough materials, such as ultra-white glass in MEMS recent years, many difficulties have arisen in the processing of these kind of material with eigen-structure characteristics. By analyzing the generation principle of interelectrode gas film of this kind of material, the breakdown characteristics of gas film under different power supply parameters are studied, and the relationship between the process parameters and the forming quality, material removal rate under the condition of gas film stability is further analyzed, so as to realize the optimal selection and the ultra-white glass micro array holes successfully machined.
Vorheriger Artikel Dusty flow with different water based nanoparticles along a paraboloid revolution: thermal analysis
Nächster Artikel Hot embossing of microstructure with moving induction heating and gas-assisted pressuring

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Literatur
Alali M, Maillard P, Wuthrich R (2009) Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges. Micromech Microeng 19:45001–45007CrossRef
Arab J, Mishra DK, Kannojia HK, Adhale P, Dixit P (2019) Fabrication of multiple through-holes in non-conductive materials by electrochemical discharge machining for RF MEMS packaging. J Mater Process Technol 271:542–553CrossRef
Cao XD, Kim BH, Chu CN (2009) Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining. Int J Precis Eng Manuf 33:459–465CrossRef
Dafa SV, Waghmare CA (2015) Optimization of process parameters in electrochemical discharge machining (ECDM). J Basic Appl Res 2:1339–1343
Fascio V, Wuthrich R, Bleiler H (2004) Spark assisted chemical engraving in the light of electrochemistry. Electrochim Acta 49:3997–4003CrossRef
Gerhard C, Stappenbeck M (2018) Metallic, 3D-printed, k-band-stepped, double-ridged square horn antennas. Appl Sci Basel 8:32–35
Gupta PK (2018) Effect of electrolyte level during electro chemical discharge machining of glass. J Electrochem Soc 165:E279–E281CrossRef
Han MS, Min BK, Sang JL (2008) Modeling gas film formation in electrochemical discharge machining processes using a side-insulated electrode. J Micromech Microeng 18:45019–45026CrossRef
Jahan MP, Perveen A, Rumsey AM (2019) A review on the conventional, non-conventional, and hybrid micromachining of glassMach. Mach Sci Technol 23:264–238CrossRef
Jain VK, Dixit PM, Pandey PM (1999) On the analysis of the electrochemical spark machining process. Int J Mach Tool Manuf 39:165–186CrossRef
Jiang B, Lan S, Ni J, Zhang Z (2014) Experimental investigation of spark generation in electrochemical discharge machining of non-conducting materials. J Mater Process Technol 214:892–898CrossRef
Jiang BY, Lan SH, Wil TK (2015a) Modeling and experimental investigation of gas film in micro-electrochemical discharge machining process. Int J Precis Eng Manuf 90:8–15
Jiang B, Lan S, Wilt K (2015b) Modeling and experimental investigation of gas film in micro-electrochemical discharge machining process. Int J Mach Tool Manuf 90:8–15CrossRef
Julfekar A, Pratik A, Dileep KM (2019) Micro array hole formation in glass using electrochemical discharge machining. Procedia Manuf 34:349–354CrossRef
Kolhekar KR, Sundaram M (2018) Abrasive jet turning of glass and PMMA rods and the micro-machining of helical channels. Precis Eng 53:203CrossRef
Kurafuji H (1968) Electrical discharge drilling of glass. Ann CIRP 16:415–419
Laio YS, Wu LC, Peng WY (2013) A study to improve drilling quality of electrochemical discharge machining (ECDM) process. Procedia CRIP 6:609–614CrossRef
Li HZ, Wang J, Kwok N, Nguyen T, Yeoh GH (2017) A study of the micro-hole geometry evolution on glass by abrasive air-jet micromachining. J Manuf Process 31:156–161CrossRef
Liu Y, Wang MY (2017) Experimental investigation of micro wire electrochemical discharge machining by using a rotating helical tool. J Manuf Process 29:265–271CrossRef
Madhu S, Balasubramanian M (2017) Effect of abrasive jet process parameters on machining glass fibre reinforced polymer composite. Materialwiss Werkst 48:1146–1157CrossRef
Madhu S, Balasubramanian M (2018) Impact of nozzle design on surface roughness of abrasive jet machined glass fibre reinforced polymer composites. Silicon 10:2453–2462CrossRef
Mehrabi F, Farahnakian M, Elhami S, Razfar MR (2018) Application of electrolyte injection to the electro-chemical discharge machining (ECDM) on the optical glass. J Mater Process Tech 255:665–672CrossRef
Mishra DK, Verma AK, Arab J, Maria D, Dixit P (2019) Numerical and experimental investigations into microchannel formation in glass substrate using electrochemical discharge machining. J Micromech Microeng 29:1–7CrossRef
Nguyen K, Lee PA, Kim BH (2015) Experimental investigation of ECDM for fabricating micro structures of quartz. Int J Precis Eng Manuf 16:5–12CrossRef
Nouhi A, Spelt JK, Papini M (2018) Study of gas film characterization and its effect in electrochemical discharge machining. Precis Eng 53:151CrossRef
Peters D, Drallmeier J, Bristow DA, Landers RG, Kinzel E (2018) Sensing and control in glass additive manufacturing. Mechatronics 56:188–197CrossRef
Re Y, Yoshizaki R, Miyamoto N, Sugita N (2018) Control of thermal boundary resistance by increasing Ge ratio in nanocomposite with MnSi1.7 and SiGe. Appl Phys Lett 113:1–6
Sabahi N, Razfar MR (2018) Investigating the effect of mixed alkaline electrolyte (NaOH + KOH) on the improvement of machining efficiency in 2D electrochemical discharge machining (ECDM). Int J Adv Manuf Technol 95:643–657CrossRef
Sharma A, Jain V, Gupta D (2018) Characterization of chipping and tool wear during drilling of float glass using rotary ultrasonic machining. Measurment 128:254–263
Sharma A, Jain V, Gupta D (2019) Comparative analysis of chipping mechanics of float glass during rotary ultrasonic drilling and conventional drilling: For multi-shaped tools. Mach Sci Technol 23:547–568CrossRef
Tsutsumi C, Okano K, Suto T (1993) High quality machining of ceramics. J Mater Process Tech 37:639–654CrossRef
Wang Z, Li HN, Yu TB, Wang ZX, Zhao J (2019) Analytical model of dynamic and overlapped footprints in abrasive air jet polishing of optical glass. Int J Mach Tool Manuf 141:59–77CrossRef
Wuthrich R, Fascio V (2005) Machining of non-conducting materials using electrochemical discharge phenomenon—an overview. Int J Mach Tool Manuf 45:1095–1108CrossRef
Yang F, Han GW, Yang J, Zhang M, Ning J (2019) Research on Wafer-Level MEMS packaging with through-glass vias. Micromachines 10:1–5
Zhao XD, Chen KF, Jie Y (2019) Effect of chloride ion concentration on corrosion of Q235 steel in sulfate-reducing bacteria containing solution. Int J Electrochem Sci 14:875–885CrossRef
Metadaten
Titel
Study on the stability of gas film in electrochemical discharge machining of ultra-white glass micro array holes
verfasst von
Liang Huang
Yan Cao
Feng Jia
Yan Lei
Publikationsdatum
19.09.2019
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 3/2020
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-019-04623-9

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